IN-plane thermal conduction and conductivity anisotropy in Ge 2Sb2Te5 films for phase change memory

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 10, Issue , 2010, Pages 651-658

  Li, Zijian ^a   Lee, Jaeho ^a   Reifenberg, John P ^a   Asheghi, Mehdi ^a   Philip Wong, H S ^a   Goodson, Kenneth E ^a  

^a Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ANTIMONY COMPOUNDS; GERMANIUM COMPOUNDS; HEAT CONDUCTION; INDIUM COMPOUNDS; MICROSTRUCTURE; PHASE CHANGE MATERIALS; TELLURIUM COMPOUNDS; THERMAL CONDUCTIVITY OF SOLIDS; THIN FILMS;

FACE-CENTRED CUBIC; HEXAGONAL CLOSE PACKED; MEASUREMENTS OF; MICROFABRICATED; OUT-OF-PLANE; PHASE-CHANGE MEMORY; PROGRAM/ERASE SPEED; THERMAL CONDUCTION; THERMAL CONDUCTIVITY MEASUREMENTS; THIN-FILMS;

PHASE CHANGE MEMORY;

EID: 84881392838     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2010-40459     Document Type: Conference Paper

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