Efficient magnetic microactuator with an enclosed magnetic core

Journal of Microlithography, Microfabrication and Microsystems

Volumn 1, Issue 2, 2002, Pages 144-149

  Ko, C H ^a   Yang, J J ^b   Chiou, J C ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Core; Electromagnetic; Finite element; Magnetic circuit; Microactuator; Spiral type

Indexed keywords

EID: 84881003073     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1484161     Document Type: Article

References (11)

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