Simultaneous electrical and optical readout of graphene-coated high Q silicon nitride resonators

Applied Physics Letters

Volumn 103, Issue 14, 2013, Pages

  Adiga, V P ^a   De Alba, R ^a   Storch, I R ^a   Yu, P A ^b   Ilic, B ^c   Barton, R A ^a   Lee, S ^d   Hone, J ^d   McEuen, P L ^e   Parpia, J M ^a   Craighead, H G ^a  

^a Cornell University   (United States)

^b California Institute of Technology   (United States)

^c Department of Theoretical and Applied Mechanics and the Cornell Nanofabrication Facility   (United States)

^d Och Spine at New York Presbyterian Hospitals   (United States)

^e Laboratory of Atomic and Solid State Physics and Sibley School of Mechanical and Aerospace Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GRAPHENE; GRAPHENE DEVICES; LIGHT ABSORPTION; NATURAL FREQUENCIES; NITRIDES; SILICON NITRIDE;

ELECTRICAL AND OPTICAL PROPERTIES; ELECTRICAL TRANSDUCTION; GRAPHENE LAYERS; HIGH QUALITY FACTORS; OPTICAL CAVITIES; OPTICAL READOUT; POSITION DEPENDENTS; RESONANT MOTIONS;

OPTICAL PROPERTIES;

EID: 84885646102     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4823457     Document Type: Article

References (37)

