A multiple-state micro-mechanical programmable memory

Microelectronic Engineering

Volumn 88, Issue 11, 2011, Pages 3231-3234

  Cabrera, Rafmag ^a   Merced, Emmanuelle ^a   Dávila, Noraica ^a   Fernández, Félix E ^a   Sepúlveda, Nelson ^b  

^a UNIVERSITY OF PUERTO RICO   (Puerto Rico)

^b Michigan State University   (United States)

Author keywords

Micro mechanical memory devices; Photo thermal actuation; Vanadium dioxide

Indexed keywords

ABSOLUTE DISPLACEMENT; MECHANICAL STATE; MICRO-MECHANICAL; PHOTO-THERMAL; PROGRAMMABLE MEMORY; SILICON CANTILEVER; TIP DISPLACEMENT; VANADIUM DIOXIDE;

VANADIUM;

LASER PULSES;

EID: 80053358590     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2011.08.004     Document Type: Article

References (7)

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