Multicomponent nanopatterns by directed block copolymer self-assembly

ACS Nano

Volumn 7, Issue 10, 2013, Pages 8899-8907

  Shin, Dong Ok ^a,c   Mun, Jeong Ho ^a,b   Hwang, Geon Tae ^a   Yoon, Jong Moon ^a,b   Kim, Ju Young ^a,b   Yun, Je Moon ^a,b   Yang, Yong Biao ^d   Oh, Youngtak ^a,b   Lee, Jeong Yong ^a,b   Shin, Jonghwa ^a   Lee, Keon Jae ^a   Park, Soojin ^d   Kim, Jaeup U ^d   Kim, Sang Ouk ^a,b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Institute for Basic Science   (South Korea)

^c Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

^d Ulsan National Institute of Science and Technology   (South Korea)

Author keywords

block copolymer; multicomponent; nanopattern; self assembly

Indexed keywords

BLOCK COPOLYMER SELF-ASSEMBLY; CHEMICAL COMPOSITIONS; COLLOIDAL NANOPARTICLES; LARGE-AREA PROCESSING; MULTICOMPONENTS; NANO PATTERN; ORDERED NANOSTRUCTURES; PLASMONIC PROPERTIES;

BLOCK COPOLYMERS; GOLD; NANOSTRUCTURED MATERIALS; NANOWIRES; PLATINUM;

SELF ASSEMBLY;

EID: 84887005081     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn403379k     Document Type: Article

References (55)

