Ultra-sensitive nucleic acids detection with electrical nanosensors based on CMOS-compatible silicon nanowire field-effect transistors

Methods

Volumn 63, Issue 3, 2013, Pages 212-218

  Lu, Na ^a   Gao, Anran ^a   Dai, Pengfei ^a   Li, Tie ^a   Wang, Yi ^a   Gao, Xiuli ^a   Song, Shiping ^b   Fan, Chunhai ^b   Wang, Yuelin ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b SHANGHAI INSTITUTE OF APPLIED PHYSICS   (China)

Author keywords

Biosensor; CMOS compatible; Nucleic acids; Silicon nanowire; Ultra sensitive

Indexed keywords

HYDROGEN; METAL OXIDE; NANOWIRE; NITROGEN; NUCLEIC ACID; SILICON;

ARTICLE; BIOCOMPATIBILITY; COVALENT BOND; DNA DETERMINATION; DNA PROBE; FIELD EFFECT TRANSISTOR; MICROSCOPY; MICROWAVE OVEN; MISMATCH REPAIR; NANOFABRICATION; NANOSENSOR; NUCLEIC ACID ANALYSIS; NUCLEOTIDE SEQUENCE; OXIDATION; PRACTICE GUIDELINE; PRIORITY JOURNAL; PROTECTIVE EQUIPMENT; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR; SURFACE PROPERTY;

(3-AMINOPROPYL) TRIETHOXYSILANE; APTES; BIOSENSOR; CHEMICAL VAPOR DEPOSITION; CMOS; CMOS-COMPATIBLE; COMPLEMENTARY METAL OXIDE SEMICONDUCTOR; CVD; GATE VOLOTAGE; I(DS); NUCLEIC ACIDS; PCB; PECVD; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PRINTED CIRCUIT BOARD; SCANNING ELECTRON MICROSCOPY; SEM; SILICON NANOWIRE; SILICON NANOWIRE FIELD-EFFECT TRANSISTORS; SILICON NANOWIRES; SILICON-ON-INSULATOR; SINW-FETS; SINWS; SOI; SOURCE/DRAIN CURRENT; SOURCE/DRAIN VOLTAGE; TETRAMETHYLAMMONIUM HYDROXIDE; TMAH; ULTRA-SENSITIVE; V(DS); V(GS);

BIOSENSING TECHNIQUES; DNA; DNA PROBES; NANOWIRES; SEMICONDUCTORS; SILICON; TRANSISTORS, ELECTRONIC;

EID: 84885858690     PISSN: 10462023     EISSN: 10959130     Source Type: Journal    
DOI: 10.1016/j.ymeth.2013.07.012     Document Type: Article

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