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Volumn 65, Issue 1, 2013, Pages 117-127

Overall Wafer Effectiveness (OWE): A novel industry standard for semiconductor ecosystem as a whole

Author keywords

Fab economics; Industry standard; Manufacturing strategy; Overall Wafer Effectiveness (OWE); Semiconductor ecosystem; Wafer productivity

Indexed keywords

COMPETITION; ECOLOGY; ECOSYSTEMS; ELECTRONICS INDUSTRY; MANUFACTURE; PRODUCTIVITY; SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 84879695405     PISSN: 03608352     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cie.2011.11.024     Document Type: Article
Times cited : (47)

References (41)
  • 2
    • 0022043635 scopus 로고
    • Algorithm for unconstrained two-dimensional guillotine cutting
    • Beasley, J. E. (1985). Algorithm for unconstrained two-dimensional guillotine cutting. Journal of the Operational Research Society, 36(4), 297-306.
    • (1985) Journal of the Operational Research Society , vol.36 , Issue.4 , pp. 297-306
    • Beasley, J.E.1
  • 3
    • 1942530662 scopus 로고    scopus 로고
    • Run-To-run control and performance monitoring of overlay in semiconductor manufacturing
    • Bode, C. A., Ko, B. S., & Edgar, T. F. (2004). Run-To-run control and performance monitoring of overlay in semiconductor manufacturing. Control Engineering Practice, 12, 893-900.
    • (2004) Control Engineering Practice , vol.12 , pp. 893-900
    • Bode, C.A.1    Ko, B.S.2    Edgar, T.F.3
  • 5
    • 0242301625 scopus 로고    scopus 로고
    • Design of sampling strategy for measuring and compensating overlay errors in semiconductor manufacturing
    • Chien, C.-F., Chang, K.-H., & Chen, C. (2003). Design of sampling strategy for measuring and compensating overlay errors in semiconductor manufacturing. International Journal of Production Research, 41(11), 2547-2561.
    • (2003) International Journal of Production Research , vol.41 , Issue.11 , pp. 2547-2561
    • Chien, C.-F.1    Chang, K.-H.2    Chen, C.3
  • 7
    • 33947276184 scopus 로고    scopus 로고
    • Using ga and ctpn for modeling the optimizationbased schedule generator of a generic production scheduling system
    • Chien, C.-F., & Chen, C. (2007). Using GA and CTPN for modeling the optimizationbased schedule generator of a generic production scheduling system. International Journal of Production Research, 45(8), 1763-1789.
    • (2007) International Journal of Production Research , vol.45 , Issue.8 , pp. 1763-1789
    • Chien, C.-F.1    Chen, C.2
  • 8
    • 33847023612 scopus 로고    scopus 로고
    • Construct the oge for promoting tool group productivity in semiconductor manufacturing
    • Chien, C.-F., Chen, H., Wu, J.-Z., & Hu, C. (2007). Construct the OGE for promoting tool group productivity in semiconductor manufacturing. International Journal of Production Research, 45(3), 509-524.
    • (2007) International Journal of Production Research , vol.45 , Issue.3 , pp. 509-524
    • Chien, C.-F.1    Chen, H.2    Wu, J.-Z.3    Hu, C.4
  • 9
    • 78049265768 scopus 로고    scopus 로고
    • Manufacturing intelligence for semiconductor demand forecast based on technology diffusion and product life cycle
    • Chien, C.-F., Chen, Y., & Peng, J. (2010). Manufacturing intelligence for semiconductor demand forecast based on technology diffusion and product Life cycle. International Journal of Production Economics, 128(2), 496-509.
    • (2010) International Journal of Production Economics , vol.128 , Issue.2 , pp. 496-509
    • Chien, C.-F.1    Chen, Y.2    Peng, J.3
  • 10
    • 0033326954 scopus 로고    scopus 로고
    • An iterative cutting procedure for determining the optimal wafer exposure pattern
