Data mining for improving a cleaning process in the semiconductor industry

IEEE Transactions on Semiconductor Manufacturing

Volumn 15, Issue 1, 2002, Pages 91-101

  Braha, Dan ^a   Shmilovici, Armin ^b  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b BEN GURION UNIVERSITY OF THE NEGEV   (Israel)

Author keywords

Composite classifiers; Data mining; Laser cleaning; Machine learning

Indexed keywords

DATA MINING; DECONTAMINATION; LASER APPLICATIONS; LASER BEAMS; NEURAL NETWORKS;

LASER CLEANING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0036474654     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.983448     Document Type: Article

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