1. Dong, A.; Chen, J.; Vora, P. M.; Kikkawa, J. M.; Murray, C. B. Binary Nanocrystal Superlattice Membranes Self-Assembled at the Liquid-Air Interface Nature 2011, 466, 474-477
2. Leunissen, M. E.; Christova, C. G.; Hynninen, A, -P.; Royall, C. P.; Campbell, A. I.; Imhof, A.; Dijkstra, M.; Roij, R.; Blaaderen, A. Ionic Colloidal Crystals of Oppositely Charged Particles Nature 2005, 437, 235-240
3. Shevchenko, E. V.; Talapin, D. V.; Kotov, N. A.; O'Brien, S.; Murray, C. B. Structural Diversity in Binary Nanoparticle Superlattices Nature 2006, 439, 55-59
4. Sacanna, S.; Irvine, W. T. M.; Chaikin, P. M.; Pine, D. J. Lock and Key Colloids Nature 2010, 464, 575-578
5. Macfarlane, R. J.; Lee, B.; Jones, M. R.; Harris, N.; Schatz, G. C.; Mirkin, C. A. Nanoparticle Superlattice Engineering with DNA Science 2011, 334, 204-208
6. Xia, Y.; Nguyen, T. D.; Yang, M.; Lee, B.; Santos, A.; Paul, P.; Tang, Z.; Glotzer, S. C.; Kotov, N. A. Self-Assembly of Self-Limiting Monodisperse Superparticles from Polydisperse Nanoparticles Nat. Nanotechnol. 2012, 6, 580-587
7. Wang, Y.; Wang, Y.; Breed, D. R.; Manoharan, V. N.; Feng, L.; Hollingsworth, A. D.; Weck, M.; Pine, D. J. Colloids with Valence and Specific Directional Bonding Nature 2012, 491, 51-55
8. Bates, F. S.; Fredrickson, G. H. Block Copolymers-Designer Soft Materials Phys. Today 1999, 52, 32-38
9. 11 Holes in 1 Square Centimeter Science 1997, 276, 1401-1404
10. Thurn-Albrecht, T.; Schotter, J.; Kastle, C. A.; Emley, N.; Shibauchi, T.; Krusin-Elbaum, L.; Guarini, K.; Black, C. T.; Tuominen, M. T.; Russell, T. P. Ultrahigh-Density Nanowire Arrays Grown in Self-Assembled Diblock Copolymer Templates Science 2000, 290, 2126-2129
11. Segalman, R. A.; Yokoyama, H.; Kramer, E. J. Graphoepitaxy of Spherical Domain Block Copolymer Films Adv. Mater. 2001, 13, 1152-1155
12. Ludwigs, S.; Boker, A.; Voronov, A.; Rehse, N.; Magerle, R.; Karusch, G. Self-Assembly of Functional Nanostructures from ABC Triblock Copolymers Nat. Mater. 2003, 2, 744-747
13. Kim, S. O.; Solak, H. H.; Stoykovich, M. P.; Ferrier, N. J.; de Pablo, J. J.; Nealey, P. F. Epitaxial Self-Assembly of Block Copolymers on Lithographically Defined Nanopatterned Substrates Nature 2003, 424, 411-414
14. Stoykovich, M. P.; Muller, M.; Kim, S. O.; Solak, H. H.; Edwards, E. W.; de Pablo, J. J.; Nealey, P. F. Directed Assembly of Block Copolymer Blends into Nonregular Device-Oriented Structures Science 2005, 308, 1442-1446
15. Chai, J.; Wang, D.; Fan, X. N.; Buriak, J. M. Assembly of Aligned Linear Metallic Patterns on Silicon Nat. Nanotechnol. 2007, 2, 500-506
16. Tang, C.; Lennon, E. M.; Fredrickson, G. H.; Kramer, E. J.; Hawker, C. J. Evolution of Block Copolymer Lithography to Highly Ordered Square Arrays Science 2008, 322, 429-432
17. Jeong, S.-J.; Xia, G. D.; Kim, B. H.; Shin, D. O.; Kwon, S.-H.; Kang, S.-W.; Kim, S. O. Universal Block Copolymer Lithography for Metals, Semiconductors, Ceramics, and Polymers Adv. Mater. 2008, 20, 1898-1904
18. Park, S.; Lee, D. H.; Xu, J.; Kim, B.; Hong, S. W.; Jeong, U.; Xu, T.; Russell, T. P. Macroscopic 10-Terabit-Per-Square-Inch Arrays from Block Copolymers with Lateral Order Science 2009, 323, 1030-1033
19. Arora, H.; Du, P.; Tan, K. W.; Hyun, J. K.; Grazul, J.; Xin, H. L.; Muller, D. A.; Thompson, M. O.; Wiesner, U. Block Copolymer Self-Assembly- Directed Single-Crystal Homo and Heteroepitaxial Nanostructures Science 2010, 330, 214-219
