A dual axis accelerometer utilizing low doped silicon thermistor

IEEJ Transactions on Sensors and Micromachines

Volumn 126, Issue 5, 2006, Pages 190-194

  Van Dau, Thanh ^a   Dao, Dzung Viet ^a,b,c   Hayashida, Masahiro ^a   Dinh, Thien Xuan ^a,c   Sugiyama, Susumu ^a,d,e  

^a RITSUMEIKAN UNIVERSITY   (Japan)

^b AALTO UNIVERSITY   (Finland)

^c RITSUMEIKAN UNIVERSITY   (Japan)

^d Iwaki Meisei U

^e Department of Micro System Technology ^*

Author keywords

Convective accelerometer; Dual axis; Low doped p type silicon; Thermal stress; Thermistor

Indexed keywords

CONVECTIVE ACCELEROMETERS; CONVECTIVE MICROACCELEROMETERS; DUAL AXIS; LOW-DOPED P-TYPE SILICON;

COMPUTER SIMULATION; DOPING (ADDITIVES); HEAT CONVECTION; HEAT TRANSFER; MICROELECTROMECHANICAL DEVICES; MICROPROCESSOR CHIPS; NUMERICAL ANALYSIS; OPTIMIZATION; POLYSILICON; SENSITIVITY ANALYSIS; SHOCK ABSORBERS; SILICON; THERMAL STRESS;

THERMISTORS;

EID: 33646356486     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.126.190     Document Type: Conference Paper

References (13)

1. J W van Honschoten et al.: "Analytic model of a two wire thermal sensor for flow and sound measurement", J. Micromech. Microeng., Vol.14, pp.1468-1477 (2004)
2. Ke-Min Liao et al.: "A Novel Thermal-Bubble-Based Micromachined Accelerometer", Transducers, Vol 05, pp.519-522 (2005)
3. F. Mailly et al.: "Effect of gas pressure on the sensitivity of a micromachined thermal accelerometer", Sensors and Actuators., Vol.109, pp.88-94 (2003)
4. X B Luo et al.: "Study on linearity of a micromachined convective accelerometer", Micromachine Eng., Vol.65, pp 87-101 (2003)
5. N.Sabate et al.: "Multi-range silicon micromachined flow sensor", Sensors and Actuators A, Vol.110, pp 282-288 (2004)
6. M. Baroncini et al.: "Thermal characterization of a microheater for micromachined gas sensors", Sensors and Actuators., Vol 115, pp.8-14 (2004)
7. L. C. Spangler and C. J. Kemp: "ISAAC, integrate silicon automotive accelerometer", Sens. Actuators A, Vol.54, pp.523-529 (1996)
8. T. Mineta, S. Kobayashi, Y. Watanabe, S. Kanauchi, I. Nakagawa, E. Wuganuma, and M. Esashi: "Three-axis capacitive accelerometer with uniform axial sensitivities", J. Micromech. Microeng., Vol.6, pp.431-435 (1996)
9. F. Jiang, Yu-Chong Tai, C. M. Ho, and Wen J. Li: "A micromachined Polysilicon Hot-Wire Anemeter", Solid-State Senor and Actuator Workshop, pp.264-267 (1994)
10. D. V. Dao. "Study on Silicon Piezoresistive Six DOFs Micro Forced Moment Sensors and Application to Fluid Mechanics", Doctoral Thesis, Ritsumeikan Univ., Japan (2003)
11. F. N. Hooge: "1/f noise is no surface effect", Physical lett. A, Vol.29, pp.139-140 (1960)
12. J. A. Harley: "Advances in piezoresistive probes for atomic force microscopy", PhD dissertation, Standford Univ. (2002)
13. A. J. Chapman "Fundamentals of Heat Transfer" (1987)