Review of chemical vapor deposition of graphene and related applications

Accounts of Chemical Research

Volumn 46, Issue 10, 2013, Pages 2329-2339

  Zhang, Yi ^a,b   Zhang, Luyao ^a   Zhou, Chongwu ^a,b  

^a University of Southern California ^*  (United States)

^b UNIVERSITY OF SOUTHERN CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84883596929     PISSN: 00014842     EISSN: 15204898     Source Type: Journal    
DOI: 10.1021/ar300203n     Document Type: Article

References (50)

1. Novoselov, K. S.; Geim, A. K.; Morozov, S. V.; Jiang, D.; Zhang, Y.; Dubonos, S. V.; Grigorieva, I. V.; Firsov, A. A. Electric Field Effect in Atomically Thin Carbon Films Science 2004, 306, 666-669
2. Novoselov, K. S.; Geim, A. K.; Morozov, S. V.; Jiang, D.; Katsnelson, M. I.; Grigorieva, I. V.; Dubonos, S. V.; Firsov, A. A. Two-Dimensional Gas of Massless Dirac Fermions in Graphene Nature 2005, 438, 197-200
3. Zhang, Y. B.; Tan, Y. W.; Stormer, H. L.; Kim, P. Experimental Observation of the Quantum Hall Effect and Berry's Phase in Graphene Nature 2005, 438, 201-204
4. Geim, A. K.; Novoselov, K. S. The Rise of Graphene Nat. Mater. 2007, 6, 183-191
5. Geim, A. K. Graphene: Status and Prospects Science 2009, 324, 1530-1534
6. Fuhrer, M. S.; Lau, C. N.; MacDonald, A. H. Graphene: Materially Better Carbon MRS Bull. 2010, 35, 289-295
7. Castro Neto, A. H.; Guinea, F.; Peres, N. M. R.; Novoselov, K. S.; Geim, A. K. The Electronic Properties of Graphene Rev. Mod. Phys. 2009, 81, 109-162
8. Schwierz, F. Graphene Transistors Nat. Nanotechnol. 2010, 5, 487-496
9. Bonaccorso, F.; Sun, Z.; Hasan, T.; Ferrari, A. C. Graphene Photonics and Optoelectronics Nat. Photonics 2010, 4, 611-622
10. Brownson, D. A. C.; Kampouris, D. K.; Banks, C. E. An Overview of Graphene in Energy Production and Storage Applications J. Power Sources 2011, 196, 4873-4885
11. Pumera, M. Graphene in Biosensing Mater. Today 2011, 14, 308-315
12. Park, S.; Ruoff, R. S. Chemical Methods For the Production of Graphenes Nat. Nanotechnol. 2009, 5, 309-309
13. Mattevi, C.; Kim, H.; Chhowalla, M. A Review of Chemical Vapour Deposition of Graphene on Copper J. Mater. Chem. 2011, 21, 3324-3334
14. Berger, C.; Song, Z. M.; Li, T. B.; Li, X. B.; Ogbazghi, A. Y.; Feng, R.; Dai, Z. T.; Marchenkov, A. N.; Conrad, E. H.; First, P. N.; de Heer, W. A. Ultrathin Epitaxial Graphite: 2D Electron Gas Properties and a Route Toward Graphene-based Nanoelectronics J. Phys. Chem. B 2004, 108, 19912-19916
15. Berger, C.; Song, Z. M.; Li, X. B.; Wu, X. S.; Brown, N.; Naud, C.; Mayou, D.; Li, T. B.; Hass, J.; Marchenkov, A. N.; Conrad, E. H.; First, P. N.; de Heer, W. A. Electronic Confinement and Coherence in Patterned Epitaxial Graphene Science 2006, 312, 1191-1196
16. Stankovich, S.; Dikin, D. A.; Dommett, G. H. B.; Kohlhaas, K. M.; Zimney, E. J.; Stach, E. A.; Piner, R. D.; Nguyen, S. T.; Ruoff, R. S. Graphene-based Composite Materials Nature 2006, 442, 282-286
17. Yu, Q. K.; Lian, J.; Siriponglert, S.; Li, H.; Chen, Y. P.; Pei, S. S. Graphene Segregated on Ni Surfaces and Transferred to Insulators Appl. Phys. Lett. 2008, 93, 113103
18. De Arco, L. G.; Zhang, Y.; Kumar, A.; Zhou, C. Synthesis, Transfer, and Devices of Single- and Few-Layer Graphene by Chemical Vapor Deposition IEEE Trans. Nanotechnol. 2009, 8, 135-138