20. Hong, S. W.; Huh, J.; Gu, X. D.; Lee, D. H.; Jo, W. H.; Park, S.; Xu, T.; Russell, T. P. Unidirectionally Aligned Line Patterns Driven by Entropic Effects on Facted Surfaces Proc. Natl. Acad. Sci. U.S.A. 2012, 109, 1420-1406
21. Kim, S. O.; Kim, B. H.; Meng, D.; Shin, D. O.; Koo, C. M.; Solak, H. H.; Wang, Q. Novel Complex Nanostructure from Directed Assembly of Block Copolymers on Incommensurate Surface Patterns Adv. Mater. 2007, 19, 3271-3275
22. Ruiz, R.; Kang, H. M.; Detcheverry, F. A.; Dobisz, E.; Kercher, D. S.; Albrecht, T. R.; de Pablo, J. J.; Nealey, P. F. Density Multiplication and Improved Lithography by Directed Block Copolymer Assembly Science 2008, 321, 936-939
23. Bita, I.; Yang, J. K. W.; Jung, Y. S.; Ross, C. A.; Thomas, E. L.; Berggren, K. K. Graphoepitaxy of Self-Assembled Block Copolymers on Two-Dimensional Periodic Patterned Templates Science 2008, 321, 939-943
24. Jeong, S.-J.; Kim, J. E.; Moon, H. S.; Kim, B. H.; Kim, S. M.; Kim, J. B.; Kim, S. O. Soft Graphoepitaxy of Block Copolymer Assembly with Disposable Photoresist Confinement Nano Lett. 2009, 9, 2300-2305
25. Park, S. H.; Shin, D. O.; Kim, B. H.; Yoon, D. K.; Kim, K.; Lee, S. Y.; Oh, S.-H.; Choi, S.-W.; Jeon, S. C.; Kim, S. O. Block Copolymer Multiple Patterning Integrated with Conventional ArF Lithography Soft Matter 2010, 6, 120-125
26. Cheng, J. Y.; Sanders, D. P.; Truong, H. D.; Harrer, S.; Friz, A.; Holmes, S.; Colburn, M.; Hinsberg, W. D. Simple and Versatile Methods to Integrate Directed Self-Assembly with Optical Lithography Using a Polarity-Switched Photoresist ACS Nano 2010, 4, 4815-4823
27. Yang, J. K. W.; Jung, Y. S.; Chang, J. B.; Mickiewicz, R. A.; Alexander-Katz, A.; Ross, C. A.; Berggren, K. K. Complex Self-Assembled Patterns using Sparse Commensurate Templates with Locally Varying Motifs Nat. Nanotechnol. 2010, 5, 256-260
28. Tavakkoli, A. K. G.; Gotrik, K. W.; Hannon, A. F.; Alexander-Katz, A.; Ross, C. A.; Berggren, K. K. Templating Three-Dimensional Self-Assembled Structures in Bilayer Block Copolymer Films Science 2012, 336, 1294-1298
29. Park, S.; Wang, J.-Y.; Kim, B.; Chen, W.; Russell, T. P. Solvent-Induced Transitioin from Micelles in Solution to Cylindrical Microdomains in Diblock Copolymer Thin Films Macromolecules 2007, 40, 9059-9063
30. Park, S.; Kim, B.; Cirpan, A.; Russell, T. P. Preparation of Metallic Line Patterns from Functional Block Copolymers Small 2009, 5, 1343-1348
31. Lee, D. H.; Cho, H.; Yoo, S.; Park, S. Ordering Evloution of Block Copolymer Thin Films upon Solvent-Annealing Process J. Colloid Interface Sci. 2012, 383, 118-123
32. Shin, D. O.; Lee, D. H.; Moon, H.-S.; Jeong, S.-J.; Kim, J. Y.; Mun, J. H.; Cho, H.; Park, S.; Kim, S. O. Sub-Nanometer Level Size Tuning of a Monodiisperse Nanoparticle Array via Block Copolymer Lithography Adv. Funct. Mater. 2011, 21, 250-254
33. Chai, J.; Buriak, J. M. Using Cylindrical Domains of Block Copolymers to Self-Assemble and Align Metallic Nanowires ACS Nano 2008, 2, 489-501
34. Wu, N. L. Y.; Zhang, X.; Murphy, J. N.; Chai, J.; Harris, K. D.; Buriak, J. M. Density Doubling of Block Copolymer Tempalted Features Nano Lett. 2012, 12, 264-268
35. Ruiz, R.; Sandstrom, R. L.; Black, C. T. Induced Oritentational Order in Symmetric Diblock Copolymer Thin Films Adv. Mater. 2007, 19, 587-591
36. Son, J. G.; Hannon, A. F.; Gotrik, K. W.; Alexander-Katz, A.; Ross, C. A. Hierarchical Nanostructures by Sequential Self-Assembly of Styrene- Dimethylsiloxane Block Copolymers of Different Periods Adv. Mater. 2011, 23, 634-639
