Thin film bulk acoustic wave resonators for gravimetric sensing

Nanosystems Design and Technology

Volumn , Issue , 2009, Pages 103-116

  Milyutin, Evgeny ^a   Muralt, Paul ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84883864592     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1007/978-1-4419-0255-9_5     Document Type: Chapter

References (29)

1. Lu C-S (1975) Mass determination with piezoelectric quartz crystal resonators. J Vac Sci Technol 12:578-583
2. Pulker KH, Benes E, Hammer D, Söllner E (1976) Progress in monitoring thin film thickness with quartz crystal resonators. Thin Solid Films 32:27-33
3. Martin SJ, Ricco AJ, Niemzyk TM, Frye GC (1989) Characterization of SH acoustic plate mode liquid sensors. Sens Actuators 20:253
4. Vellekoop MJ (1998) Acoustic wave sensors and their technology. Ultrasonics 36:7-14
5. White RM,Wicher PJ,Wenzel SW, Zellers ET (1987) Plate-mode ultrasonic oscillator sensors. IEEE Trans UFFC 34:162
6. Gizeli E, Goddard NJ, Lowe CR, Stevenson AC (1992) A love plate biosensor utilizing a polymer layer. Sens Actuators B 6:131
7. Kovacs G, Venema A (1992) Theoretical cpmparison of sensitivities of acoustic shear wave modes for bio-chemical sensing in liquids. Appl Phys Lett 61:639
8. Wingqvist G, Bjurstrom J, Liljeholm L, Yantchev V, Katardjiev I (2007) Shear mode AlN thin film electro-acoustic resonant sensor operation in viscous media. Sens Actuators B 123: 466-473
9. Lakin KM, McCarron KT, Rose RE (1995) Solidly mounted resonators and filters. In: IEEE Ultrasonics Symposium. IEEE, Seattle, WA, USA
10. Gabl R, Feucht H-D, Zeininger H, Eckstein G, Schreiter M, Primig R, Pitzer D, Wersing W (2004) First results on label free detection of DNA and protein moecules using a novel integrated sensor technology based on gravimetric detection principles. Biosens Bioelectron 19:615-620
11. Weber J, Albers WM, Tuppurainen J, Link M, Gabl R, Wersing W, Schreiter M (2006) Shear mode FBAR as highly sensitive liquid biosensors. Sens Actuators A 128:84-88
12. Rey-Mermet S, Lanz R, Muralt P (2006) Bulk acoustic wave resonators operating at 8 GHz for gravimetric sensing of organic films. Sens Actuators B 114:681-686
13. Milyutin E, Gentil S, Muralt P (2008) Shear mode BAW resonator based on c-axis oriented AlN thin film. J Appl Phys 104:084508
14. Wenzel SW, White RM (1989) Analytic comparison of the sensitivities of bulk-wave, surfacewave, and flexural plate-wave utlrasonic gravimetric sensors. Appl Phys Lett 54:1976-1978
15. Kösslinger C, Drost S, Aberl F,Wolf H, Koch S,Woias P (1992) A quartz crystal biosensor for measurements in liquids. Biosens Bioelectron 7:397-404
16. Ballantine DS, White RM,Martin SJ, Ricco AJ, Zellers ET, Frye GC,Wohltjen H (eds) (1997) Acoustic wave sensors. Academic, San Diego
17. Harding GL, Du J (1997) Design and properties of quartz-based Love wave acoustic sensors incorporating silicon dioxide and PMMA guiding layers. Smart Mater Struct 6:716-720
18. Muralt P (2008) Piezoelectrics in micro and nanosytems: Solutions for a wide range of applications. J Nanosci Technol 8:2560-2567
19. Muralt P (2000) Ferroelectric thin films for microsensors and actuators: A review. JMicromech Microeng 10:136-146
20. Drusedau TP, Blasing J (2000) Optical and structural properties of highly c-axis oriented nitride prepared by sputter deposition in pure nitride. Thin Solid Films 377:27-31
21. Dubois M-A, Muralt P (2001) Stress and piezoelectric properties of AlN thin films deposited onto metal electrodes by pulsed direct current reactive sputtering. J Appl Phys 89:6389-6395
22. Takikawa H, Kimura K, Miyano R, Sakakibara T, Bendavid A, martin PJ, Matsumuro A, Tsutsumi K (2001) Effect of subsgtrate bias on AlN thin film prepariation in shielded reactive vacuum arc deposition. Thin Solid Films 386:276-280
23. Artieda A, Barbieri M, Sandu CS,Muralt, P (2009) Effect of substrate roughness on c-oriented AIN thin films. Journal of Applied Physics, 105, 024504
24. Bjurstrom J,Wingqvist G, Katardjiev I (2006) Synthesis of textured thin film piezoelectric AlN films with a nonzero c-axis mean tilt for the fabrication of shear mode resonators. IEEE Trans UFFC 53:2095-2100
25. Yanagitani T, Kiuchi M, Matsukawa M, Watanabe Y (2007) Shear mode electromechanical coupling coefficient k15 and crystallites alignment of (11-20) texture ZnO films. J Appl Phys 102:024110
26. Bjurstrom J, Rosen D, Katardjiev I, Yanchev VM, Petrov I (2004) Dependence of the electromechanical coupling on the degree of orientation of c-texture thin AlN films. IEEE Trans UFFC 51:1347-1353
27. Aigner R, Kaitila J, Ellia J, Elbrecht L, Nessler W, Handmann M, Herzog T, Marksteiner S (2003) Bulk-acoustic wave filters: Performance optimization and volume manufacturing. IEEE IMS 3:2001-2004
28. Benetti M, Cannata D, DiPietrantionio F, Foglietti V (2005) Microbalance chemical sensor based on thin-film bulk acoustic wave resonators. Appl Phys Lett 87:173504
29. Ballato A, Gualtieri JG (1994) Advances in high-Q piezoelectric resonator materials and devices. IEEE Trans UFFC 41:834-844