메뉴 건너뛰기




Volumn 8, Issue 1, 2011, Pages 103-111

Manufacturing intelligence to exploit the value of production and tool data to reduce cycle time

Author keywords

Cycle time; neural networks (NNs); tool dedication; wafer fabrication; waiting time constraint; work in process (WIP)

Indexed keywords

COMPARISON RESULT; COMPETITIVE ADVANTAGE; CRITICAL INPUTS; CYCLE TIME; CYCLE TIME REDUCTION; EMPIRICAL DATA; LITTLE RESEARCH; LITTLE'S LAW; PRODUCTION DATA; QUEUEING MODEL; SEMICONDUCTOR COMPANIES; SEMICONDUCTOR INDUSTRY; SEMICONDUCTOR WAFER FABRICATION; TOOLSETS; WAFER FABRICATIONS; WAITING-TIME; WORK-IN-PROCESS;

EID: 78651071873     PISSN: 15455955     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASE.2010.2040999     Document Type: Article
Times cited : (81)

References (31)
  • 1
    • 84952240555 scopus 로고
    • A review of production planning and scheduling models in the semiconductor industry part I: System characteristics, performance evaluation and production planning
    • R. Uzsoy, C. Lee, and L. A. Martin-Vega, "A review of production planning and scheduling models in the semiconductor industry part I: System characteristics, performance evaluation and production planning," IIE Trans., vol. 24, no. 4, pp. 47-60, 1992.
    • (1992) IIE Trans. , vol.24 , Issue.4 , pp. 47-60
    • Uzsoy, R.1    Lee, C.2    Martin-Vega, L.A.3
  • 2
    • 0037151803 scopus 로고    scopus 로고
    • Process optimization via neural network metamodeling
    • M. Chambers and C. A. Mount-Campbell, "Process optimization via neural network metamodeling," Int. J. Prod. Econ., vol. 79, no. 2, pp. 93-100, 2002.
    • (2002) Int. J. Prod. Econ. , vol.79 , Issue.2 , pp. 93-100
    • Chambers, M.1    Mount-Campbell, C.A.2
  • 3
    • 35348899105 scopus 로고    scopus 로고
    • Queueing theory for semiconductor manufacturing systems: A survey and open problems,"
    • J. G. Shanthikumar, S. Ding, and M. T. Zhang, "Queueing theory for semiconductor manufacturing systems: A survey and open problems," IEEE Trans. Autom. Sci. Eng., vol. 4, no. 4, pp. 513-522, 2007.
    • (2007) IEEE Trans. Autom. Sci. Eng. , vol.4 , Issue.4 , pp. 513-522
    • Shanthikumar, J.G.1    Ding, S.2    Zhang, M.T.3
  • 4
    • 34249729418 scopus 로고    scopus 로고
    • A novel timetabling algorithm for a furnace process for semiconductor fabrication with constrained waiting and frequency-based setups
    • C.-F. Chien and C. Chen, "A novel timetabling algorithm for a furnace process for semiconductor fabrication with constrained waiting and frequency-based setups," OR Spectrum, vol. 29, no. 3, pp. 391-419, 2007.
    • (2007) OR Spectrum , vol.29 , Issue.3 , pp. 391-419
    • Chien, C.-F.1    Chen, C.2
  • 5
    • 0030212054 scopus 로고    scopus 로고
    • A queueing network model for semiconductor manufacturing,"
    • D. P. Connors, G. E. Feigin, and D. D. Yao, "A queueing network model for semiconductor manufacturing," IEEE Trans. Semicond. Manuf., vol. 9, no. 3, pp. 412-427, 1996.
    • (1996) IEEE Trans. Semicond. Manuf. , vol.9 , Issue.3 , pp. 412-427
    • Connors, D.P.1    Feigin, G.E.2    Yao, D.D.3
  • 6
    • 0035342034 scopus 로고    scopus 로고
    • A total standard WIP estimation method for wafer fabrication
    • Y. Lin and C. Lee, "A total standard WIP estimation method for wafer fabrication," Eur. J. Oper. Res., vol. 131, no. 1, pp. 78-94, 2001.
    • (2001) Eur. J. Oper. Res. , vol.131 , Issue.1 , pp. 78-94
    • Lin, Y.1    Lee, C.2
  • 7
    • 38649143614 scopus 로고    scopus 로고
    • Prediction of vehicle reliability performance using artificial neural networks
