Laser-induced etching of few-layer graphene synthesized by Rapid-Chemical Vapour Deposition on Cu thin films

SpringerPlus

Volumn 1, Issue 1, 2012, Pages 1-10

  Piazzi, Marco ^a,b   Croin, Luca ^a,c   Vittone, Ettore ^b   Amato, Giampiero ^a  

^a ISTITUTO NAZIONALE DI RICERCA METROLOGICA   (Italy)

^b UNIVERSITY OF TURIN   (Italy)

^c POLITECNICO DI TORINO   (Italy)

Author keywords

Copper; CVD graphene; Heating ablation effects; Laser induced etching

Indexed keywords

EID: 84883162276     PISSN: None     EISSN: 21931801     Source Type: Journal    
DOI: 10.1186/2193-1801-1-52     Document Type: Article

References (52)

1. Bae S, Kim H, Lee Y, Xu X, Park JS, Zheng Y, Balakrishnan J, Lei T, Kim HR, Song YI, Kim YJ, Kim KS, Özyilmaz B, Ahn J H, Hong B H, Iijima S (2010) Roll-to-roll production of 30-inch graphene films for transparent electrodes. Nat Nanotechnol 5: 574-578
2. Balandin AA, Ghosh S, Bao W, Calizo I, Teweldebrhan D, Miao F, Lau CN (2008) Superior thermal conductivity of single-layer graphene. Nano Lett 8: 902-907
3. Cai W, Moore AL, Zhu Y, Li X, Chen S, Shi L, Ruoff RS (2010) Thermal transport in suspended and supported monolayer graphene grown by chemical vapor deposition. Nano Lett 10: 1645-1651
4. Calizo I, Balandin AA, Bao W, Miao F, Lau CN (2007) Temperature dependence of the raman spectra of graphene and graphene multilayers. Nano Lett 7: 2645-2649
5. Campos LC, Manfrinato VR, Sanchez-Yamagishi JD, Kong J, Jarillo-Herrero P (2009) Anisotropic etching and nanoribbon formation in single-layer graphene. Nano Lett 9: 2600-2604
6. Castro Neto AH, Guinea F, Peres NMR, Novoselov KS, Geim AK (2009) The electronic properties of graphene. Rev Mod Phys 81: 109-162
7. Coraux J, N'Diaye AT, Busse C, Michely T (2008) Structural coherency of graphene on Ir(111). Nano Lett 8: 565-570
8. Datta SS, Strachan DR, Khamis SM, Charlie Johnson A T (2008) Crystallographic etching of few-layer graphene. Nano Lett 8: 1912-1915
9. de Heer WA, Berger C, Wu X, First PN, Conrad EH, Li X, Li T, Sprinkle M, Hass J, Sadowski ML, Potemski M, Martinez G (2007) Epitaxial graphene. Solid State Commun 143: 92-100
10. Di C, Wei D, Yu G, Liu Y, Guo Y, Zhu D (2008) Patterned graphene as source/drain electrodes for bottom-contact organic field-effect transistors. Adv Mater 20: 3289-3293
11. Elias DC, Nair RR, Mohiuddin TMG, Morozov SV, Blake P, Halsall MP, Ferrari AC, Boukhvalov DW, Katsnelson MI, Geim AK, Novoselov KS (2009) Control of graphene's properties by reversible hydrogenation: evidence for Graphane. Science 323: 610-613
12. Emtsev KV, Bostwick A, Horn K, Jobst J, Kellogg GL, Ley L, McChesney JL, Ohta T, Reshanov SA, R̈ohrl J, Rotenberg E, Schmid AK, Waldmann D, Weber HB, Seyller T (2009) Towards wafer-size graphene layers by atmospheric pressure graphitization of silicon carbide. Nat Mater 8: 203-207
13. Ferrari AC, Meyer JC, Scardaci V, Casiraghi C, Lazzeri M, Mauri F, Piscanec S, Jiang D, Novoselov KS, Roth S, Geim AK (2006) Raman spectrum of graphene and graphene layers. Phys Rev Lett 187401(1)-187401(4)
14. Gilje S, Han S, Wang M, Wang KL, Kaner RB (2007) A chemical route to graphene for device applications. Nano Lett 7: 3394-3398
15. Han GH, Chae SJ, Kim ES, G̈uneş F, Lee IH, Lee SW, Lee SY, Lim SC, Jeong HK, Jeong MS, Lee YH (2011) Laser thinning for monolayer graphene formation: heat sink and interference effect. ACS Nano 5: 263-268
