Fabrication of fluorine-terminated diamond-like carbon thin film using a hyperthermal atomic fluorine beam

Diamond and Related Materials

Volumn 20, Issue 5-6, 2011, Pages 703-706

  Kanda, Kazuhiro ^a   Yamada, Noriko ^b   Yokota, Kumiko ^c   Tagawa, Masahito ^c   Niibe, Masahito ^a   Okada, Makoto ^a   Haruyama, Yuichi ^a   Matsui, Shinji ^a  

^a UNIVERSITY OF HYOGO   (Japan)

^b DAI NIPPON PRINTING CO LTD   (Japan)

^c KOBE UNIVERSITY   (Japan)

Author keywords

Fluorine terminated diamond like carbon; Hyperthermal atomic fluorine beam; Near edge X ray absorption fine structure; Wettability; X ray photoelectron spectroscopy

Indexed keywords

ATOMIC FLUORINE; C-F BONDING; DIAMOND-LIKE CARBON; DIAMOND-LIKE CARBON THIN FILMS; DLC FILM; FLUORINE SOURCE; HIGH HARDNESS; HYDROPHOBIC SURFACES; MODIFIED DLC; NEAR-EDGE X-RAY ABSORPTION FINE STRUCTURE; NEAR-EDGE X-RAY ABSORPTION FINE STRUCTURE SPECTRUM; SURFACE MODIFICATION; WATER DROP; WETTABILITY; X RAY PHOTOELECTRON SPECTRA;

ABSORPTION; ATOMS; CONTACT ANGLE; DIAMONDS; HYDROPHOBICITY; IRRADIATION; PHOTOELECTRON SPECTROSCOPY; PHOTONS; SURFACE CHEMISTRY; X RAY ABSORPTION; X RAY PHOTOELECTRON SPECTROSCOPY; X RAYS;

FLUORINE;

EID: 79956158548     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2011.03.010     Document Type: Article

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