Femtosecond laser-induced removal of silicon nitride layers from doped and textured silicon wafers used in photovoltaics

Thin Solid Films

Volumn 542, Issue , 2013, Pages 420-425

  Bonse, J ^a   Mann, G ^a   Kruger J ^a   Marcinkowski, M ^b   Eberstein, M ^b  

^a BAM FEDERAL INSTITUTE FOR MATERIALS RESEARCH AND TESTING   (Germany)

^b FRAUNHOFER INSTITUTE FOR CERAMIC TECHNOLOGIES AND SYSTEMS   (Germany)

Author keywords

FS laser ablation; Laser processing; Photovoltaics; Silicon nitride; Solar cell

Indexed keywords

CENTRAL WAVELENGTH; FS-LASER; LASER INDUCED; LASER PROCESS; MULTI-CRYSTALLINE SILICON; PHOTOVOLTAICS; PROCESS WINDOW; TEXTURED SILICON WAFERS;

ANTIREFLECTION COATINGS; CHEMICAL ANALYSIS; COATINGS; LASER ABLATION; SCANNING ELECTRON MICROSCOPY; SECONDARY ION MASS SPECTROMETRY; SILICON; SILICON NITRIDE; SOLAR CELLS; ULTRAFAST LASERS; ULTRASHORT PULSES;

SILICON WAFERS;

EID: 84881316639     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2013.07.005     Document Type: Article

References (29)

1. J. Bovatsek, A. Tamhankar, R.S. Patel, N.M. Bulgakova, and J. Bonse Thin Solid Films 518 2010 2897
2. A.D. Compaan, I. Matulionis, and S. Nakade Opt. Laser Eng. 34 2000 15
3. M.C. Gower Opt. Express 7 2000 56
4. A. Grohe, A. Knorz, J. Nekarda, U. Jäger, N. Mingirulli, and R. Preu Proc. SPIE 7202 2006 7202P
5. D. Kray, S. Hopman, A. Spiegel, B. Richerzhagen, and G.P. Willeke Solar Energy Materials & Solar Cells 91 2007 1638
6. A. Grohe, R. Preu, S.W. Glunz, and G.P. Willeke Proc. SPIE 6197 2006 619717
7. E. Van Kerschaver, and G. Beaucarne Prog. Photovolt: Res. Appl. 14 2006 107
8. E. Schneiderlöchner, R. Preu, R. Ludemann, and S.W. Glunz Prog. Photovolt: Res. Appl. 10 2002 29
9. A. Sugianto, J. Bovatsek, S. Wenham, B. Tjahjono, X. Guangqi, Y. Yu, B. Hallam, B. Xue, N. Kuepper, C.M. Chong, and R. Patel Proceedings of the 35th IEEE Photovoltaic Specialists Conference 2010 689
10. J.J. Blecher, T.A. Palmer, E.W. Reutzel, and T. DebRoy J. Appl. Phys. 112 2012 114906
11. J.J. Blecher, T.A. Palmer, E.W. Reutzel, and T. DebRoy J. Appl. Phys. 112 2012 114907
12. M. Geier, M. Eberstein, H. Grießmann, U. Partsch, L. Völkel, R. Böhme, G. Mann, J. Bonse, and J. Krüger 26th European Photovoltaic Solar Energy Conference (26th EPVSEC), Hamburg, Germany, September 5, 2011, Conference Proceedings 2011 1243
13. M. Eberstein, M. Geier, H. Grießmann, U. Partsch, R. Böhme, S. Pentzien, R. Koter, G. Mann, J. Bonse, and J. Krüger 26th European Photovoltaic Solar Energy Conference (26th EPVSEC), Hamburg, Germany, September 5, 2011, Conference Proceedings 2011 1220
14. J. Bonse, and J. Krüger J. Appl. Phys. 107 2010 054902
15. D. Bäuerle Laser Processing and Chemistry 4th edition 2011 Springer-Verlag Berlin
16. T.C. Chong, M.H. Hong, and L.P. Shi Laser & Photonics Reviews 4 2010 123
17. V. Rana, Z. Zhang, C. Lazik, R. Mishra, T. Weidman, and C. Eberspacher 23rd European Photovoltaic Solar Energy Conference (23rd EPVSEC), Valencia, Spain, September 1, 2008, Conference Proceedings 2008 1942
18. S.A.G.D. Correia, J. Lossen, M. Wald, K. Neckermann, and M. Bähr 22nd European Photovoltaic Solar Energy Conference (22nd EPVSEC), Milano, Italy, September 3, 2007, Conference Proceedings 2007 1061
19. A. Knorz, M. Peters, A. Grohe, C. Harmel, and R. Preu Prog. Photovolt: Res. Appl. 17 2009 127
20. A. Schoonderbeek, V. Schütz, O. Haupt, and U. Stute Journal of Laser Micro/Nanoengineering 5 2010 248
21. S. Hermann, T. Dezhdar, N.-P. Harder, R. Brendel, M. Seibt, and S. Stroj J. Appl. Phys. 108 2010 114514
22. M. Bähr, G. Heinrich, K.-P. Stolberg, T. Wütherich, and R. Böhme 25th European Photovoltaic Solar Energy Conference (25th EPVSEC), Valencia, Spain, September 6, 2010, Conference Proceedings 2010 2490
23. G. Heinrich, M. Bähr, K. Stolberg, T. Wütherich, M. Leonhardt, and A. Lawerenz Energy Procedia 8 2011 592
24. K. Stolberg, S. Friedel, B. Kremser, M. Leitner, and Y. Atsuta Journal of Laser Micro/Nanoengineering 5 2010 125
25. T. Rublack, and G. Seifert Opt. Mater. Express 1 2011 543
26. A. Hertwig, S. Martin, W. Kautek, and J. Krüger Proc. SPIE 5962 2005 59622J
27. J.M. Liu Opt. Lett. 7 1982 196
28. J. Bonse, S. Baudach, W. Kautek, E. Welsch, and J. Krüger Thin Solid Films 408 2002 297
29. W. Martienssen, and H. Warlimont Springer Handbook of Condensed Matter and Materials Data 2005 Springer-Verlag Berlin