Data mining for optimizing IC feature designs to enhance overall wafer effectiveness

IEEE Transactions on Semiconductor Manufacturing

Volumn 27, Issue 1, 2014, Pages 71-82

  Chien, Chen Fu ^a   Hsu, Chia Yu ^b  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b YUAN ZE UNIVERSITY   (Taiwan)

Author keywords

Data mining; Design for manufacturing; Fab economics; Manufacturing informatics; Manufacturing intelligence; Overall wafer effectiveness; Yield optimization

Indexed keywords

EID: 84894041272     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2013.2291838     Document Type: Article

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