19. Reina, A.; Jia, X.; Ho, J.; Nezich, D.; Son, H.; Bulovic, V.; Dresselhaus, M. S.; Kong, J. Large Area, Few-Layer Graphene Films on Arbitrary Substrates by Chemical Vapor Deposition Nano Lett. 2009, 9, 30-35
20. Kim, K. S.; Zhao, Y.; Jang, H.; Lee, S. Y.; Kim, J. M.; Kim, K. S.; Ahn, J.-H.; Kim, P.; Choi, J.-Y.; Hong, B. H. Large-scale Pattern Growth of Graphene Films for Stretchable Transparent Electrodes Nature 2009, 457, 706-710
21. Li, X.; Cai, W.; An, J.; Kim, S.; Nah, J.; Yang, D.; Piner, R.; Velamakanni, A.; Jung, I.; Tutuc, E.; Banerjee, S. K.; Colombo, L.; Ruoff, R. S. Large-Area Synthesis of High-Quality and Uniform Graphene Films on Copper Foils Science 2009, 324, 1312-1314
22. Sutter, P. W.; Flege, J.-I.; Sutter, E. A. Epitaxial Graphene on Ruthenium Nat. Mater. 2008, 7, 406-411
23. Coraux, J.; N'Diaye, A. T.; Busse, C.; Michely, T. Structural Coherency of Graphene on Ir(111) Nano Lett. 2008, 8, 565-570
24. Sutter, P.; Sadowski, J. T.; Sutter, E. Graphene on Pt(111): Growth and Substrate Interaction Phys. Rev. B 2009, 80, 245411
25. Varykhalov, A.; Rader, O. Graphene Grown on Co(0001) Films and Islands: Electronic Structure and Its Precise Magnetization Dependence Phys. Rev. B 2009, 80, 035437
26. Kwon, S. Y.; Ciobanu, C. V.; Petrova, V.; Shenoy, V. B.; Bareno, J.; Gambin, V.; Petrov, I.; Kodambaka, S. Growth of Semiconducting Graphene on Palladium Nano Lett. 2009, 9, 3985-3990
27. ASM Handbook: Alloy Phase Diagrams; Massalski, T. B.; Okamoto, H.; Subramanian, P. R.; Kacprzak, L., Eds.; ASM International: Materials Park, OH, 2002; Vol. 3.
28. Eizenberg, M.; Blakely, J. M. Carbon Monolayer Phase Condensation on Ni(111) Surf. Sci. 1979, 82, 228-236
29. Zhang, Y.; Gomez, L.; Ishikawa, F. N.; Madaria, A.; Ryu, K.; Wang, C.; Badmaev, A.; Zhou, C. Comparison of Graphene Growth on Single-Crystalline and Polycrystalline Ni by Chemical Vapor Deposition J. Phys. Chem. Lett. 2010, 1, 3101-3107
30. Wang, S. M.; Pei, Y. H.; Wang, X.; Wang, H.; Meng, Q. N.; Tian, H. W.; Zheng, X. L.; Zheng, W. T.; Liu, Y. C. Synthesis of Graphene on a Polycrystalline Co Film by Radio-frequency Plasma-enhanced Chemical Vapour Deposition J. Phys. D: Appl. Phys. 2010, 43, 455402
31. Miniussi, E.; Pozzo, M.; Baraldi, A.; Vesselli, E.; Zhan, R. R.; Comelli, G.; Mentes, T. O.; Nino, M. A.; Locatelli, A.; Lizzit, S.; Alfe, D. Thermal Stability of Corrugated Epitaxial Graphene Grown on Re(0001) Phys. Rev. Lett. 2011, 106
32. Li, X. S.; Cai, W. W.; Colombo, L.; Ruoff, R. S. Evolution of Graphene Growth on Ni and Cu by Carbon Isotope Labeling Nano Lett. 2009, 9, 4268-4272
33. Wu, W.; Jauregui, L. A.; Su, Z.; Liu, Z.; Bao, J.; Chen, Y. P.; Yu, Q. Growth of Single Crystal Graphene Arrays by Locally Controlling Nucleation on Polycrystalline Cu Using Chemical Vapor Deposition Adv. Mater. 2011, 23, 4898-4903
34. Luo, Z.; Kim, S.; Kawamoto, N.; Rappe, A. M.; Johnson, A. T. C. Growth Mechanism of Hexagonal-Shape Graphene Flakes with Zigzag Edges ACS Nano 2011, 5, 9154-9160
35. Yu, Q. K.; Jauregui, L. A.; Wu, W.; Colby, R.; Tian, J. F.; Su, Z. H.; Cao, H. L.; Liu, Z. H.; Pandey, D.; Wei, D. G. Control and Characterization of Individual Grains and Grain Boundaries in Graphene Grown by Chemical Vapour Deposition Nat. Mater. 2011, 10, 443-449