16. Hass J, de Heer WA, Conrad EH (2008) The growth and morphology of epitaxial multilayer graphene. J Phys-Condens Mat 20: 323202(1)-323202(27)
17. Ismach A, Druzgalski C, Penwell S, Schwartzberg A, Zheng M, Javey A, Bokor J, Zhang Y (2010) Direct chemical vapor deposition of graphene on dielectric surfaces. Nano Lett 10: 1542-1548
18. Kim H, Mattevi C, Calvo MR, Oberg JO, Artiglia L, Agnoli S, Hirjibehedin CF, Chhowalla M, Saiz E (2012) Activation energy paths for graphene nucleation and growth on Cu. ACS Nano 6: 3614-3623
19. Kim KS, Zhao Y, Jang H, Lee SY, Kim JM, Kim KS, Ahn JH, Kim P, Choi JY, Hong BH (2009) Large-scale pattern growth of graphene films for stretchable transparent electrodes. Nature 457: 706-710
20. Kondo D, Sato S, Yagi K, Harada N, Sato M, Nihei M, Yokoyama N (2010) Low-temperature synthesis of graphene and fabrication of top-gated field effect transistors without using transfer processes. Appl Phys Expr 3: 025102(1)-025102(3)
21. Lee Y, Bae S, Jang H, Jang S, Zhu SE, Sim SH, Song YI, Hong BH, Ahn JH (2010) Wafer-scale synthesis and transfer of graphene films. Nano Lett 10: 490-493
22. Lee CG, Park S, Ruoff RS, Dodabalapur A (2009) Integration of reduced graphene oxide into organic field-effect transistors as conducting electrodes and as a metal modification layer. Appl Phys Lett 95: 023304(1)-023304(3)
23. Lee C, Wei X, Kysar JW, Hone J (2008) Measurement of the elastic properties and intrinsic strength of monolayer graphene. Science 321: 385-388
24. Li X, Cai W, An J, Kim S, Nah J, Yang D, Piner R, Velamakanni A, Jung I, Tutuc E, Banerjee SK, Colombo L, Ruoff RS (2009a) Large-area synthesis of high-quality and uniform graphene films on copper foils. Science 324: 1312-1314
25. Li X, Cai W, Colombo L, Ruoff RS (2009b) Evolution of graphene growth on Ni and Cu by carbon isotope labeling. Nano Lett 9: 4268-4272
26. Liu W, Chung CH, Miao CQ, Wang YJ, Li BY, Ruan LY, Patel K, Park YJ, Woo J, Xie YH (2010) Chemical vapor deposition of large area few layer graphene on Si catalyzed with nickel films. Thin Solid Films 518: S128-S132
27. Liu L, Ryu S, Tomasik MR, Stolyarova E, Jung N, Hybertsen MS, Steigerwald ML, Brus LE, Flynn GW (2008) Graphene oxidation: thickness-dependent etching and strong chemical doping. Nano Lett 8: 1965-1970
28. Malard LM, Pimenta MA, Dresselhaus G, Dresselhaus MS (2009) Raman spectroscopy in graphene. Phys Rep 473: 51-87
29. Martoccia D, Willmott PR, Brugger T, Bj̈orck M, G̈unther S, Schlep̈utz CM, Cervellino A, Pauli SA, Patterson BD, Marchini S, Wintterlin J, Moritz W, Greber T (2008) Graphene on Ru(0001): a 25 × 25 supercell. Phys Rev Lett 101: 126102(1)-126102(4)
30. Mattevi C, Kim H, Chhowalla M (2011) A review of chemical vapor deposition of graphene on copper. J Mater Chem 21: 3324-3334
31. Miao C, Zheng C, Liang O, Xie YH (2011) Chemical vapor deposition of graphene. In: Mikhailov S (ed) Physics and applications of graphene-experiments. In Tech Rijeka, pp 37-54
32. Nandamuri G, Roumimov S, Solanki R (2010) Chemical vapor deposition of graphene films. Nanotechnology 21: 145604(1)-145604(4)
33. Ni ZH, Wang HM, Ma Y, Kasim J, Wu YH, Shen ZX (2008a) Tunable stress and controlled thickness modification in graphene by annealing. ACS Nano 2: 1033-1039
