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ECS Journal of Solid State Science and Technology

Volumn 1, Issue 1, 2012, Pages

Structural and electrical properties of terbium scandate films deposited by atomic layer deposition and high temperature annealing effects

(4) Cianci, E a Lamperti, A a Congedo, G a Spiga, S a

a LABORATORIO MDM (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84883039712 PISSN: 21628769 EISSN: 21628777 Source Type: Journal
DOI: 10.1149/2.011201jss Document Type: Article

Times cited : (8)

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