Micro/nano-mechanical sensors and actuators based on SOI-MEMS technology

Advances in Natural Sciences: Nanoscience and Nanotechnology

Volumn 1, Issue 1, 2010, Pages

  Dao, Dzung Viet ^a   Nakamura, Koichi ^a   Bui, Tung Thanh ^a   Sugiyama, Susumu ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

Electrostatic actuator; Mechanical sensor; MEMS; Silicon nanowire

Indexed keywords

ELECTROSTATIC ACTUATORS; ELECTROSTATICS; MECHANICAL ACTUATORS; MEMS; NANOWIRES; SILICON WAFERS; SINGLE CRYSTALS;

ATOMIC LEVEL SIMULATIONS; CRYSTALLOGRAPHIC ORIENTATIONS; EXPERIMENTAL EVALUATION; MECHANICAL SENSORS; MICRO ELECTRO MECHANICAL SYSTEM; MICRO-ELECTROSTATIC ACTUATORS; SILICON NANOWIRES; SILICON-ON- INSULATORS (SOI);

SILICON ON INSULATOR TECHNOLOGY;

EID: 84885591075     PISSN: None     EISSN: 20436262     Source Type: Journal    
DOI: 10.1088/2043-6254/1/1/013001     Document Type: Review

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