Approaching intrinsic performance in ultra-thin silicon nitride drum resonators

Journal of Applied Physics

Volumn 112, Issue 6, 2012, Pages

  Adiga, V P ^a   Ilic, B ^b   Barton, R A ^a   Wilson Rae, I ^c,d   Craighead, H G ^a   Parpia, J M ^a  

^a Cornell University   (United States)

^b Department of Theoretical and Applied Mechanics and the Cornell Nanofabrication Facility   (United States)

^c UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^d TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT MODELS; INTERFEROMETRIC DETECTION; INTRINSIC MECHANISMS; INTRINSIC PERFORMANCE; LOW MASS; LOW ORDER; MASS SENSING; OPTOMECHANICAL; QUALITY FACTORS; THICK MEMBRANES; ULTRATHIN SILICON;

ELECTRON BEAM LITHOGRAPHY; SILICON NITRIDE;

RESONATORS;

EID: 84867050681     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4754576     Document Type: Article

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