34. Ni ZH, Wang YY, Yu T, Shen ZX (2008b) Raman spectroscopy and imaging of Graphene. Nano Res 1: 273-291
35. Novoselov KS, Geim AK, Morozov SV, Jiang D, Zhang Y, Dubonos SV, Grigorieva IV, Firsov AA (2004) Electric field effect in atomically thin carbon films. Science 306: 666-669
36. Obraztsov AN, Obraztsov EA, Tyurnina AV, Zolotukhin AA (2007) Chemical vapor deposition of thin graphite films of nanometer thickness. Carbon 45: 2017-2021
37. Paredes JI, Villar-Rodil S, Martínez-Alonso A, Tascón JMD (2008) Graphene oxide dispersions in organic solvents. Langmuir 24: 10560-10564
38. Peres NMR (2010) The transport properties of graphene: an introduction. Rev Mod Phys 82: 2673-2700
39. Peres NMR, Guinea F, Castro Neto AH (2006) Electronic properties of disordered two-dimensional carbon. Phys Rev B 73: 125411(1)-125411(23)
40. Reina A, Jia X, Ho J, Nezich D, Son H, Bulovic V, Dresselhaus MS, Kong J (2009) Large area, few-layer graphene films on arbitrary substrates by chemical vapor deposition. Nano Lett 9: 30-35
41. Sasaki M, Yamada Y, Ogiwara Y, Yagyu S, Yamamoto S (2000) Moiré contrast in the local tunneling barrier height images of monolayer graphite on Pt(111). Phys Rev B 61: 15653-15656
42. Schniepp HC, Li JL, McAllister MJ, Sai H, Herrera-Alonso M, Adamson DH, Prud'homme RK, Car R, Saville DA, Iav Aksay (2006) Functionalized single graphene sheets derived from splitting graphite oxide. J Phys Chem B 110: 8535-8539
43. Somani PR, Somani SP, Umeno M (2006) Planes nano-graphenes from camphor by CVD. Chem Phys Lett 430: 56-59
44. Sprinkle M, Siegel D, Hu Y, Hicks J, Tejeda A, Taleb-Ibrahimi A, Le Févre P, Bertran F, Vizzini S, Enriquez H, Chiang S, Soukiassian P, Berger C, de Heer WA, Lanzara A, Conrad EH (2009) First direct observation of a nearly ideal graphene band structure. Phys Rev Lett 103: 226803(1)-226803(4)
45. Starr DE, Pazhetnov EM, Stadnichenko AI, Boronin AI, Shaikhutdinov SK (2006) Carbon films grown on Pt(111) as supports for model gold catalysts. Surf Sci 600: 2688-2695
46. Su CY, Lu AY, Wu CY, Li YT, Liu KK, Zhang W, Lin SY, Juang ZY, Zhong YL, Chen FR, Li LJ (2011) Direct formation of wafer scale graphene thin layers on insulating substrates by chemical vapor deposition. Nano Lett 11: 3612-3616
47. Sun PZ, Zhu M, Wang KL, Zhong ML, Wei JQ, Wu DH, Cheng Y, Zhu HW (2012) Photoinduced molecular desorption from graphene films. Appl Phys Lett 101: 053107(1)-053107(4)
48. Tao L, Lee J, Chou H, Holt M, Ruoff RS, Akinwande D (2012) Synthesis of high quality monolayer graphene at reduced temperature on hydrogen-enriched evaporated copper (111) films. ACS Nano 6: 2319-2325
49. Varchon F, Feng R, Hass J, Li X, Ngoc Nguyen B, Naud C, Mallet P, Veuillen JY, Berger C, Conrad EH, Magaud L (2007) Electronic structure of epitaxial graphene layers on SiC: effect of the substrate. Phys Rev Lett 99: 126805(1)-126805(4)
50. Wang X, Li X, Zhang L, Yoon Y, Weber PK, Wang H, Guo J, Dai H (2009a) N-Doping of graphene through electrothermal reactions with ammonia. Science 324: 768-771
51. Wang H, Wang Y, Cao X, Feng M, Lan G (2009b) Vibrational properties of graphene and graphene layers. J Raman Spectrosc 40: 1791-1796
52. Zhang Y, Tan YW, Stormer HL, Kim P (2005) Experimental observation of the quantum hall effect and Berry's phase in graphene. Nature 438: 201-204