Silicon carbide-based hydrogen gas sensors for high-temperature applications

Sensors (Switzerland)

Volumn 13, Issue 10, 2013, Pages 13575-13583

  Kim, Seongjeen ^a   Choi, Jehoon ^a,b   Jung, Minsoo ^a   Joo, Sungjae ^b   Kim, Sangchoel ^b  

^a Kyungnam University   (South Korea)

^b Korea Electrotechnology Research Institute (KERI)   (South Korea)

Author keywords

High temperature; Hydrogen sensor; MIS structure; SiC; Ta2O5

Indexed keywords

CHEMICAL SENSORS; GAS DETECTORS; GAS PERMEABILITY; HIGH TEMPERATURE APPLICATIONS; MIS DEVICES; PROCESS MONITORING; SILICON CARBIDE; TANTALUM OXIDES;

HIGH TEMPERATURE; HYDROGEN SENSOR; MIS STRUCTURE; SIC; TA2O5;

HYDROGEN;

EID: 84885336236     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s131013575     Document Type: Article

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