Lower friction and higher wear resistance of fluorine-incorporated amorphous carbon films

Surface and Interface Analysis

Volumn 45, Issue 9, 2013, Pages 1329-1333

  Cui, Jinfeng ^a   Qiang, Li ^b   Zhang, Bin ^b   Yang, Tao ^a,b   Zhang, Junyan ^b  

^a LANZHOU UNIVERSITY OF TECHNOLOGY   (China)

^b LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

Author keywords

amorphous hydrogenated carbon films; fluorine doping; fluorine modification; tribological properties

Indexed keywords

AMORPHOUS HYDROGENATED CARBON FILMS; FLUORINE DOPING; FLUORINE MODIFICATIONS; FRICTION COEFFICIENTS; HYDROGENATED AMORPHOUS CARBON; HYDROGENATED AMORPHOUS CARBON (A-C:H); TRIBOLOGICAL BEHAVIORS; TRIBOLOGICAL PROPERTIES;

AMORPHOUS CARBON; AMORPHOUS FILMS; FLUORINE; FRICTION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTOR DOPING; TRIBOLOGY;

CARBON FILMS;

EID: 84881376095     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.5283     Document Type: Article

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