SCOPUS 정보 검색 플랫폼

Journal of Applied Physics

Volumn 114, Issue 19, 2013, Pages

Effect of the substrate orientation on the formation of He-plates in Si

(5) Vallet, M a Barbot, J F a Declemy A a Reboh, S b Beaufort, M F a

a UNIVERSITÉ DE POITIERS (France)

b CEA LETI (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPIC ELASTIC; ANISOTROPIC PROPERTY; CRYSTALLINE ORIENTATIONS; DEFECT CONFIGURATIONS; IMPLANTATION-INDUCED STRAIN; NUCLEATION AND GROWTH; SUBSTRATE ORIENTATION; THERMAL-ANNEALING;

STRAIN; SURFACE DEFECTS; TRANSMISSION ELECTRON MICROSCOPY;

SUBSTRATES;

EID: 84888332995 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.4831659 Document Type: Article

Times cited : (6)

References (26)

1
- 0029637854
- 10.1049/el:19950805
- M. Bruel, Electron. Lett. 31, 1201 (1995). 10.1049/el:19950805
- (1995) Electron. Lett. , vol.31 , pp. 1201
- Bruel, M.¹

2
- 0000622334
- 10.1063/1.120945
- A. Agarwal, T. E. Haynes, V. C. Venezia, O. W. Holland, and D. J. Eaglesham, Appl. Phys. Lett. 72, 1086 (1998). 10.1063/1.120945
- (1998) Appl. Phys. Lett. , vol.72 , pp. 1086
- Agarwal, A.¹ Haynes, T.E.² Venezia, V.C.³ Holland, O.W.⁴ Eaglesham, D.J.⁵

3
- 34447105477
- 10.1016/j.nimb.2007.04.158
- X. Hebras, P. Nguyen, K. K. Bourdelle, F. Letertre, N. Cherkashin, and A. Claverie, Nucl. Instrum. Methods Phys. Res. B 262, 24-28 (2007). 10.1016/j.nimb.2007.04.158
- (2007) Nucl. Instrum. Methods Phys. Res. B , vol.262 , pp. 24-28
- Hebras, X.¹ Nguyen, P.² Bourdelle, K.K.³ Letertre, F.⁴ Cherkashin, N.⁵ Claverie, A.⁶

4
- 0032018707
- 10.1016/S0168-583X(97)00714-3
- P. F. P. Fichtner, J. R. Kaschny, A. Kling, H. Trinkaus, R. A. Yankov, A. Mücklich, W. Skorupa, F. C. Zawislak, L. Amaral, M. F. da Silva, and J. C. Soares, Nucl. Instrum. Methods Phys. Res. B 136-138, 460-464 (1998). 10.1016/S0168-583X(97)00714-3
- (1998) Nucl. Instrum. Methods Phys. Res. B , vol.136-138 , pp. 460-464
- Fichtner, P.F.P.¹ Kaschny, J.R.² Kling, A.³ Trinkaus, H.⁴ Yankov, R.A.⁵ Mücklich, A.⁶ Skorupa, W.⁷ Zawislak, F.C.⁸ Amaral, L.⁹ Da Silva, M.F.¹⁰ Soares, J.C.¹¹

5
- 77949835355
- 10.1063/1.3290249
- S. Reboh, J. F. Barbot, M. F. Beaufort, and P. F. P. Fichtner, Appl. Phys. Lett. 96, 031907 (2010). 10.1063/1.3290249
- (2010) Appl. Phys. Lett. , vol.96 , pp. 031907
- Reboh, S.¹ Barbot, J.F.² Beaufort, M.F.³ Fichtner, P.F.P.⁴

6
- 33747188574
- 10.1007/s10853-006-0153-1
- N. Hueging, M. Luysberg, H. Trinkaus, K. Tillmann, and K. Urban, J. Mater. Sci. 41, 4454-4465 (2006). 10.1007/s10853-006-0153-1
- (2006) J. Mater. Sci. , vol.41 , pp. 4454-4465
- Hueging, N.¹ Luysberg, M.² Trinkaus, H.³ Tillmann, K.⁴ Urban, K.⁵

7
- 0034236071
- 10.1557/JMR.2000.0211
- V. Raineri, M. Saggio, and E. Rimini, J. Mater. Res. 15, 1449-1477 (2000). 10.1557/JMR.2000.0211
- (2000) J. Mater. Res. , vol.15 , pp. 1449-1477
- Raineri, V.¹ Saggio, M.² Rimini, E.³

