Control of material damping in High-Q membrane microresonators

Physical Review Letters

Volumn 108, Issue 8, 2012, Pages

  Yu, P L ^a   Purdy, T P ^a   Regal, C A ^a  

^a UNIVERSITY OF COLORADO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; DAMPING; INTERFACES (MATERIALS); MEMBRANES; OSCILLISTORS; RESONATORS; SILICON NITRIDE;

ALUMINUM SILICONS; MATERIAL DAMPING; MECHANICAL OSCILLATORS; MECHANICAL QUALITY FACTORS; MICRO RESONATORS; QUANTUM INTERFACES; RESONATOR MODE; THEORETICAL MODELING;

NITROGEN COMPOUNDS;

EID: 84857519259     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.108.083603     Document Type: Article

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