Plasma parameters obtained with planar probe and optical emission spectroscopy

Journal of Integrated Circuits and Systems

Volumn 2, Issue 2, 2007, Pages 67-73

  Daltrini, Andre M ^a   Moshkalev, Stanislav A ^a   Swart, Laura ^b   Verdonck, Patrick B ^c  

^a UNIVERSITY OF CAMPINAS   (Brazil)

^b UNIVERSITY OF SÃO PAULO   (Brazil)

^c IMEC   (Belgium)

Author keywords

Electron temperature; Inductively coupled plasma; Optical emission spectroscopy; Planar probe; Plasma diagnostics

Indexed keywords

EID: 50049091242     PISSN: 18071953     EISSN: 18720234     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (11)

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