SCOPUS 정보 검색 플랫폼

Applied Physics Letters

Volumn 94, Issue 15, 2009, Pages

Thickness dependence of nanofilm elastic modulus

(3) Fedorchenko, Alexander I a,d Wang, An Bang b Cheng, Henry H c

a INSTITUTE OF THERMOMECHANICS (Czech Republic)

b NATIONAL TAIWAN UNIVERSITY (Taiwan)

c NATIONAL TAIWAN UNIVERSITY (Taiwan)

d KUTATELADZE INSTITUTE OF THERMOPHYSICS (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

BASIC PARAMETERS; CONVENTIONAL TREATMENTS; ELASTIC MODULUS MEASUREMENTS; ELECTRONIC DEVICES; NANO-DEVICES; NANO-FILMS; PHYSICAL PARAMETERS; PLAIN STRAINS; SCALING BEHAVIORS; SI-BASED; SOLID THIN FILMS; SURFACE ENERGIES; SURFACE-TO-VOLUME RATIOS; THICKNESS DEPENDENCES; YOUNG'S MODULUS;

ELASTICITY; ELECTRIC NETWORK ANALYSIS; ELECTRONIC PROPERTIES; MAGNETIC FILMS; MOLECULAR BEAM EPITAXY; SEMICONDUCTING SILICON COMPOUNDS; SURFACE CHEMISTRY; SURFACE TENSION; THIN FILM DEVICES; THIN FILMS;

ELASTIC MODULI;

EID: 65249112675 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3120763 Document Type: Article

Times cited : (86)

References (14)

1
- 8344236776
- 0018-9383,. 10.1109/TED.2004.836648
- S. E. Thompson, M. Armstrong, C. Auth, M. Alavi, M. Buehler, R. Chau, S. Cea, T. Ghani, G. Glass, T. Hoffman, C. H. Jan, C. Kenyon, J. Klaus, K. Kuhn, Z. Ma, B. Mcintyre, K. Mistry, A. Murthy, B. Obradovic, R. Nagisetty, P. Nguyen, S. Sivakumar, R. Shaheed, L. Shifren, B. Tufts, S. Tyagi, M. Bohr, and Y. El-Mansy, IEEE Trans. Electron Devices 0018-9383 51, 1790 (2004). 10.1109/TED.2004.836648
- (2004) IEEE Trans. Electron Devices , vol.51 , pp. 1790
- Thompson, S.E.¹ Armstrong, M.² Auth, C.³ Alavi, M.⁴ Buehler, M.⁵ Chau, R.⁶ Cea, S.⁷ Ghani, T.⁸ Glass, G.⁹ Hoffman, T.¹⁰ Jan, C.H.¹¹ Kenyon, C.¹² Klaus, J.¹³ Kuhn, K.¹⁴ Ma, Z.¹⁵ McIntyre, B.¹⁶ Mistry, K.¹⁷ Murthy, A.¹⁸ Obradovic, B.¹⁹ Nagisetty, R.²⁰ more..

2
- 19944433396
- 0021-8979,. 10.1063/1.1819976
- M. L. Lee, E. A. Fitzgerald, M. T. Bulsara, M. T. Currie, and A. Lochtefeld, J. Appl. Phys. 0021-8979 97, 011101 (2005). 10.1063/1.1819976
- (2005) J. Appl. Phys. , vol.97 , pp. 011101
- Lee, M.L.¹ Fitzgerald, E.A.² Bulsara, M.T.³ Currie, M.T.⁴ Lochtefeld, A.⁵

3
- 34948845213
- 0003-6951,. 10.1063/1.2794016
- W. -P. Huang, H. -H. Cheng, G. Sun, R. -F. Lou, J. H. Yeh, and T. -M. Shen, Appl. Phys. Lett. 0003-6951 91, 142102 (2007). 10.1063/1.2794016
- (2007) Appl. Phys. Lett. , vol.91 , pp. 142102
- Huang, W.-P.¹ Cheng, H.-H.² Sun, G.³ Lou, R.-F.⁴ Yeh, J.H.⁵ Shen, T.-M.⁶

