SCOPUS 정보 검색 플랫폼

Volumn 377-378, Issue , 2000, Pages 27-31

Optical and structural properties of highly c-axis oriented aluminum nitride prepared by sputter-deposition in pure nitrogen

(2) Drüsedau, Tilo P a Bläsing, Jürgen a

a OTTO VON GUERICKE UNIVERSITY (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; COMPUTER SIMULATION; MAGNETRON SPUTTERING; MONTE CARLO METHODS; REFRACTIVE INDEX; SPUTTER DEPOSITION; SUBSTRATES; X RAY CRYSTALLOGRAPHY;

REACTIVE MAGNETRON SPUTTERING; TAUC GAP;

OPTICAL FILMS;

EID: 0042257218 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(00)01380-8 Document Type: Article

Times cited : (47)

References (16)

1
- 0003685209
- (Ed.), INSPEC, London
- J.H. Edgar (Ed.), Properties of Group III Nitrides, EMIS Datareviews, vol. 11, INSPEC, London, 1994.
- (1994) Properties of Group III Nitrides, EMIS Datareviews , vol.11
- Edgar, J.H.¹

2
- 0030504421
- Cheng C.C., Chen Y.C., Wang H.J., Chen W.R. J. Vac. Sci. Technol. A. 14:1996;2238.
- (1996) J. Vac. Sci. Technol. a , vol.14 , pp. 2238
- Cheng, C.C.¹ Chen, Y.C.² Wang, H.J.³ Chen, W.R.⁴

3
- 0030825527
- Gregory O.J., Slot A.B., Amons P.S., Crisman E.E. Surf. Coat. Technol. 88:1995;79.
- (1995) Surf. Coat. Technol. , vol.88 , pp. 79
- Gregory, O.J.¹ Slot, A.B.² Amons, P.S.³ Crisman, E.E.⁴

4
- 0029288587
- Penza M., De Riccardis M.F., Mirenghi L., Tagliente M.A., Verona E. Thin Solid Films. 259:1994;154.
- (1994) Thin Solid Films , vol.259 , pp. 154
- Penza, M.¹ De Riccardis, M.F.² Mirenghi, L.³ Tagliente, M.A.⁴ Verona, E.⁵

5
- 0032483874
- Meng G.Y., Xie S., Peng D.K. Thin Solid Films. 334:1998;145.
- (1998) Thin Solid Films , vol.334 , pp. 145
- Meng, G.Y.¹ Xie, S.² Peng, D.K.³

6
- 0000138239
- Zetterling C.M., Östling M., Wongchotigul K., Spencer M.G., Tang X. J. Appl. Phys. 82:1997;2990.
- (1997) J. Appl. Phys. , vol.82 , pp. 2990
- Zetterling, C.M.¹ Östling, M.² Wongchotigul, K.³ Spencer, M.G.⁴ Tang, X.⁵

7
- 0041301378
- Henlein C., Grepstad J.K., Einfeldt S., Hommel D., Berge T., Grande A.P. J. Appl. Phys. 83:1998;6023.
- (1998) J. Appl. Phys. , vol.83 , pp. 6023
- Henlein, C.¹ Grepstad, J.K.² Einfeldt, S.³ Hommel, D.⁴ Berge, T.⁵ Grande, A.P.⁶

8
- 0030505093
- Wang D.-Y., Nagahata Y., Masuda M., Hayashi Y. J. Vac. Sci. Technol. A. 14:1996;3092.
- (1996) J. Vac. Sci. Technol. a , vol.14 , pp. 3092
- Wang, D.-Y.¹ Nagahata, Y.² Masuda, M.³ Hayashi, Y.⁴

9
- 0032022746
- Ishihara M., Li S.J., Akashi K., Ide Y. Thin Solid Films. 316:1998;152.
- (1998) Thin Solid Films , vol.316 , pp. 152
- Ishihara, M.¹ Li, S.J.² Akashi, K.³ Ide, Y.⁴

10
- 0032349753
- Drüsedau T., Löhmann M., Garke B. J. Vac. Sci. Technol. A. 16:1998;2728.
- (1998) J. Vac. Sci. Technol. a , vol.16 , pp. 2728
- Drüsedau, T.¹ Löhmann, M.² Garke, B.³

11
- 0026255721
- Drüsedau T. J. Non-Cryst. Solids. 135:1991;204.
- (1991) J. Non-Cryst. Solids , vol.135 , pp. 204
- Drüsedau, T.¹

12
- 0040522756
- Freistedt H., Stolze F., Zacharias M., Bläsing J., Drüsedau T. Phys. Stat. Solidi B. 193:1996;375.
- (1996) Phys. Stat. Solidi B , vol.193 , pp. 375
- Freistedt, H.¹ Stolze, F.² Zacharias, M.³ Bläsing, J.⁴ Drüsedau, T.⁵

13
- 0000028360
- Klabunde F., Löhmann M., Bläsing J., Drüsedau T. J. Appl. Phys. 80:1996;6266.
- (1996) J. Appl. Phys. , vol.80 , pp. 6266
- Klabunde, F.¹ Löhmann, M.² Bläsing, J.³ Drüsedau, T.⁴

14
- 0007474101
- ICDD, Newtown Square, PA
- PDF-2 Database, ICDD, Newtown Square, PA, 1992.
- (1992) PDF-2 Database

15
- 0003400638
- New York: John Wiley & Sons
- Chapman B. Glow Discharge Processes. 1980;270 John Wiley & Sons, New York.
- (1980) Glow Discharge Processes , pp. 270
- Chapman, B.¹

16
- 0031146159
- Drüsedau T., Klabunde F., Veit P., Hempel T. Phys. Stat. Solidi A. 161:1997;167.
- (1997) Phys. Stat. Solidi a , vol.161 , pp. 167
- Drüsedau, T.¹ Klabunde, F.² Veit, P.³ Hempel, T.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.