8
- 20944435198
- 10.1063/1.1900309
- M. Nastasi, T. Hochbauer, J. K. Lee, A. Misra, J. P. Hirth, M. Ridgway, and T. Lafford, Appl. Phys. Lett. 86, 154102 (2005). 10.1063/1.1900309
- (2005) Appl. Phys. Lett. , vol.86 , pp. 154102
- Nastasi, M.¹ Hochbauer, T.² Lee, J.K.³ Misra, A.⁴ Hirth, J.P.⁵ Ridgway, M.⁶ Lafford, T.⁷

9
- 47549092353
- 10.1063/1.2958212
- S. Reboh, M. F. Beaufort, J. F. Barbot, J. Grilhé, and P. F. Fichtner, Appl. Phys. Lett. 93, 022106 (2008). 10.1063/1.2958212
- (2008) Appl. Phys. Lett. , vol.93 , pp. 022106
- Reboh, S.¹ Beaufort, M.F.² Barbot, J.F.³ Grilhé, J.⁴ Fichtner, P.F.⁵

10
- 33744810914
- 10.1063/1.2198928
- N. Sousbie, L. Capello, J. Eymery, F. Rieutord, and C. Lagahe, J. Appl. Phys. 99, 103509 (2006). 10.1063/1.2198928
- (2006) J. Appl. Phys. , vol.99 , pp. 103509
- Sousbie, N.¹ Capello, L.² Eymery, J.³ Rieutord, F.⁴ Lagahe, C.⁵

11
- 84872390474
- 10.1088/0022-3727/46/4/045309
- A. Debelle, A. Boulle, F. Rakotovao, J. Moeyaert, C. Bachelet, F. Garrido, and L. Thomé, J. Phys. D: Appl. Phys. 46, 045309 (2013). 10.1088/0022-3727/46/4/045309
- (2013) J. Phys. D: Appl. Phys. , vol.46 , pp. 045309
- Debelle, A.¹ Boulle, A.² Rakotovao, F.³ Moeyaert, J.⁴ Bachelet, C.⁵ Garrido, F.⁶ Thomé, L.⁷

12
- 84855926547
- 10.1063/1.3672447
- H. Trinkaus, D. Buca, R. A. Minamisawa, B. Holländer, M. Luysberg, and S. Mantl, J. Appl. Phys. 111, 014904 (2012). 10.1063/1.3672447
- (2012) J. Appl. Phys. , vol.111 , pp. 014904
- Trinkaus, H.¹ Buca, D.² Minamisawa, R.A.³ Holländer, B.⁴ Luysberg, M.⁵ Mantl, S.⁶

13
- 77953138323
- SRIM-The stopping and range of ions in matter (2010)
- 10.1016/j.nimb.2010.02.091
- J. F. Ziegler, M. D. Ziegler, and J. P. Biersack, " SRIM-the stopping and range of ions in matter (2010).," Nucl. Instrum. Methods Phys. Res. B 268, 1818-1823 (2010). 10.1016/j.nimb.2010.02.091
- (2010) Nucl. Instrum. Methods Phys. Res. B , vol.268 , pp. 1818-1823
- Ziegler, J.F.¹ Ziegler, M.D.² Biersack, J.P.³

14
- 84883285897
- 10.1063/1.4818812
- S. Reboh, J. F. Barbot, M. Vallet, M. F. Beaufort, F. Rieutord, F. Mazen, N. Cherkashin, P. F. P. Fichtner, and J. Grilhé, J. Appl. Phys. 114, 073517 (2013). 10.1063/1.4818812
- (2013) J. Appl. Phys. , vol.114 , pp. 073517
- Reboh, S.¹ Barbot, J.F.² Vallet, M.³ Beaufort, M.F.⁴ Rieutord, F.⁵ Mazen, F.⁶ Cherkashin, N.⁷ Fichtner, P.F.P.⁸ Grilhé, J.⁹

15
- 84888380262
- see.
- S. A. Stepanov, see http://sergey.gmca.aps.anl.gov/gid-sl.html.
- Stepanov, S.A.¹

16
- 75149162784
- 10.1016/j.jnucmat.2009.12.011
- S. Leclerc, M. F. Beaufort, A. Declémy, and J. F. Barbot, J. Nucl. Mater. 397, 132-134 (2010). 10.1016/j.jnucmat.2009.12.011
- (2010) J. Nucl. Mater. , vol.397 , pp. 132-134
- Leclerc, S.¹ Beaufort, M.F.² Declémy, A.³ Barbot, J.F.⁴

