A smart material microamplification mechanism fabricated using LIGA

Smart Materials and Structures

Volumn 7, Issue 1, 1998, Pages 105-112

  Pokines, Brett J ^a   Garcia, Ephrahim ^a  

^a VANDERBILT UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; AMPLIFICATION; CERAMIC MATERIALS; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; OPTICAL SWITCHES; PIEZOELECTRIC DEVICES;

MICROAMPLIFICATION;

INTELLIGENT MATERIALS;

EID: 0032001294     PISSN: 09641726     EISSN: None     Source Type: Journal    
DOI: 10.1088/0964-1726/7/1/012     Document Type: Article

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