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Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 28, Issue 6, 2010, Pages

Platinum single-electron transistors with tunnel barriers made by atomic layer deposition

(3) George, Hubert C a Orlov, Alexei O a Snider, Gregory L a

a University of Notre Dame (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITION; ATOMS; COULOMB BLOCKADE; DIELECTRIC MATERIALS; FABRICATION; PLATINUM; TRANSIENTS;

BARRIER DIELECTRICS; COULOMB BLOCKADE OSCILLATION; FABRICATION METHOD; HIGH QUALITY; INSULATING BARRIERS; LARGE SCALE PRODUCTIONS; PRECISE CONTROL; TUNNEL BARRIER;

SINGLE ELECTRON TRANSISTORS;

EID: 78650096167 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3511432 Document Type: Article

Times cited : (9)

References (18)

1
- 21544444472
- APPLAB 0003-6951,. 10.1063/1.89690
- G. J. Dolan, Appl. Phys. Lett. APPLAB 0003-6951 31, 337 (1977). 10.1063/1.89690
- (1977) Appl. Phys. Lett. , vol.31 , pp. 337
- Dolan, G.J.¹

2
- 0001630171
- PRLTAO 0031-9007,. 10.1103/PhysRevLett.59.109
- T. A. Fulton and G. J. Dolan, Phys. Rev. Lett. PRLTAO 0031-9007 59, 109 (1987). 10.1103/PhysRevLett.59.109
- (1987) Phys. Rev. Lett. , vol.59 , pp. 109
- Fulton, T.A.¹ Dolan, G.J.²

3
- 0002412473
- Room temperature operation of a single electron transistor made by the scanning tunneling microscope nanooxidation process for the TiOx/Ti system
- DOI 10.1063/1.116747, PII S0003695196001015
- K. Matsumoto, M. Ishii, K. Segawa, Y. Oka, B. J. Vartanian, and J. S. Harris, Appl. Phys. Lett. APPLAB 0003-6951 68, 34 (1996). 10.1063/1.116747 (Pubitemid 126688198)
- (1996) Applied Physics Letters , vol.68 , Issue.1 , pp. 34-36
- Matsumoto, K.¹ Ishii, M.² Segawa, K.³ Oka, Y.⁴ Vartanian, B.J.⁵ Harris, J.S.⁶

4
- 0008300403
- Single-electron charging effects in Nb/Nb oxide-based single-electron transistors at room temperature
- DOI 10.1063/1.121218, PII S0003695198038157
- J. -i. Shirakashi, K. Matsumoto, N. Miura, and M. Konagai, Appl. Phys. Lett. APPLAB 0003-6951 72, 1893 (1998). 10.1063/1.121218 (Pubitemid 128671495)
- (1998) Applied Physics Letters , vol.72 , Issue.15 , pp. 1893-1895
- Shirakashi, J.-I.¹ Matsumoto, K.² Miura, N.³ Konagai, M.⁴

5
- 0040218501
- CVDEFX 0948-1907,. 10.1002/(SICI)1521-3862(199901)5:1<7::AID-CVDE70. CO;2-J
- M. Ritala, M. Leskela, J. P. Dekker, C. Mutsaers, P. J. Soininen, and J. Skarp, Chem. Vap. Deposition CVDEFX 0948-1907 5, 7 (1999). 10.1002/(SICI)1521- 3862(199901)5:1<7::AID-CVDE70.CO;2-J
- (1999) Chem. Vap. Deposition , vol.5 , pp. 7
- Ritala, M.¹ Leskela, M.² Dekker, J.P.³ Mutsaers, C.⁴ Soininen, P.J.⁵ Skarp, J.⁶

6
- 0001421965
- APPLAB 0003-6951,. 10.1063/1.102337
- G. S. Higashi and C. G. Fleming, Appl. Phys. Lett. APPLAB 0003-6951 55, 1963 (1989). 10.1063/1.102337
- (1989) Appl. Phys. Lett. , vol.55 , pp. 1963
- Higashi, G.S.¹ Fleming, C.G.²

7
- 33644540793
- MICEB9 0026-2692,. 10.1016/j.mejo.2005.02.076
- X. Luo, A. O. Orlov, and G. L. Snider, Microelectron. J. MICEB9 0026-2692 36, 308 (2005). 10.1016/j.mejo.2005.02.076
- (2005) Microelectron. J. , vol.36 , pp. 308
- Luo, X.¹ Orlov, A.O.² Snider, G.L.³

8
- 78650120693
- (Plenum, New York), Vol., Cha,.
- H. D. Grabert and M. H. Devoret, Proceedings of a NATO Advanced Study Institute (Plenum, New York, 1992), Vol. 294, Chap., p. 67.
- (1992) Proceedings of A NATO Advanced Study Institute , vol.294 , pp. 67
- Grabert, H.D.¹ Devoret, M.H.²

9
- 0033116184
- IEEPAD 0018-9219,. 10.1109/5.752518
- K. K. Likharev, Proc. IEEE IEEPAD 0018-9219 87, 606 (1999). 10.1109/5.752518
- (1999) Proc. IEEE , vol.87 , pp. 606
- Likharev, K.K.¹

