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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 31, Issue 6, 2013, Pages

Fabrication of arbitrarily shaped silicon and silicon oxide nanostructures using tip-based nanofabrication

(8) Hu, Huan a Mohseni, Parsian K a Pan, Lei a Li, Xiuling a Somnath, Suhas b Felts, Jonathan R b Shannon, Mark A b King, William P b

a University of Illinois at Urbana Champaign (United States)

b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARBITRARY SHAPE; CIRCULAR SHAPE; METAL-ASSISTED CHEMICAL ETCHING; MOLTEN POLYMERS; NANO-FABRICATION METHODS; POLYMER NANOSTRUCTURES; SILICON NANO STRUCTURES; SILICON OXIDE NANOSTRUCTURE;

ATOMIC FORCE MICROSCOPY; FABRICATION; SILICON OXIDES;

NANOSTRUCTURES;

EID: 84890036385 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.4831767 Document Type: Article

Times cited : (22)

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