Quantitative pressure and strain field analysis of helium precipitates in silicon

Journal of Materials Science

Volumn 41, Issue 14, 2006, Pages 4454-4465

  Hueging, Norbert ^a   Luysberg, Martina ^a   Trinkaus, Helmut ^a   Tillmann, Karsten ^a   Urban, Knut ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CHEMICAL ANALYSIS; CRYSTALLOGRAPHY; PRECIPITATION (CHEMICAL); STRUCTURAL PANELS; TRANSMISSION ELECTRON MICROSCOPY;

CRYSTALLOGRAPHIC ORIENTATION; GRIFFITH CRACK; QUANTITATIVE PRESSURE; STRAIN FIELD ANALYSIS;

SILICON;

EID: 33747188574     PISSN: 00222461     EISSN: 15734803     Source Type: Journal    
DOI: 10.1007/s10853-006-0153-1     Document Type: Conference Paper

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