    • S. Lolas and O. A. Olatunbosun, "Prediction of vehicle reliability performance using artificial neural networks," Expert Systems With Applications, vol. 34, no. 4, pp. 2360-2369, 2008.
    • (2008) Expert Systems with Applications , vol.34 , Issue.4 , pp. 2360-2369
    • Lolas, S.1    Olatunbosun, O.A.2
  • 8
    • 35348853962 scopus 로고    scopus 로고
    • Practical extensions to cycle time approximations for the G/G/m-queue with applications,"
    • J. R. Morrison and D. P. Martin, "Practical extensions to cycle time approximations for the G/G/m-queue with applications," IEEE Trans. Autom. Sci. Eng., vol. 4, no. 4, pp. 523-532, 2007.
    • (2007) IEEE Trans. Autom. Sci. Eng. , vol.4 , Issue.4 , pp. 523-532
    • Morrison, J.R.1    Martin, D.P.2
  • 9
    • 0035248367 scopus 로고    scopus 로고
    • Cycle-time improvements for photolithography process in semiconductor manufacturing,"
    • E. Akçali, K. Nemoto, and R. Uzsoy, "Cycle-time improvements for photolithography process in semiconductor manufacturing," IEEE Trans. Semicond. Manuf., vol. 14, no. 1, pp. 48-56, 2001.
    • (2001) IEEE Trans. Semicond. Manuf. , vol.14 , Issue.1 , pp. 48-56
    • Akçali, E.1    Nemoto, K.2    Uzsoy, R.3
  • 10
    • 33745929420 scopus 로고    scopus 로고
    • Capacity allocation model for photolithography workstation with the constraints of process window and machine dedication
    • S. H. Chung, C. Y. Huang, and A. H. Lee, "Capacity allocation model for photolithography workstation with the constraints of process window and machine dedication," Prod. Planning Control, vol. 17, no. 7, pp. 678-688, 2006.
    • (2006) Prod. Planning Control , vol.17 , Issue.7 , pp. 678-688
    • Chung, S.H.1    Huang, C.Y.2    Lee, A.H.3
  • 11
    • 46149126445 scopus 로고    scopus 로고
    • Dispatching for make-to-order wafer fabs with machine-dedication and mask set-up characteristics
    • M. Wu, S. Chiou, and C. Chen, "Dispatching for make-to-order wafer fabs with machine-dedication and mask set-up characteristics," Int. J. Prod. Res., vol. 46, no. 14, pp. 3993-4009, 2008.
    • (2008) Int. J. Prod. Res. , vol.46 , Issue.14 , pp. 3993-4009
    • Wu, M.1    Chiou, S.2    Chen, C.3
  • 12
    • 0034249293 scopus 로고    scopus 로고
    • Implementation of modeling and simulation in semiconductor wafer fabrication with time constraints between wet etch and furnace operations,"
    • W. Scholl and J. Domaschke, "Implementation of modeling and simulation in semiconductor wafer fabrication with time constraints between wet etch and furnace operations," IEEE Trans. Semicond. Manuf., vol. 13, no. 3, pp. 273-277, 2000.
    • (2000) IEEE Trans. Semicond. Manuf. , vol.13 , Issue.3 , pp. 273-277
    • Scholl, W.1    Domaschke, J.2
  • 13
    • 24644523596 scopus 로고    scopus 로고
    • Constructing semiconductor manufacturing performance indexes and applying data mining for manufacturing data analysis
    • C.-F. Chien, A. Hsiao, and I. Wang, "Constructing semiconductor manufacturing performance indexes and applying data mining for manufacturing data analysis," J. Chinese Inst. Ind. Eng., vol. 21, no. 4, pp. 313-327, 2004.
    • (2004) J. Chinese Inst. Ind. Eng. , vol.21 , Issue.4 , pp. 313-327
    • Chien, C.-F.1    Hsiao, A.2    Wang, I.3
  • 14
    • 33744727366 scopus 로고    scopus 로고
    • Capacity determination model with time constraints and batch processing in semiconductor wafer fabrication
    • Y. Tu and C. Liou, "Capacity determination model with time constraints and batch processing in semiconductor wafer fabrication," J. Chinese Inst. Ind. Eng., vol. 23, no. 3, pp. 192-199, 2006.
    • (2006) J. Chinese Inst. Ind. Eng. , vol.23 , Issue.3 , pp. 192-199
    • Tu, Y.1    Liou, C.2
  • 15
    • 0034123868 scopus 로고    scopus 로고