37. Jeong, S.-J.; Moon, H.-S.; Shin, J.; Kim, B. H.; Shin, D. O.; Kim, J. Y.; Lee, Y.-H.; Kim, J. U.; Kim, S. O. One-Dimensional Metal Nanowire Assembly via Block Copolymer Soft Graphoepitaxy Nano Lett. 2010, 10, 3500-3505
38. Drolet, F.; Fredrickson, G. H. Combinatorial Screening of Complex Block Copolymer Assembly with Self-Consistent Field Theory Phys. Rev. Lett. 1999, 83, 4317-4320
39. Kim, J. U.; Matsen, M. W. Positioning Janus Nanoparticles in Block Copolymer Scaffolds Phys. Rev. Lett. 2009, 102, 078303
40. Shin, J.; Shen, J.-T.; Fan, S. Three-Dimensional Metamaterials with an Ultra-High Effective Refractive Index over Broad Bandwidth Phys. Rev. Lett. 2009, 02, 093903
41. Choi, M.; Lee, S. H.; Kim, Y.; Kang, S. B.; Shin, J.; Kwak, M. H.; Kang, K,-Y.; Lee, Y.-H.; Park, N.; Min, B. A Terahertz Metamaterial with Unnaturally High Refractive Index Nature 2011, 470, 369-373
42. Atwater, H. A.; Polman, A. Plasmonics for Improved Photovoltaic Devices Nat. Mater. 2010, 9, 205-213
43. Mistark, P. A.; Park, S.; Yalcin, S. E.; Lee, D. H.; Yavuzcetin, O.; Tuominen, M. T.; Russell, T. O; Achermann, M. Block Copolymer-Based Plasmonic Nanostructures ACS Nano 2009, 3, 3987-3992
44. Shin, D. O.; Jeong, J.-R.; Han, T. H.; Koo, C. M.; Park, H.-J.; Lim, Y. T.; Kim, S. O. A Plasmonic Biosensor Array by Block Copolymer Lithography J. Mater. Chem. 2010, 20, 7241-7247
45. Black, C. T.; Ruiz, R.; Breyta, G.; Cheng, J. Y.; Colburn, M. C.; Guarini, K. W.; Kim, H.-C.; Zhang, Y. Q. Polymer Self-Assembly in Semiconductor Microelectronics IBM J. Rev. Dev. 2007, 51, 605-633
46. Lee, J.-W.; Ryu, S. W.; Shin, D. O.; Kim, B. H.; Kim, S. O.; Choi, Y.-K. Geometric Effects of Nanocrystals in Nonvolatile Memory using Block Copolymer Nanotemplate Solid-State Electron. 2009, 53, 640-643
47. Hofmann, R.; Krishna, N. Self-Assembled Metallic Nanocrystal Structures for Advanced Non-Volatile Memory Applications Microelectron. Eng. 2008, 85, 1975-1978
48. Lee, J.-S.; Kim, Y.-M.; Kwon, J.-H.; Shin, H.; Sohn, B.-H.; Lee, J. Tunable Memory Characteristics of Nanostructured, Nonvolatile Charge Trap Memory Devices Based on a Binary Mixture of Metal Nanoparticles as a Charge Trapping Layer Adv. Mater. 2008, 21, 178-183
49. Lee, C.; Meteer, J.; Narayanan, V.; Kan, E. C. Self-Assembly of Metal Nanocrystals on Ultrathin Oxide for Nonvolatile Memory Applications J. Electron. Mater. 2005, 34, 1-11
50. Kim, S.; Shin, D. O.; Choi, D.-G.; Jeong, J.-R.; Mun, J. H.; Yang, Y.-B.; Kim, J. U.; Kim, S. O.; Jeong, J.-H. Graphoepitaxy of Block-Copolymer Self-Assembly Integrated with Single-Step ZnO Nanoimprinting Small 2012, 8, 1563-1569
51. Rasmussen, K. Ø.; Kalosakas, G. Improved Numerical Algorithm for Exploring Block Copolymer Mesophases J. Polym. Sci., Part B: Polym. Phys. 2002, 40, 1777-1783
52. Stasiak, P.; Matsen, M. W. Efficiency of Pseudo-Spectral Algorithms with Anderson Mixing for the SCFT of Periodic Block-Copolymer Phases Eur. Phys. J. E 2011, 34, 110
53. Fan, S.; Villeneuve, P. R.; Joannopoulos, J. D. Large Omnidirectional Band Gaps in Metallodielectric Photonic Crystals Phys. Rev. B 1996, 54, 11245
54. Taflove, A.; Hagness, S. C. Computational Electrodynamics: The Finite-Difference Time-Domain Method, 3 rd ed.; Artech House: Boston, MA, 2005.
55. Palik, E. D. Handbook of Optical Constants of Solids; Academic Press: New York, 1997.