SCOPUS 정보 검색 플랫폼

Volumn 549, Issue , 2013, Pages 18-21

Electrical properties of ZnO thin films grown on a-plane sapphire substrates using catalytically generated high-energy H2O

(6) Yamaguchi, N a Takeuchi, T a Nagatomi, E a Kato, T a Umemoto, H a Yasui, K a

a NAGAOKA UNIVERSITY OF TECHNOLOGY (Japan)

Author keywords

Catalytic reaction; Chemical vapor deposition; Electrical properties; ZnO film

Indexed keywords

A-PLANE SAPPHIRE; CATALYTIC REACTIONS; CHEMICAL VAPOR DEPOSITIONS (CVD); ELECTRON CONCENTRATION; SUBSTRATE SURFACE; ZINC OXIDE (ZNO); ZNO EPITAXIAL FILMS; ZNO FILMS;

CATALYSIS; CHEMICAL VAPOR DEPOSITION; EPITAXIAL FILMS; EPITAXIAL GROWTH; METALLIC FILMS; MOLECULES; SAPPHIRE; VAPORS; ZINC OXIDE;

ELECTRIC PROPERTIES;

EID: 84888645295 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2013.06.035 Document Type: Conference Paper

Times cited : (2)

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