4
- 34548039505
- 0003-6951,. 10.1063/1.2771094
- K. Y. Wang, W. P. Huang, H. H. Cheng, G. Sun, R. A. Soref, R. J. Nicholas, and Y. W. Suen, Appl. Phys. Lett. 0003-6951 91, 072108 (2007). 10.1063/1.2771094
- (2007) Appl. Phys. Lett. , vol.91 , pp. 072108
- Wang, K.Y.¹ Huang, W.P.² Cheng, H.H.³ Sun, G.⁴ Soref, R.A.⁵ Nicholas, R.J.⁶ Suen, Y.W.⁷

5
- 0004097995
- (Pergamon, New York).
- L. D. Landau and E. M. Lifshitz, Theory of Elasticity (Pergamon, New York, 1986).
- (1986) Theory of Elasticity
- Landau, L.D.¹ Lifshitz, E.M.²

6
- 35949007470
- 0163-1829,. 10.1103/PhysRevB.49.10699
- F. H. Streitz, R. C. Cammarata, and K. Sierazki, Phys. Rev. B 0163-1829 49, 10699 (1994). 10.1103/PhysRevB.49.10699
- (1994) Phys. Rev. B , vol.49 , pp. 10699
- Streitz, F.H.¹ Cammarata, R.C.² Sierazki, K.³

7
- 0034276389
- 0957-4484,. 10.1088/0957-4484/11/3/301
- R. E. Miller and V. B. Shenoy, Nanotechnology 0957-4484 11, 139 (2000). 10.1088/0957-4484/11/3/301
- (2000) Nanotechnology , vol.11 , pp. 139
- Miller, R.E.¹ Shenoy, V.B.²

8
- 0036922014
- 1063-7834,. 10.1134/1.1529921
- A. M. Krivtsov and N. F. Morozov, Phys. Solid State 1063-7834 44, 2260 (2002). 10.1134/1.1529921
- (2002) Phys. Solid State , vol.44 , pp. 2260
- Krivtsov, A.M.¹ Morozov, N.F.²

9
- 1342328043
- 1359-6462,. 10.1016/j.scriptamat.2004.01.033
- P. Villain, P. Beauchamp, K. F. Badawi, P. Goudeau, and P. O. Renault, Scr. Mater. 1359-6462 50, 1247 (2004). 10.1016/j.scriptamat.2004.01.033
- (2004) Scr. Mater. , vol.50 , pp. 1247
- Villain, P.¹ Beauchamp, P.² Badawi, K.F.³ Goudeau, P.⁴ Renault, P.O.⁵

10
- 34548426489
- 0218-625X,. 10.1142/S0218625X07010044
- J. -G. Guo and Y. -P. Zhao, Surf. Rev. Lett. 0218-625X 14, 667 (2007). 10.1142/S0218625X07010044
- (2007) Surf. Rev. Lett. , vol.14 , pp. 667
- Guo, J.-G.¹ Zhao, Y.-P.²

11
- 34447519138
- 0020-7683,. 10.1016/j.ijsolstr.2007.01.028
- I. -L. Chang, S. -H. Chang, and J. -C. Huang, Int. J. Solids Struct. 0020-7683 44, 5818 (2007). 10.1016/j.ijsolstr.2007.01.028
- (2007) Int. J. Solids Struct. , vol.44 , pp. 5818
- Chang, I.-L.¹ Chang, S.-H.² Huang, J.-C.³

12
- 25444498624
- A. I. Fedorchenko, V. I. Mashanov, H. -H. Cheng, and A. -B. Wang, J. Mech. 21, 131 (2005).
- (2005) J. Mech. , vol.21 , pp. 131
- Fedorchenko, A.I.¹ Mashanov, V.I.² Cheng, H.-H.³ Wang, A.-B.⁴

13
- 33746585363
- 0003-6951,. 10.1063/1.2236299
- A. I. Fedorchenko, A. -B. Wang, V. I. Mashanov, H. -H. Cheng, and W. -P. Huang, Appl. Phys. Lett. 0003-6951 89, 043119 (2006). 10.1063/1.2236299
- (2006) Appl. Phys. Lett. , vol.89 , pp. 043119
- Fedorchenko, A.I.¹ Wang, A.-B.² Mashanov, V.I.³ Cheng, H.-H.⁴ Huang, W.-P.⁵

14
- 0004280648
- (McGraw-Hill, New York).
- C. A. Wert and R. M. Thomson, Physics of Solids (McGraw-Hill, New York, 1970).
- (1970) Physics of Solids
- Wert, C.A.¹ Thomson, R.M.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.