Design of an electrostatic MEMS microgripper system integrated with force sensor

Proceedings of the International Conference on Microelectronics, ICM

Volumn , Issue , 2008, Pages 236-239

  Amjad, Kinnan ^a   Bazaz, Shafaat A ^a   Lai, Yongjun ^b  

^a GIK INSTITUTE OF ENGINEERING SCIENCES AND TECHNOLOGY   (Pakistan)

^b QUEEN S UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE SENSORS; DUAL ACTUATION; ELECTROSTATIC ACTUATION; ELECTROSTATIC MEMS; FORCE SENSING; FORCE SENSOR; INPUT VOLTAGES; MICROGRIPPER; OBJECT SIZE; TWO STAGE;

ACTUATORS; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; GRIPPERS; MICROELECTRONICS; SENSORS;

DESIGN;

EID: 77951135058     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICM.2008.5393544     Document Type: Conference Paper

References (16)

1. Nikolai Dechev, William L. Cleghorn, James K. Mills "Microassembly of 3-D Microstructures Using a Compliant, Passive Microgripper", Journal of Microelectromechanical Systems, Vol.13, NO.2, April 2004
2. B. E. Volland et al., "Electrostatically driven microgripper", Microelectron. Eng 61/62 (2002), pp. 1015-1023.
3. I. P. F. Harouche and C. Shafai, "Simulation of shaped comb drive as a stepped actuator for microtweezers application", Sens. Actuators, A 123-124 (2005), pp. 540-546.
4. Yongjun Lai, Andre Belisle, Marek Kujath and Ted Hubbard "Micro-machined Planar grippers" Proceedings of the 11th world congress in Mechanism and Machine Science, 2004.
5. N. Chronis, L. P. Lee, "Electrothermally activated SU-8 microgripper for single cell manipulation in solution" (2005) Journal of Microelectro-mechanical Systems, 14 (4), pp. 857-863.
6. K. Ivanova, T. Ivanov, A. Badar, B. E. Volland, I. W. Rangelow, D. Andrijasevic, F. Sumecz, I. Kostic, "Thermally driven microgripper as a tool for micro assembly" (2006) Microelectronic Engineering, 83 (4-9 SPEC. ISS.), pp. 1393-1395.
7. K. K. Tan, and S. C. Ng, "Computer controlled piezo actuator for cell manipulation". IEE Proceedings of Nanobiotechnology, 150, 1 (June 2003): 15-20.
8. R. J. Chang, P. W. Shih, R. Z. Huang, and K. L. Lin, "Application of Piezo-driven Polymer Microgripper in Automatic Transportation of Micro Object," IEEE Int. Conf. Mechatronics, pp. 140-144, 2005.
9. S. K. Jericho, M. H. Jericho,T. Hubbard, M. Kujath, "Micro- electromechanical systems microtweezers for the manipulation of bacteria and small particles" (2004) Review of Scientific Instruments, 75 (5 PART 1), pp. 1280-1282.
10. M. Tanimoto, F. Arai, T. Fukuda, H. Iwata, K. Itoigawa, Y. Gotoh, M. Hashimoto, M. Negoro, "Micro Force Sensor for Intravascular Neurosurgery and in VIVO Experiment" 1998 IEEE.
11. Shengyuan Yang, M. Taher, A. Saif, "MEMS based force sensors for the study of indentation response of single living cells" Sensors and Actuators A 135(2007) 16-22.
12. Kim Deok-Ho, Moon Gu Lee, Kim Byungkyu, Sun Yu, "A superelastic alloy microgripper with embedded electromagnetic actuators and piezoelectric force sensors: a numerical and experimental study" Smart Mater. Struct. 14 (2005), pp.1265-1272.
13. Issam Bait Bahadur, James Mills, Yu Sun "Design of a MEMS-Based Resonat Force Sensor for Compliant, Passive Microgripping", in the Proceedings of the IEEE international Conference on Mechatronics & Automation, Niagara Falls, Canada, July 2005.
14. F. Beyeler, D. J. Bell, J. Nelson, Y. Sun, A. Neild, S. Oberti, J. Dual, "Design of a micro-gripper and an ultrasonic manipulator for handling micron sized objects," Proceedings of the 2006 IEEE/RSJ International Conference on Intelligent Robots and Systems October 9-15, 2006, Beijing, China.
15. SOIMUMPs Design Handbook.
16. http://www.irvine-sensors.com/pdf/MS3110BDPC-users-manual-USE.pdf.