Design, modeling, and characterization of a MEMS micro-gripper with an integrated electrothermal force sensor

2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics: Mechatronics for Human Wellbeing, AIM 2013

Volumn , Issue , 2013, Pages 348-353

  Piriyanont, Busara ^a   Moheimani, S O Reza ^a  

^a UNIVERSITY OF NEWCASTLE   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMEDICAL RESEARCH; DISPLACEMENT INFORMATION; INSTRUMENTATION AMPLIFIER; OUTPUT VOLTAGES; PICK-AND-PLACE; RESISTIVE SENSOR; SILICON-ON INSULATORS; TEMPERATURE DIFFERENCES;

BIOCOMPATIBILITY; ELECTRIC HEATING; GRIPPERS; INDUSTRIAL APPLICATIONS; SENSORS;

INTELLIGENT MECHATRONICS;

EID: 84883737402     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/AIM.2013.6584116     Document Type: Conference Paper

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