    • Chien, C.-F., Hsu, S., & Chen, C. (1999). An iterative cutting procedure for determining the optimal wafer exposure pattern. IEEE Transactions on Semiconductor Manufacturing, 12(3), 375-377.
    • (1999) IEEE Transactions on Semiconductor Manufacturing , vol.12 , Issue.3 , pp. 375-377
    • Chien, C.-F.1    Hsu, S.2    Chen, C.3
  • 13
    • 33747633362 scopus 로고    scopus 로고
    • A novel method for determining machine subgroups and backups with an empirical study for semiconductor manufacturing
    • Chien, C.-F., & Hsu, C.-Y. (2006). A novel method for determining machine subgroups and backups with an empirical study for semiconductor manufacturing. Journal of Intelligent Manufacturing, 17(4), 429-440.
    • (2006) Journal of Intelligent Manufacturing , vol.17 , Issue.4 , pp. 429-440
    • Chien, C.-F.1    Hsu, C.-Y.2
  • 14
    • 84879023870 scopus 로고    scopus 로고
    • Beyond make-or-buy: Cross-company short-Term capacity backup in semiconductor industry ecosystem
    • doi:10.1007/s10696-011-9113-4
    • Chien, C.-F., & Kuo, R. (2011). Beyond make-or-buy: Cross-company short-Term capacity backup in semiconductor industry ecosystem. Flexible Services and Manufacturing Journal, 1-32. doi:10.1007/s10696-011-9113-4.
    • (2011) Flexible Services and Manufacturing Journal , pp. 1-32
    • Chien, C.-F.1    Kuo, R.2
  • 16
    • 0344033890 scopus 로고    scopus 로고
    • Analyzing repair decisions in the site imbalance problem of semiconductor test machines
    • Chien, C.-F., & Wu, J.-Z. (2003). Analyzing repair decisions in the site imbalance problem of semiconductor test machines. IEEE Transactions on Semiconductor Manufacturing, 36(4), 704-711.
    • (2003) IEEE Transactions on Semiconductor Manufacturing , vol.36 , Issue.4 , pp. 704-711
    • Chien, C.-F.1    Wu, J.-Z.2
  • 18
    • 0042887637 scopus 로고    scopus 로고
    • A new scheduling approach using combined dispatching criteria in wafer fabs
    • Dabbas, R. M., & Fowler, J. W. (2003). A new scheduling approach using combined dispatching criteria in wafer fabs. IEEE Transactions on Semiconductor Manufacturing, 16(3), 501-510.
    • (2003) IEEE Transactions on Semiconductor Manufacturing , vol.16 , Issue.3 , pp. 501-510
    • Dabbas, R.M.1    Fowler, J.W.2
  • 21
    • 0024480972 scopus 로고
    • An algebraic expression to count the number of chips on a wafer
    • Ferris-Prabhu, A. (1989). An algebraic expression to count the number of chips on a wafer. IEEE Circuits and Devices Magazine, 37, 39.
    • (1989) IEEE Circuits and Devices Magazine , vol.37 , pp. 39
    • Ferris-Prabhu, A.1
  • 22
    • 0011521444 scopus 로고    scopus 로고
    • Clockspeed-based strategies for supply chain design
    • Fine, C. H. (2000). Clockspeed-based strategies for supply chain design. Production and Operations Management, 9(3), 213-221.
    • (2000) Production and Operations Management , vol.9 , Issue.3 , pp. 213-221
    • Fine, C.H.1
  • 23
    • 1342308269 scopus 로고    scopus 로고
    • Extrusion spin coating: An efficient and deterministic photoresist coating method in microlithography
    • Han, S., Derksen, J., & Chu, J. (2004). Extrusion spin coating: An efficient and deterministic photoresist coating method in microlithography. IEEE Transactions on Semiconductor Manufacturing, 17(1), 12-21.
    • (2004) IEEE Transactions on Semiconductor Manufacturing , vol.17 , Issue.1 , pp. 12-21
    • Han, S.1    Derksen, J.2    Chu, J.3
  • 24
    • 0031074995 scopus 로고    scopus 로고
    • A dh/kd algorithm: A hybrid approach for unconstrained twodimension cutting problem
