Plasma-enhanced ALD of platinum with O2, N2 and NH3 Plasmas

ECS Journal of Solid State Science and Technology

Volumn 1, Issue 6, 2012, Pages

  Longrie, D ^a   Devloo Casier, K ^a   Deduytsche, D ^a   Van Den Berghe, S ^b   Driesen, K ^c   Detaverniera, C ^a  

^a GHENT UNIVERSITY   (Belgium)

^b BELGIAN NUCLEAR RESEARCH CENTRE   (Belgium)

^c UMICORE   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84885673958     PISSN: 21628769     EISSN: 21628777     Source Type: Journal    
DOI: 10.1149/1.009206jss     Document Type: Article

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