Analysis of electron temperature in DC Ar/SF6 plasma using cylindrical and planar probes

Japanese Journal of Applied Physics

Volumn 52, Issue 11 PART 2, 2013, Pages

  Kim, Jin Woo ^a   Cho, Soon Gook ^a   Bae, Min Keun ^a   Kim, Hyung Jin ^a   Chung, Tae Hun ^b   Chung, Kyu Sun ^a  

^a Hanyang University   (South Korea)

^b Dong A University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DC PLASMA; DISCHARGE CONDITIONS; ELECTRIC PROBE; ELECTRONEGATIVE PLASMAS; HEATING CURRENT; ION PRODUCTION; PLASMA PARAMETER; PLASMA POTENTIAL;

ARGON; ELECTRIC DISCHARGES; ELECTRON TEMPERATURE; FLOW RATE; NEGATIVE IONS; PLASMAS; PROBES; SULFUR HEXAFLUORIDE;

PLASMA DIAGNOSTICS;

EID: 84889077783     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.7567/JJAP.52.11NC03     Document Type: Conference Paper

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