    • Hifi, M. (1997). A DH/KD algorithm: A hybrid approach for unconstrained twodimension cutting problem. European Journal of Operational Research, 97(1), 41-52.
    • (1997) European Journal of Operational Research , vol.97 , Issue.1 , pp. 41-52
    • Hifi, M.1
  • 25
    • 33846922481 scopus 로고    scopus 로고
    • Hybrid data mining approach for pattern extraction from wafer bin map to improve yield in semiconductor manufacturing
    • Hsu, S., & Chien, C.-F. (2007). Hybrid data mining approach for pattern extraction from wafer bin map to improve yield in semiconductor manufacturing. International Journal of Production Economics, 107(1), 88-103.
    • (2007) International Journal of Production Economics , vol.107 , Issue.1 , pp. 88-103
    • Hsu, S.1    Chien, C.-F.2
  • 26
    • 78651071873 scopus 로고    scopus 로고
    • Manufacturing intelligence to exploit the value of production and tool data to reduce cycle time
    • Kuo, C., Chien, C.-F., & Chen, C. (2011). Manufacturing intelligence to exploit the value of production and tool data to reduce cycle time. IEEE Transactions on Automation Science and Engineering, 8(1), 103-111.
    • (2011) IEEE Transactions on Automation Science and Engineering , vol.8 , Issue.1 , pp. 103-111
    • Kuo, C.1    Chien, C.-F.2    Chen, C.3
  • 27
    • 0031078236 scopus 로고    scopus 로고
    • Closed-loop measurement of equipment efficiency and equipment capacity
    • Leachman, R. C. (1997). Closed-loop measurement of equipment efficiency and equipment capacity. IEEE Transactions on Semiconductor Manufacturing, 10(1), 84-97.
    • (1997) IEEE Transactions on Semiconductor Manufacturing , vol.10 , Issue.1 , pp. 84-97
    • Leachman, R.C.1
  • 31
    • 0000793139 scopus 로고
    • Cramming more components onto integrated circuits
    • Moore, G. E. (1965). Cramming more components onto integrated circuits. Electronics, 38(8), 114-117.
    • (1965) Electronics , vol.38 , Issue.8 , pp. 114-117
    • Moore, G.E.1
  • 32
    • 0027603238 scopus 로고
    • Predators and prey: A new ecology of competition
    • (May-June
    • Moore, J. F. (1993). Predators and prey: A new ecology of competition. Harvard Business Review (May-June), 75-86.
    • (1993) Harvard Business Review , pp. 75-86
    • Moore, J.F.1
  • 34
    • 34548455092 scopus 로고    scopus 로고
    • Overall throughput effectiveness (ote) metric for factory-level performance monitoring and bottleneck detection
    • Muthiah, K. M. N., & Huang, S. H. (2006). Overall throughput effectiveness (OTE) metric for factory-level performance monitoring and bottleneck detection. International Journal of Production Research, 45(20), 4753-4769.
    • (2006) International Journal of Production Research , vol.45 , Issue.20 , pp. 4753-4769
    • Muthiah, K.M.N.1    Huang, S.H.2
  • 36
    • 28644446228 scopus 로고    scopus 로고
    • Technology decision to minimize 450 mm wafer size transition risk
    • Pettinato, J., & Pillai, D. (2005). Technology decision to minimize 450 mm wafer size transition risk. IEEE Transactions on Semiconductor Manufacturing, 18(4), 501-509.
    • (2005) IEEE Transactions on Semiconductor Manufacturing , vol.18 , Issue.4 , pp. 501-509
    • Pettinato, J.1    Pillai, D.2
  • 37
    • 0006531920 scopus 로고    scopus 로고
    • SEMI E79-0200. Semiconductor Equipment and Material International, Mountain View, CA
    • SEMI E79-0200 (2000). Standard for definition and measurement of equipment productivity. Semiconductor Equipment and Material International, Mountain View, CA.
    • (2000) Standard for Definition and Measurement of Equipment Productivity


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.