Integrated nanoscale silicon sensors using top-down fabrication

Applied Physics Letters

Volumn 83, Issue 22, 2003, Pages 4613-4615

  Elibol, O H ^a   Morisette, D ^a   Akin, D ^a   Denton, J P ^a   Bashir, R ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOSENSORS; CHEMICAL SENSORS; MICROELECTRONIC PROCESSING; NANOSTRUCTURED MATERIALS; SILICON SENSORS;

NANOSCALE SILICON SENSORS; SILICON NANOWIRES;

PHYSICAL CHEMISTRY;

EID: 0346846589     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1630853     Document Type: Article

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