36. Gao, L. B.; Ren, W. C.; Xu, H. L.; Jin, L.; Wang, Z. X.; Ma, T.; Ma, L. P.; Zhang, Z. Y.; Fu, Q.; Peng, L. M.; Bao, X. H.; Cheng, H. M. Repeated Growth and Bubbling Transfer of Graphene With Millimetre-size Single-crystal Grains Using Platinum Nat. Commun. 2012, 3, 699
37. Yan, Z.; Lin, J.; Peng, Z.; Sun, Z.; Zhu, Y.; Li, L.; Xiang, C.; Samuel, E. L.; Kittrell, C.; Tour, J. M. Toward the Synthesis of Wafer-Scale Single-Crystal Graphene on Copper Foils ACS Nano 2012, 6, 9110-9117
38. Wu, Y. A.; Robertson, A. W.; Schaffel, F.; Speller, S. C.; Warner, J. H. Aligned Rectangular Few-Layer Graphene Domains on Copper Surfaces Chem. Mater. 2011, 23, 4543-4547
39. Wang, H.; Wang, G.; Bao, P.; Yang, S.; Zhu, W.; Xie, X.; Zhang, W.-J. Controllable Synthesis of Submillimeter Single-Crystal Monolayer Graphene Domains on Copper Foils by Suppressing Nucleation J. Am. Chem. Soc. 2012, 134, 3627-3630
40. Li, X. S.; Magnuson, C. W.; Venugopal, A.; Tromp, R. M.; Hannon, J. B.; Vogel, E. M.; Colombo, L.; Ruoff, R. S. Large-Area Graphene Single Crystals Grown by Low-Pressure Chemical Vapor Deposition of Methane on Copper J. Am. Chem. Soc. 2011, 133, 2816-2819
41. Li, X. S.; Magnuson, C. W.; Venugopal, A.; An, J. H.; Suk, J. W.; Han, B. Y.; Borysiak, M.; Cai, W. W.; Velamakanni, A.; Zhu, Y. W.; Fu, L. F.; Vogel, E. M.; Voelkl, E.; Colombo, L.; Ruoff, R. S. Graphene Films with Large Domain Size by a Two-Step Chemical Vapor Deposition Process Nano Lett. 2010, 10, 4328-4334
42. Zhang, Y.; Zhang, L. Y.; Kim, P.; Ge, M. Y.; Li, Z.; Zhou, C. Vapor Trapping Growth of Single-Crystalline Graphene Flowers: Synthesis, Morphology, and Electronic Properties Nano Lett. 2012, 12, 2810-2816
43. Scott, J. C.; Kaufman, J. H.; Brock, P. J.; DiPietro, R.; Salem, J.; Goitia, J. A. Degradation and Failure of MEH-PPV Light-Emitting Diodes J. Appl. Phys. 1996, 79, 2745-2751
44. Boehme, M.; Charton, C. Properties of ITO on PET film in Dependence on the Coating Conditions and Thermal Processing Surf. Coat. Technol. 2005, 200, 932-935
45. De Arco, L. G.; Zhang, Y.; Schlenker, C. W.; Ryu, K.; Thompson, M. E.; Zhou, C. W. Continuous, Highly Flexible, and Transparent Graphene Films by Chemical Vapor Deposition for Organic Photovoltaics ACS Nano 2010, 4, 2865-2873
46. Huang, P. Y.; Ruiz-Vargas, C. S.; van der Zande, A. M.; Whitney, W. S.; Levendorf, M. P.; Kevek, J. W.; Garg, S.; Alden, J. S.; Hustedt, C. J.; Zhu, Y.; Park, J.; McEuen, P. L.; Muller, D. A. Grains and Grain Boundaries in Single-Layer Graphene Atomic Patchwork Quilts Nature 2011, 469, 389
47. Yazyev, O. V.; Louie, S. G. Electronic Transport in Polycrystalline Graphene Nat. Mater. 2010, 9, 806-809
48. Shenoy, V. B.; Grantab, R.; Ruoff, R. S. Anomalous Strength Characteristics of Tilt Grain Boundaries in Graphene Science 2010, 330, 946-948
49. Dean, C. R.; Young, A. F.; Meric, I.; Lee, C.; Wang, L.; Sorgenfrei, S.; Watanabe, K.; Taniguchi, T.; Kim, P.; Shepard, K. L.; Hone, J. Boron Nitride Substrates for High-Quality Graphene Electronics Nat. Nanotechnol. 2010, 5, 722-726
50. Liu, N.; Fu, L.; Dai, B. Y.; Yan, K.; Liu, X.; Zhao, R. Q.; Zhang, Y. F.; Liu, Z. F. Universal Segregation Growth Approach to Wafer-Size Graphene from Non-Noble Metals Nano Lett. 2011, 11, 297-303