10
- 16244366171
- Ultra-smooth platinum surfaces for nanoscale devices fabricated using chemical mechanical polishing
- DOI 10.1007/s00339-004-3170-4, Nanoelectronics
- M. Saif Islam, G. Y. Jung, T. Ha, D. R. Stewart, Y. Chen, S. Y. Wang, and R. S. Williams, Appl. Phys. A: Mater. Sci. Process. APAMFC 0947-8396 80, 1385 (2005). 10.1007/s00339-004-3170-4 (Pubitemid 40454159)
- (2005) Applied Physics A: Materials Science and Processing , vol.80 , Issue.6 , pp. 1385-1389
- Islam, M.S.¹ Jung, G.Y.² Ha, T.³ Stewart, D.R.⁴ Chen, Y.⁵ Wang, S.Y.⁶ Williams, R.S.⁷

11
- 75749084519
- APPLAB 0003-6951,. 10.1063/1.3298557
- H. C. George, M. Pierre, X. Jehl, A. O. Orlov, M. Sanquer, and G. L. Snider, Appl. Phys. Lett. APPLAB 0003-6951 96, 042114 (2010). 10.1063/1.3298557
- (2010) Appl. Phys. Lett. , vol.96 , pp. 042114
- George, H.C.¹ Pierre, M.² Jehl, X.³ Orlov, A.O.⁴ Sanquer, M.⁵ Snider, G.L.⁶

12
- 0000764282
- APPLAB 0003-6951,. 10.1063/1.117492
- M. W. Keller, J. M. Martinis, N. M. Zimmerman, and A. H. Steinbach, Appl. Phys. Lett. APPLAB 0003-6951 69, 1804 (1996). 10.1063/1.117492
- (1996) Appl. Phys. Lett. , vol.69 , pp. 1804
- Keller, M.W.¹ Martinis, J.M.² Zimmerman, N.M.³ Steinbach, A.H.⁴

13
- 72849126189
- JVTBD9 1071-1023,. 10.1116/1.3259956
- H. C. George, A. O. Orlov, R. A. Joyce, Y. Tang, and G. L. Snider, J. Vac. Sci. Technol. B JVTBD9 1071-1023 27, 3158 (2009). 10.1116/1.3259956
- (2009) J. Vac. Sci. Technol. B , vol.27 , pp. 3158
- George, H.C.¹ Orlov, A.O.² Joyce, R.A.³ Tang, Y.⁴ Snider, G.L.⁵

14
- 36749031342
- Uncertainty budget for the NIST electron counting capacitance standard, ECCS-1
- DOI 10.1088/0026-1394/44/6/010, PII S0026139407637293
- M. W. Keller, N. M. Zimmerman, and A. L. Eichenberger, Metrologia MTRGAU 0026-1394 44, 505 (2007). 10.1088/0026-1394/44/6/010 (Pubitemid 350212287)
- (2007) Metrologia , vol.44 , Issue.6 , pp. 505-512
- Keller, M.W.¹ Zimmerman, N.M.² Eichenberger, A.L.³

15
- 0033328168
- JAPNDE 0021-4922,. 10.1143/JJAP.38.7227
- G. L. Snider, A. O. Orlov, I. Amlani, G. H. Bernstein, C. S. Lent, J. L. Merz, and W. Porod, Jpn. J. Appl. Phys., Part 1 JAPNDE 0021-4922 38, 7227 (1999). 10.1143/JJAP.38.7227
- (1999) Jpn. J. Appl. Phys., Part 1 , vol.38 , pp. 7227
- Snider, G.L.¹ Orlov, A.O.² Amlani, I.³ Bernstein, G.H.⁴ Lent, C.S.⁵ Merz, J.L.⁶ Porod, W.⁷

16
- 0030879276
- Realization of a functional cell for quantum-dot cellular automata
- DOI 10.1126/science.277.5328.928
- A. O. Orlov, I. Amlani, G. H. Bernstein, C. S. Lent, and G. L. Snider, Science SCIEAS 0036-8075 277, 928 (1997). 10.1126/science.277.5328.928 (Pubitemid 27366672)
- (1997) Science , vol.277 , Issue.5328 , pp. 928-930
- Orlov, A.O.¹ Amlani, I.² Bernstein, G.H.³ Lent, C.S.⁴ Snider, G.L.⁵

17
- 0027266749
- NNOTER 0957-4484,. 10.1088/0957-4484/4/1/004
- C. S. Lent, P. D. Tougaw, W. Porod, and G. H. Bernstein, Nanotechnology NNOTER 0957-4484 4, 49 (1993). 10.1088/0957-4484/4/1/004
- (1993) Nanotechnology , vol.4 , pp. 49
- Lent, C.S.¹ Tougaw, P.D.² Porod, W.³ Bernstein, G.H.⁴

18
- 0030417867
- SUMIEK 0749-6036,. 10.1006/spmi.1996.0102
- G. H. Bernstein, G. Bazan, M. Chen, C. S. Lent, J. L. Merz, A. O. Orlov, W. Porod, G. L. Snider, and P. D. Tougaw, Superlattices Microstruct. SUMIEK 0749-6036 20, 447 (1996). 10.1006/spmi.1996.0102
- (1996) Superlattices Microstruct. , vol.20 , pp. 447
- Bernstein, G.H.¹ Bazan, G.² Chen, M.³ Lent, C.S.⁴ Merz, J.L.⁵ Orlov, A.O.⁶ Porod, W.⁷ Snider, G.L.⁸ Tougaw, P.D.⁹

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