17
- 77955816997
- 10.1063/1.3459884
- S. Reboh, F. Schaurich, A. Declemy, J. F. Barbot, M. F. Beaufort, N. Cherkashin, and P. F. P. Fichtner, J. Appl. Phys. 108, 023502 (2010). 10.1063/1.3459884
- (2010) J. Appl. Phys. , vol.108 , pp. 023502
- Reboh, S.¹ Schaurich, F.² Declemy, A.³ Barbot, J.F.⁴ Beaufort, M.F.⁵ Cherkashin, N.⁶ Fichtner, P.F.P.⁷

18
- 0028461497
- 10.1016/0254-0584(94)90001-9
- V. Raineri, V. Privitera, G. Galvagno, F. Priolo, and E. Rimini, Mater. Chem. Phys. 38, 105-130 (1994). 10.1016/0254-0584(94)90001-9
- (1994) Mater. Chem. Phys. , vol.38 , pp. 105-130
- Raineri, V.¹ Privitera, V.² Galvagno, G.³ Priolo, F.⁴ Rimini, E.⁵

19
- 0025445228
- 10.1007/BF00584887
- S. I. Rao and C. R. Houska, J. Mater. Sci. 25, 2822-2826 (1990). 10.1007/BF00584887
- (1990) J. Mater. Sci. , vol.25 , pp. 2822-2826
- Rao, S.I.¹ Houska, C.R.²

20
- 0021896589
- 10.1016/0167-577X(85)90001-1
- J. Narayan, O. S. Oen, D. Fathy, and O. W. Holland, Mater. Lett. 3, 67-72 (1985). 10.1016/0167-577X(85)90001-1
- (1985) Mater. Lett. , vol.3 , pp. 67-72
- Narayan, J.¹ Oen, O.S.² Fathy, D.³ Holland, O.W.⁴

21
- 0001627582
- 10.1063/1.349668
- G. Bai and M.-A. Nicolet, J. Appl. Phys. 70, 649-655 (1991). 10.1063/1.349668
- (1991) J. Appl. Phys. , vol.70 , pp. 649-655
- Bai, G.¹ Nicolet, M.-A.²

22
- 19144366632
- 10.1063/1.1808484
- L. Pelaz, L. A. Marques, and J. Barbolla, J. Appl. Phys. 96, 5947-5976 (2004). 10.1063/1.1808484
- (2004) J. Appl. Phys. , vol.96 , pp. 5947-5976
- Pelaz, L.¹ Marques, L.A.² Barbolla, J.³

23
- 0011746622
- 10.1063/1.340060
- J. H. Neethling, H. C. Snyman, and C. A. B. Ball, J. Appl. Phys. 63, 704 (1988). 10.1063/1.340060
- (1988) J. Appl. Phys. , vol.63 , pp. 704
- Neethling, J.H.¹ Snyman, H.C.² Ball, C.A.B.³

24
- 84888389064
- Ph.D. dissertation, University of Toulouse, France.
- J. Grisolia, Ph.D. dissertation, University of Toulouse, France, 2001.
- (2001)
- Grisolia, J.¹

25
- 38849194829
- 10.1063/1.2829807
- S. Personnic, K. K. Bourdelle, F. Letertre, A. Tauzin, N. Cherkashin, A. Claverie, R. Fortunier, and H. Klocker, J. Appl. Phys. 103, 023508 (2008). 10.1063/1.2829807
- (2008) J. Appl. Phys. , vol.103 , pp. 023508
- Personnic, S.¹ Bourdelle, K.K.² Letertre, F.³ Tauzin, A.⁴ Cherkashin, N.⁵ Claverie, A.⁶ Fortunier, R.⁷ Klocker, H.⁸

26
- 84872919526
- 10.1002/pssc.201200365
- M. Vallet, S. Reboh, M. F. Beaufort, J. Grilhé, and J. F. Barbot, Phys. Status Solidi C 10, 44-47 (2013). 10.1002/pssc.201200365
- (2013) Phys. Status Solidi C , vol.10 , pp. 44-47
- Vallet, M.¹ Reboh, S.² Beaufort, M.F.³ Grilhé, J.⁴ Barbot, J.F.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.