A novel microelectronic gas sensor utilizing carbon nanotubes for hydrogen gas detection

Sensors and Actuators, B: Chemical

Volumn 93, Issue 1-3, 2003, Pages 327-332

  Wong, Y M ^a   Kang, W P ^a   Davidson, J L ^a   Wisitsora At, A ^a   Soh, K L ^a  

^a VANDERBILT UNIVERSITY   (United States)

Author keywords

Carbon nanotubes; Hydrogen detection; Microelectronic gas sensor; Schottky diode

Indexed keywords

CARBON NANOTUBES; CATALYSTS; GAS DETECTORS; HYDROGEN; MICROELECTRONIC PROCESSING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCHOTTKY BARRIER DIODES;

CATALYTIC ACTIVATION;

CHEMICAL SENSORS;

EID: 0038013790     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(03)00213-2     Document Type: Conference Paper

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