    • Neural networks in business: Techniques and applications for the operations researcher
    • K. A. Smith and J. N. D. Gupta, "Neural networks in business: Techniques and applications for the operations researcher," Comput. Oper. Res., vol. 27, no. 11, pp. 1023-1044, 2000.
    • (2000) Comput. Oper. Res. , vol.27 , Issue.11 , pp. 1023-1044
    • Smith, K.A.1    Gupta, J.N.D.2
  • 16
    • 0030285403 scopus 로고    scopus 로고
    • The KDD process for extracting useful knowledge from volumes of data
    • U. Fayyad, G. Piatesky-Shapiro, and P. Smyth, "The KDD process for extracting useful knowledge from volumes of data," Commun. ACM, vol. 39, no. 11, pp. 27-34, 1996.
    • (1996) Commun. ACM , vol.39 , Issue.11 , pp. 27-34
    • Fayyad, U.1    Piatesky-Shapiro, G.2    Smyth, P.3
  • 17
    • 56349103436 scopus 로고    scopus 로고
    • Using rough set theory to recruit and retain high-potential talents for semiconductor manufacturing,"
    • C.-F. Chien and L. Chen, "Using rough set theory to recruit and retain high-potential talents for semiconductor manufacturing," IEEE Trans. Semicond. Manuf., vol. 20, no. 4, pp. 528-541, 2007.
    • (2007) IEEE Trans. Semicond. Manuf. , vol.20 , Issue.4 , pp. 528-541
    • Chien, C.-F.1    Chen, L.2
  • 18
    • 33845660695 scopus 로고    scopus 로고
    • Data mining for yield enhancement in semiconductor manufacturing and an empirical study
    • C.-F. Chien, W. Wang, and J. Cheng, "Data mining for yield enhancement in semiconductor manufacturing and an empirical study," Expert Systems With Applications, vol. 33, no. 1, pp. 192-198, 2007.
    • (2007) Expert Systems with Applications , vol.33 , Issue.1 , pp. 192-198
    • Chien, C.-F.1    Wang, W.2    Cheng, J.3
  • 19
    • 33846922481 scopus 로고    scopus 로고
    • Hybrid data mining approach for pattern extraction from wafer bin map to improve yield in semiconductor manufacturing
    • S.-C. Hsu and C.-F. Chien, "Hybrid data mining approach for pattern extraction from wafer bin map to improve yield in semiconductor manufacturing," Int. J. Prod. Econ., vol. 107, no. 1, pp. 88-103, 2007.
    • (2007) Int. J. Prod. Econ. , vol.107 , Issue.1 , pp. 88-103
    • Hsu, S.-C.1    Chien, C.-F.2
  • 20
    • 33846348286 scopus 로고    scopus 로고
    • Prediction of wind-induced pressures on a large gymnasium roof using artificial neural networks
    • J. Y. Fu, S. G. Liang, and Q. S. Li, "Prediction of wind-induced pressures on a large gymnasium roof using artificial neural networks," Comput. Structures, vol. 85, no. 3-4, pp. 179-192, 2007.
    • (2007) Comput. Structures , vol.85 , Issue.3-4 , pp. 179-192
    • Fu, J.Y.1    Liang, S.G.2    Li, Q.S.3
  • 21
    • 0032656193 scopus 로고    scopus 로고
    • The construction of production performance prediction system for semiconductor manufacturing with artificial neural networks
    • C. L. Huang et al., "The construction of production performance prediction system for semiconductor manufacturing with artificial neural networks," Int. J. Prod. Res., vol. 37, no. 6, pp. 1387-1402, 1999.
    • (1999) Int. J. Prod. Res. , vol.37 , Issue.6 , pp. 1387-1402
    • Huang, C.L.1
  • 22
    • 0036565579 scopus 로고    scopus 로고
    • On-line learning delivery decision support system for highly product mixed semiconductor foundry,"
    • C. Yu and H. Huang, "On-line learning delivery decision support system for highly product mixed semiconductor foundry," IEEE Trans. Semicond. Manuf., vol. 15, no. 2, pp. 274-278, 2002.
    • (2002) IEEE Trans. Semicond. Manuf. , vol.15 , Issue.2 , pp. 274-278
    • Yu, C.1    Huang, H.2
  • 23
    • 56749178304 scopus 로고    scopus 로고
