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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 136-138, Issue , 1998, Pages 460-464

Nucleation and growth of platelet bubble structures in He implanted silicon

(11) Fichtner, P F P a Kaschny, J R b Kling, A c Trinkaus, H d Yankov, R A b Mucklich A b Skorupa, W b Zawislak, F C a Amaral, L a Da Silva, M F e Soares, J C c

a FEDERAL UNIVERSITY OF RIO GRANDE DO SUL (Brazil)

b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH (Germany)

c CENTRO DE FÍSICA NUCLEAR DA UNIVERSIDADE DE LISBOA (Portugal)

d FORSCHUNGSZENTRUM JÜLICH (Germany)

e INSTITUTO TECNOLÓGICO E NUCLEAR (Portugal)

Author keywords

Defects; He bubbles; Ion implantation; Silicon

Indexed keywords

ANNEALING; BUBBLES (IN FLUIDS); HELIUM; ION IMPLANTATION; NUCLEATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTOR GROWTH; SINGLE CRYSTALS; TRANSMISSION ELECTRON MICROSCOPY;

OVERPRESSURIZED BUBBLES; PLATELET BUBBLE STRUCTURES;

SEMICONDUCTING SILICON;

EID: 0032018707 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(97)00714-3 Document Type: Article

Times cited : (37)

References (11)

1
- 0006353921
- V. Raineri, P.G. Fallica, G. Percolla, A. Battaglia, M. Barbagallo, S.U. Campisano, J. Appl. Phys. 78 (1995) 3727.
- (1995) J. Appl. Phys. , vol.78 , pp. 3727
- Raineri, V.¹ Fallica, P.G.² Percolla, G.³ Battaglia, A.⁴ Barbagallo, M.⁵ Campisano, S.U.⁶

2
- 0001322815
- S.M. Myers, D.M. Follstaedt, J. Appl. Phys. 79 (1996) 1337.
- (1996) J. Appl. Phys. , vol.79 , pp. 1337
- Myers, S.M.¹ Follstaedt, D.M.²

3
- 0042966896
- W. Skorupa, N. Hatzopoulos, R.A. Yankov, A.B. Danilin, Appl. Phys. Lett. 67 (1995) 7; R.A. Yankov, J.R. Kaschny, P.F.P. Fichtner, A. Mücklich, W. Skorupa, Microelectron. Eng. 36 (1997) 129.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 7
- Skorupa, W.¹ Hatzopoulos, N.² Yankov, R.A.³ Danilin, A.B.⁴

4
- 0031150241
- W. Skorupa, N. Hatzopoulos, R.A. Yankov, A.B. Danilin, Appl. Phys. Lett. 67 (1995) 7; R.A. Yankov, J.R. Kaschny, P.F.P. Fichtner, A. Mücklich, W. Skorupa, Microelectron. Eng. 36 (1997) 129.
- (1997) Microelectron. Eng. , vol.36 , pp. 129
- Yankov, R.A.¹ Kaschny, J.R.² Fichtner, P.F.P.³ Mücklich, A.⁴ Skorupa, W.⁵

5
- 0039331932
- M. Bruel, Nucl. Instr. and Meth. B 108 (1996) 313.
- (1996) Nucl. Instr. and Meth. B , vol.108 , pp. 313
- Bruel, M.¹

6
- 36448998571
- V. Raineri, S.U. Campisano, Appl. Phys. Lett. 66 (1995) 3654.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 3654
- Raineri, V.¹ Campisano, S.U.²

7
- 0000093546
- P.F.P. Fichtner, J.R. Kaschny, R.A. Yankov, A. Mucklich, U. Kreißig, W. Skorupa, Appl. Phys. Lett. 70 (1997) 732.
- (1997) Appl. Phys. Lett. , vol.70 , pp. 732
- Fichtner, P.F.P.¹ Kaschny, J.R.² Yankov, R.A.³ Mucklich, A.⁴ Kreißig, U.⁵ Skorupa, W.⁶

8
- 0023385402
- C.C. Griffioen, J.H. Evans, P.C. de Jong, A. van Veen, Nucl. Instr. and Meth. B 27 (1987) 417.
- (1987) Nucl. Instr. and Meth. B , vol.27 , pp. 417
- Griffioen, C.C.¹ Evans, J.H.² De Jong, P.C.³ Van Veen, A.⁴

9
- 0000549091
- S.M. Myers, D.M. Follstaedt, H.J. Stein, W.R. Wampler, Phys. Rev. B 47 (1993) 13380.
- (1993) Phys. Rev. B , vol.47 , pp. 13380
- Myers, S.M.¹ Follstaedt, D.M.² Stein, H.J.³ Wampler, W.R.⁴

10
- 0029227420
- A. Van Veen, H. Schut, R.A. Hakvoort, A. Fedorov, K.T. Westerduin, Mat. Res. Soc. Symp. 373 (1995) 499.
- (1995) Mat. Res. Soc. Symp. , vol.373 , pp. 499
- Van Veen, A.¹ Schut, H.² Hakvoort, R.A.³ Fedorov, A.⁴ Westerduin, K.T.⁵

11
- 0020202424
- H. Trinkaus, Radiat. Eff. 78 (1983) 189.
- (1983) Radiat. Eff. , vol.78 , pp. 189
- Trinkaus, H.¹

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