Self-assembled metallic nanocrystal structures for advanced non-volatile memory applications

Microelectronic Engineering

Volumn 85, Issue 10, 2008, Pages 1975-1978

  Hofmann, Ralf ^a   Krishna, Nety ^a  

^a APPLIED MATERIALS INC   (United States)

Author keywords

Flash memory; Nanocrystal; NVM

Indexed keywords

CHARGE DISTRIBUTION; DATA STORAGE EQUIPMENT; GERMANIUM; METALLIC SOAPS; NANOCRYSTALLINE ALLOYS; NANOCRYSTALS; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NONMETALS; POLYSILICON; SILICON;

CHARGE STORAGE CAPACITY; CHARGE-LOSS; FLASH MEMORY; FLOATING GATE MEMORIES; METALLIC NANOCRYSTALS; NANO-DOTS; NANOCRYSTAL; NANOCRYSTAL STRUCTURES; NON-VOLATILE MEMORIES; NON-VOLATILE MEMORY DEVICES; NVM; POLY-SILICON GATES; SELF-ASSEMBLED;

NANOTECHNOLOGY;

EID: 52149119430     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.05.019     Document Type: Article

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