    • Using an artificial neural network prediction model to optimize work-in-process inventory level for wafer fabrication
    • Y. Lin, J. Shie, and C. Tsai, "Using an artificial neural network prediction model to optimize work-in-process inventory level for wafer fabrication," Expert Systems With Applications, vol. 36, no. 2, pp. 3421-3427, 2009.
    • (2009) Expert Systems with Applications , vol.36 , Issue.2 , pp. 3421-3427
    • Lin, Y.1    Shie, J.2    Tsai, C.3
  • 24
    • 0032495049 scopus 로고    scopus 로고
    • Recurrent neural network for forecasting next 10 years loads of nine Japanese utilities
    • B. Kermanshahi, "Recurrent neural network for forecasting next 10 years loads of nine Japanese utilities," Neurocomputing, vol. 23, no. 1-3, pp. 125-133, 1998.
    • (1998) Neurocomputing , vol.23 , Issue.1-3 , pp. 125-133
    • Kermanshahi, B.1
  • 25
    • 0036568755 scopus 로고    scopus 로고
    • Selecting an artificial neural network for efficient modeling and accurate simulation of the milling process
    • J. F. Briceno, H. El-Mounayri, and S. Mukhopadhyay, "Selecting an artificial neural network for efficient modeling and accurate simulation of the milling process," Int. J. Mach. Tools Manuf., vol. 42, no. 6, pp. 663-674, 2002.
    • (2002) Int. J. Mach. Tools Manuf. , vol.42 , Issue.6 , pp. 663-674
    • Briceno, J.F.1    El-Mounayri, H.2    Mukhopadhyay, S.3
  • 26
    • 12444319290 scopus 로고    scopus 로고
    • Modeling plasma etching process using a radial basis function network
    • B. Kim and K. Park, "Modeling plasma etching process using a radial basis function network," Microelectronic Eng., vol. 77, no. 2, pp. 150-157, 2005.
    • (2005) Microelectronic Eng. , vol.77 , Issue.2 , pp. 150-157
    • Kim, B.1    Park, K.2
  • 27
    • 0242351905 scopus 로고    scopus 로고
    • Financial time series forecasting using support vector machines
    • K. Kim, "Financial time series forecasting using support vector machines," Neurocomputing, vol. 55, no. 1-2, pp. 307-319, 2003.
    • (2003) Neurocomputing , vol.55 , Issue.1-2 , pp. 307-319
    • Kim, K.1
  • 28
    • 38949150441 scopus 로고    scopus 로고
    • Comparison of support-vector machine and back propagation neural networks in forecasting the six major Asian stock markets
    • W. Chen and J. Shih, "Comparison of support-vector machine and back propagation neural networks in forecasting the six major Asian stock markets," Int. J. Electron. Fin., vol. 1, no. 1, pp. 49-67, 2006.
    • (2006) Int. J. Electron. Fin. , vol.1 , Issue.1 , pp. 49-67
    • Chen, W.1    Shih, J.2
  • 29
    • 0345548661 scopus 로고    scopus 로고
    • Comparison of support vector machine and artificial neural network systems for drug/nondrug classification
    • E. Byvatov, U. Fechner, J. Sadowski, and G. Schneider, "Comparison of support vector machine and artificial neural network systems for drug/nondrug classification," J. Chem. Inf. Comput. Sci., vol. 43, no. 6, pp. 1882-1889, 2003.
    • (2003) J. Chem. Inf. Comput. Sci. , vol.43 , Issue.6 , pp. 1882-1889
    • Byvatov, E.1    Fechner, U.2    Sadowski, J.3    Schneider, G.4
  • 31
    • 0037138041 scopus 로고    scopus 로고
    • Optimal batching in a wafer fabrication facility using a mul-tiproduct G/G/c model with batching processing
    • J. W. Fowler, N. Phojanamongkolkij, J. K. Cochran, and D. C. Montgomery, "Optimal batching in a wafer fabrication facility using a mul-tiproduct G/G/c model with batching processing," Int. J. Prod. Res., vol. 40, no. 2, pp. 275-292, 2002.
    • (2002) Int. J. Prod. Res. , vol.40 , Issue.2 , pp. 275-292
    • Fowler, J.W.1    Phojanamongkolkij, N.2    Cochran, J.K.3    Montgomery, D.C.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.