Investigating the reliability of electrostatic comb-drive actuators used in microfluidic and space systems using finite element analysis

Canadian Journal of Electrical and Computer Engineering

Volumn 27, Issue 4, 2002, Pages 195-200

  Moussa, Walied A ^a   Ahmed, Hesham ^a   Badawy, Wael ^b   Moussa, Medhat ^c  

^a UNIVERSITY OF ALBERTA   (Canada)

^b UNIVERSITY OF CALGARY   (Canada)

^c UNIVERSITY OF GUELPH   (Canada)

Author keywords

Comb drives; Finite element; MEMS failure mechanisms; MEMS reliability; On a chip systems

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; FLUIDICS; MICROELECTROMECHANICAL DEVICES; MICROPROCESSOR CHIPS; SPACE APPLICATIONS;

MICROFLUIDIC SYSTEMS; SYSTEM-ON-CHIP (SOC);

ELECTROSTATIC ACTUATORS;

EID: 0036822702     PISSN: 08408688     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)

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