Industrial applications of laser micromachining

Optics Express

Volumn 7, Issue 2, 2000, Pages 56-67

  Gower, Malcolm C ^a  

^a Exitech Ltd   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; INDUSTRIAL APPLICATIONS; LASER APPLICATIONS; LASER PULSES; LIGHT SOURCES; MACHINE TOOLS; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; SURFACE CLEANING; THIN FILMS;

LASER MATERIALS PROCESSING; MATERIAL ABLATION; MICROFABRICATION; MICROSTRUCTURE FABRICATION;

MICROMACHINING;

EID: 0010579111     PISSN: 10944087     EISSN: None     Source Type: Journal    
DOI: 10.1364/OE.7.000056     Document Type: Article

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