Solution processed amorphous InGaZnO semiconductor thin films and transistors

Journal of Physics and Chemistry of Solids

Volumn 75, Issue 1, 2014, Pages 142-147

  Tsay, Chien Yie ^a   Yan, Tzu Yi ^a  

^a FENG CHIA UNIVERSITY   (Taiwan)

Author keywords

A. Amorphous materials; A. Semiconductors; A. Thin films; B. Sol gel growth; D. Electrical properties

Indexed keywords

ACTIVE CHANNEL LAYERS; AMORPHOUS-INDIUM GALLIUM ZINC OXIDES; ANNEALING TEMPERATURES; C. THIN FILM TRANSISTOR (TFT); SEMICONDUCTOR THIN FILMS; SOL-GEL GROWTH; SOLUTION-PROCESSED; SURFACE CONDITIONS;

AMORPHOUS MATERIALS; AMORPHOUS SEMICONDUCTORS; ANNEALING; ELECTRIC PROPERTIES; METALLIC FILMS; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR GROWTH; SOL-GEL PROCESS; SOL-GELS; THIN FILMS; TRANSISTORS;

THIN FILM TRANSISTORS;

EID: 84886719477     PISSN: 00223697     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jpcs.2013.09.015     Document Type: Article

References (29)

1. J.S. Park, W.J. Maeng, H.S. Kim, and J.S. Park Thin Solid Films 520 2012 1679 1693
2. T. Kamiya, K. Nomura, and H. Hosono Science and Technology of Advanced Materials 11 2010 044305
3. W.S. Choi Electronic Materials Letters 8 2012 87 90
4. J.Y. Kwon, D.J. Lee, and K.B. Kim Electronic Materials Letters 7 2011 1 11
5. G.H. Kim, H.S. Shin, B.D. Ahn, K.H. Kim, W.J. Park, and H.J. Kim Journal of the Electrochemical Society 156 2009 H7 H9
6. A. Olziersky, P. Barquinha, A. Vilà, C. Magaña, E. Fortunato, J.R. Morante, and R. Martins Materials Chemistry and Physics 131 2011 512 518
7. A. Takagi, K. Nomura, H. Ohta, H. Yanagi, T. Kamiya, M. Hirano, and H. Hosono Thin Solid Films 486 2005 38 41
8. Y. Jung, W. Yang, C.Y. Koo, K. Song, and J. Moon Journal of Materials Chemistry 22 2012 5390 5397
9. K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, and H. Hosono Nature 432 2004 488 492
10. H. Yabuta, M. Sano, K. Abe, T. Aiba, T. Den, H. Kumomi, K. Nomura, T. Kamiya, and H. Hosono Applied Physics Letters 89 2006 112123
11. J.W. Hennek, Y. Xia, K. Everaerts, M.C. Hersam, A. Facchetti, and T.J. Marks Applied Materials and Interfaces 4 2012 1614 1619
12. Y. Wang, X.W. Sun, K.L. Goh, H.V. Demir, and H.Y. Yu IEEE Transactions on Electron Devices 58 2011 480 485
13. G.H. Kim, H.S. Kim, H.S. Shin, B.D. Ahn, K.H. Kim, and H.J. Kim Thin Solid Films 517 2009 4007 4010
14. M.J. Yu, Y.H. Yeh, C.C. Cheng, C.Y. Lin, G.T. Ho, B.C.M. Lai, C.M. Leu, T.H. Hou, and Y.J. Chan IEEE Electron Device Letters 33 2012 47 49
15. J.H. Choi, S.M. Hwang, C.M. Lee, J.C. Kim, G.C. Park, J. Joo, and J.H. Lim Journal of Crystal Growth 326 2011 175 178
16. P.K. Nayak, T. Busani, E. Elamurugu, P. Barquinha, and R. Martins Applied Physics Letters 97 2010 183504
17. D. Kim, C.Y. Koo, K. Song, Y. Jeong, and J. Moon Applied Physics Letters 95 2009 103501
18. G.H. Kim, B.D. Ahn, H.S. Shin, W.H. Jeong, H.J. Kim, and H.J. Kim Applied Physics Letters 94 2009 233501
19. S. Hwang, J.H. Lee, C.H. Woo, J.Y. Lee, and H.K. Cho Thin Solid Films 519 2011 5146 5149
20. Y. Wang, S.W. Liu, X.W. Sun, J.L. Zhao, G.K.L. Goh, Q.V. Vu, and H.Y. Yu The Journal of Sol-Gel Science and Technology 55 2010 322 327
21. J.H. Choi, J.H. Shim, S.M. Hwang, J. Joo, K. Park, H. Kim, H.J. Lee, J.H. Lim, M.R. Moon, and D. Jung Journal of the Korean Physical Society 57 2010 1836 1841
22. W.F. Chung, T.C. Chang, H.W. Li, S.C. Chen, Y.C. Chen, T.Y. Tseng, and Y.H. Tai Electrochemical and Solid-State Letters 14 2011 H235 H237
23. S.Y. Lee, S. Chang, and J.S. Lee Thin Solid Films 518 2010 3030 3032
24. T. Tsukada TFT/LCD: Liquid-crystal Displays Addressed by Thin-film Transistors 1996 Gordon and Breach Publishers Tokyo 42
25. K. Okamura, D. Nikolova, N. Mechau, and H. Hahn Journal of Materials Chemistry 20 2010 5651 5658
26. J.C.C. Fan, and J.B. Goodenough Journal of Applied Physics 48 1977 3524 3531
27. M. Passlack, E.F. Schubert, W.S. Hobson, M. Hong, N. Moriya, S.N.G. Chu, K. Konstadinidis, J.P. Mannaerts, M.L. Schnoes, and G.J. Zydzik Journal of Applied Physics 77 1995 686 693
28. M. Chen, Z.L. Pei, C. Sun, L.S. Wen, and X. Wang Journal of Crystal Growth 220 2000 254 262
29. B. Kumar, H. Gong, and R. Akkipeddi Journal of Applied Physics 97 2005 063706