Silicon piezoresistive six-degree of freedom force-moment micro sensor

Sensors and Materials

Volumn 15, Issue 3, 2003, Pages 113-135

  Dao, Dzung Viet ^a   Toriyama, Toshiyuki ^b   Wells, John ^a   Sugiyama, Susumu ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

^b NEW ENERGY AND INDUSTRIAL TECHNOLOGY DEVELOPMENT ORGANIZATION   (Japan)

Author keywords

6 degrees of freedom; FEM analysis; Micro force moment sensor; Piezoresistance effect

Indexed keywords

EID: 0038043544     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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