1. H. G. Craighead, Science 290, 1532 (2000). 10.1126/science.290.5496.1532
2. K. L. Ekinci and M. L. Roukes, Rev. Sci. Instrum. 76, 061101 (2005). 10.1063/1.1927327
3. J. D. Thompson, B. M. Zwickl, A. M. Jayich, F. Marquardt, S. M. Girvin, and J. G. E. Harris, Nature 452, 72 (2008). 10.1038/nature06715
4. R. N. Dean and A. Luque, IEEE Trans. Indus. Electron. 56, 913 (2009). 10.1109/TIE.2009.2013691
5. A. K. Naik, M. S. Hanay, W. K. Hiebert, X. L. Feng, and M. L. Roukes, Nat. Nanotechnol. 4, 445 (2009). 10.1038/nnano.2009.152
6. B. Ilic, Y. Yang, K. Aubin, R. Reichenbach, S. Krylov, and H. G. Craighead, Nano Lett. 5, 925 (2005). 10.1021/nl050456k
7. J. Park, H. Qin, M. Scalf, R. T. Hilger, M. S. Westphall, L. M. Smith, and R. H. Blick, Nano Lett. 11, 3681 (2011). 10.1021/nl201645u
8. D. Garcia-Sanchez, K. Y. Fong, H. Bhaskaran, S. Lamoreaux, and H. X. Tang, Phys. Rev. Lett. 109, 027202 (2012). 10.1103/PhysRevLett.109.027202
9. V. P. Adiga, B. Ilic, R. A. Barton, I. Wilson-Rae, H. G. Craighead, and J. M. Parpia, J. Appl. Phys. 112, 064323 (2012). 10.1063/1.4754576
10. V. P. Adiga, B. Ilic, R. A. Barton, I. Wilson-Rae, H. G. Craighead, and J. M. Parpia, Appl. Phys. Lett. 99, 253103 (2011). 10.1063/1.3671150
11. D. J. Wilson, C. A. Regal, S. B. Papp, and H. J. Kimble, Phys. Rev. Lett. 103, 207204 (2009). 10.1103/PhysRevLett.103.207204
12. I. Wilson-Rae, R. A. Barton, S. S. Verbridge, D. R. Southworth, B. Ilic, H. G. Craighead, and J. M. Parpia, Phys. Rev. Lett. 106, 047205 (2011). 10.1103/PhysRevLett.106.047205
13. R. A. Barton, I. R. Storch, V. P. Adiga, R. Sakakibara, B. R. Cipriany, B. Ilic, S. P. Wang, P. Ong, P. L. McEuen, J. M. Parpia, and H. G. Craighead, Nano Lett. 12, 4681 (2012). 10.1021/nl302036x
14. L. Sekaric, D. W. Carr, S. Evoy, J. M. Parpia, and H. G. Craighead, Sens. Actuator, A 101, 215 (2002). 10.1016/S0924-4247(02)00149-8
15. T. S. Biswas, A. Suhel, B. D. Hauer, A. Palomino, K. S. D. Beach, and J. P. Davis, Appl. Phys. Lett. 101, 093105 (2012). 10.1063/1.4748977
16. P.-L. Yu, T. P. Purdy, and C. A. Regal, Phys. Rev. Lett. 108, 083603 (2012). 10.1103/PhysRevLett.108.083603
17. A. H. Castro Neto, F. Guinea, N. M. R. Peres, K. S. Novoselov, and A. K. Geim, Rev. Mod. Phys. 81, 109 (2009). 10.1103/RevModPhys.81.109
18. R. R. Nair, P. Blake, A. N. Grigorenko, K. S. Novoselov, T. J. Booth, T. Stauber, N. M. R. Peres, and A. K. Geim, Science 320, 1308 (2008). 10.1126/science.1156965
19. C. Lee, X. Wei, J. W. Kysar, and J. Hone, Science 321, 385 (2008). 10.1126/science.1157996
20. J. S. Bunch, A. M. van der Zande, S. S. Verbridge, I. W. Frank, D. M. Tanenbaum, J. M. Parpia, H. G. Craighead, and P. L. McEuen, Science 315, 490 (2007). 10.1126/science.1136836
21. S. Shivaraman, R. A. Barton, X. Yu, J. Alden, L. Herman, M. V. S. Chandrashekhar, J. Park, P. L. McEuen, J. M. Parpia, H. G. Craighead, and M. G. Spencer, Nano Lett. 9, 3100 (2009). 10.1021/nl900479g
22. C. Chen, S. Rosenblatt, K. I. Bolotin, W. Kalb, P. Kim, I. Kymissis, H. L. Stormer, T. F. Heinz, and J. Hone, Nat. Nanotechnol. 4, 861 (2009). 10.1038/nnano.2009.267
23. A. M. van der Zande, R. A. Barton, J. S. Alden, C. S. Ruiz-Vargas, W. S. Whitney, P. H. Q. Pham, J. Park, J. M. Parpia, H. G. Craighead, and P. L. McEuen, Nano Lett. 10, 4869 (2010). 10.1021/nl102713c
24. R. A. Barton, B. Ilic, A. M. van der Zande, W. S. Whitney, P. L. McEuen, J. M. Parpia, and H. G. Craighead, Nano Lett. 11, 1232 (2011). 10.1021/nl1042227
25. S. Sridaran and S. A. Bhave, Opt. Express 19, 9020 (2011). 10.1364/OE.19.009020
26. R. Perahia, J. D. Cohen, S. Meenehan, T. P. M. Alegre, and O. Painter, Appl. Phys. Lett. 97, 191112 (2010). 10.1063/1.3515296
27. C. Xiong, L. Fan, X. Sun, and H. X. Tang, Appl. Phys. Lett. 102, 021110 (2013). 10.1063/1.4788724
28. A. M. Eriksson, D. Midtvedt, A. Croy, and A. Isacsson, Nanotechnology 24, 395702 (2013). 10.1088/0957-4484/24/39/395702
29. S. Zaitsev, O. Gottlieb, and E. Buks, Nonlinear Dyn. 69, 1589 (2012). 10.1007/s11071-012-0371-9
30. D. Yuvaraj, M. B. Kadam, O. Shtempluck, and E. Buks, J. Microelectromech. Syst. 22, 430 (2013). 10.1109/JMEMS.2012.2226931
31. K. H. Lee, T. G. McRae, G. I. Harris, J. Knittel, and W. P. Bowen, Phys. Rev. Lett. 104, 123604 (2010). 10.1103/PhysRevLett.104.123604
32. See supplementary material at http://dx.doi.org/10.1063/1.4823457 E-APPLAB-103-070339 for the details of the device fabrication, moving mirror setup, detection schemes, electrically and optically detected signal strength as a function of mirror position as well as calculations of cavity parameters and discussion of photothermal and absorption based models.
33. D. W. Carr and H. G. Craighead, J. Vac. Sci. Technol. B 15, 2760 (1997). 10.1116/1.589722
34. V. Singh, S. Sengupta, H. S. Solanki, R. Dhall, A. Allain, S. Dhara, P. Pant, and M. M. Deshmukh, Nanotechnology 21, 165204 (2010). 10.1088/0957-4484/ 21/16/165204
35. S. Lee, V. P. Adiga, R. A. Barton, A. M. van der Zande, G.-H. Lee, B. R. Ilic, A. Gondarenko, J. M. Parpia, H. G. Craighead, and J. Hone, Nano Lett. 13, 4275 (2013). 10.1021/nl4020414
36. C. H. Metzger and K. Karrai, Nature 432, 1002 (2004). 10.1038/nature03118
37. C. Metzger, I. Favero, A. Ortlieb, and K. Karrai, Phys. Rev. B 78, 035309 (2008). 10.1103/PhysRevB.78.035309