Protruding microgripper with force amplification and parallel jaw motion for in-situ sample manipulation in SEM and FIB-machines

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 268-271

  Krijnen, G ^a   Haanstra, R ^a   Potters, E ^b   Berenschot, J W ^a   Von Harrach, S ^c   Elwenspoek, M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b PHILIPS RESEARCH LABORATORIES   (Netherlands)

^c Thermo Fisher Scientific   (United States)

Author keywords

Biomembranes; Electron beams; Electrostatic actuators; Focusing; Grippers; Ion beams; Scanning electron microscopy; Silicon; Testing; Voltage

Indexed keywords

ACTUATORS; ELECTRIC POTENTIAL; ELECTRON BEAMS; ELECTRON MICROSCOPY; ELECTROSTATICS; FOCUSING; GRIPPERS; ION BEAMS; MECHANICAL ACTUATORS; MICROSYSTEMS; SCANNING ELECTRON MICROSCOPY; SILICON; SOLID-STATE SENSORS; TESTING; TRANSDUCERS;

ACTUATION VOLTAGES; BIOMEMBRANES; COMB-DRIVE ACTUATOR; ELECTROSTATIC ACTUATION; FOCUSSED ION BEAMS; FORCE AMPLIFICATION; MECHANICAL AMPLIFICATION; SAMPLE MANIPULATION;

ELECTROSTATIC ACTUATORS;

EID: 84944747179     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215304     Document Type: Conference Paper

References (8)

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