Laser-silicon interaction for selective emitter formation in photovoltaics. I. Numerical model and validation

Journal of Applied Physics

Volumn 112, Issue 11, 2012, Pages

  Blecher, J J ^a   Palmer, T A ^a   Debroy, T ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEVELOPING PROCESS; DOPANT CONCENTRATIONS; DOPANT PROFILE; HEAT AND MASS TRANSFER; LASER DOPING; LASER POWER; MOLTEN ZONES; OUTPUT POWER; PHOTOVOLTAICS; PROCESSING CONDITION; PROCESSING PARAMETERS; SELECTIVE EMITTERS; TRANSPORT MECHANISM; TRAVEL SPEED;

CONTINUOUS WAVE LASERS; GEOMETRY; MATHEMATICAL MODELS; PHOSPHORUS; SEMICONDUCTOR DOPING; SILICON; SILICON WAFERS;

ZONE MELTING;

EID: 84871185377     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4768537     Document Type: Article

References (45)

1. L. Hong, X. Wang, Rusli, H. Wang, H. Zheng, and H. Yu, J. Appl. Phys. 111, 043106 (2012). 10.1063/1.3686612
2. K. Mangersnes, S. E. Foss, and A. Thogersen, J. Appl. Phys. 107, 043518 (2010). 10.1063/1.3309382
3. C. Ulzhofer, P. P. Altermatt, N. Harder, and R. Brendel, J. Appl. Phys. 107, 104509 (2010). 10.1063/1.3373612
4. R. Bock, S. Mau, J. Schmidt, and R. Brendel, Appl. Phys. Lett. 96, 263507 (2010). 10.1063/1.3456536
5. S. Hermann, T. Dezhdar, N. Harder, R. Brendel, M. Seibt, and S. Stroj, J. Appl. Phys. 108, 114514 (2010). 10.1063/1.3493204
6. A. Raghavan, T. A. Palmer, and T. DebRoy, J. Appl. Phys. 111, 024903 (2012). 10.1063/1.3675442
7. F. Colville, Photovolt. Int. 5, 6 (2008).
8. D. Bouhafs, A. Moussi, M. Boumaour, S. E. K. Abaidia, L. Mahiou, and A. Messaoud, J. Phys. D: Appl. Phys. 40, 2728 (2007). 10.1088/0022-3727/40/9/008
9. A. Mouhoub, B. Benyahia, and B. Mahmoudi, Eur. Phys. J. Appl. Phys. 30, 3 (2005). 10.1051/epjap:2005014
10. D. S. Ruby, P. Yang, M. Roy, and S. Narayanan, in Proceedings of the 26th IEEE Photovoltaic Specialists Conference, Anaheim, California (1997), pp. 39-42.
11. L. Pirozzi, G. Arabito, F. Artuso, V. Barbarossa, U. Besi-Vetrella, S. Loreti, P. Mangiapane, and E. Salza, Sol. Energy Mater. Sol. Cells 65, 287 (2001). 10.1016/S0927-0248(00)00104-5
12. J.-J. Ho, Y.-T. Cheng, J.-J. Liou, C.-H. Lin, D. Z. Dimitrov, A. Hsu, S.-Y. Tsai, C.-K. Wang, W. Lee, and K. L. Wang, Electron. Lett. 46, 1559 (2010). 10.1049/el.2010.2471
13. B. S. Tjahjono, J. H. Guo, L. Hameiri, L. Mai, A. Sugianto, S. Wang, and S. R. Wenham, in Proceedings of the 22nd European Photovoltaic Solar Energy Conference, Milan, Italy (2007), pp. 966-969.
14. A. McEvoy, T. Markvart, and L. Castaner, Pracitcal Handbook of Photovoltaics: Fundamentals and Applications, 2nd ed. (Academic, Amsterdam, 2012), p. 116.
15. J. R. Kohler, P. Grabitz, S. J. Eisele, T. C. Roder, and J. H. Werner, in Proceedings of the 24th European Photovoltaic Solar Energy Conference, Hamburg, Germany (2009), pp. 1847-1850.
16. M. Schulz-Ruhtenberg, A. Haeberle, R. Russell, J. R. Hernandez, and S. Krantz, J. Laser Micro/Nanoeng. 6, 64 (2011). 10.2961/jlmn.2011.01.0014
17. M. Hasegawa, K. Hirata, S. Takashi, T. Takayama, T. Funatani, E. Sugimura, S. Tsujii, A. Tani, and T. Fuyuki, in Proceedings of the 35th IEEE Photovoltaic Specialists Conference, Honolulu, Hawaii (2010), pp. 3154-3157.
18. K. Hirata, A. Ogane, T. Saitoh, A. Kitiyanan, E. Sugimura, and T. Fuyuki, in Proceedings of the 24th European Photovoltaic Solar Energy Conference, Hamburg, Germany (2009), pp. 1708-1711.
19. A. Sugianto, J. Bovatsek, S. Wenham, B. Tjahjono, G. Xu, Y. Yao, B. Hallam, X. Bai, N. Kuepper, C. M. Chong, and R. Patel, in Proceedings of the 35th IEEE Photovoltaic Specialists Conference, Honolulu, Hawaii, 20 June-25 June 2010, pp. 689-694.
20. B. Hedrick, B. DeCesar, B. P. Downey, S. E. Mohney, J. Flemish, L. Zou, and E. W. Reutzel, " Processing conditions and characterization of laser fired contacts for solar cell devices. " (unpublished).
21. J. R. Kohler and S. Eisele, Prog. Photovoltaics 18, 334 (2010). 10.1002/pip.968
22. G. Poulain, D. Blanc, B. Semmache, Y. Pellegrin, and M. Lemiti, Energy Proc. 8, 587 (2011). 10.1016/j.egypro.2011.06.187
23. X. He, J. W. Elmer, and T. DebRoy, J. Appl. Phys. 97, 084909 (2005). 10.1063/1.1873032
24. X. He, T. DebRoy, and P. W. Fuerschbach, J. Appl. Phys. 96, 4547 (2004). 10.1063/1.1785868
25. A. De and T. DebRoy, J. Phys. D 37 (1), 140-150 (2004). 10.1088/0022-3727/37/1/023
26. H. Zhao and T. DebRoy, J. Appl. Phys. 93 (12), 10089-10096 (2003). 10.1063/1.1573732
27. H. Zhao and T. DebRoy, Metall. Trans. B 32, 163 (2001). 10.1007/s11663-001-0018-6
28. W. Zhang, G. G. Roy, J. W. Elmer, and T. DebRoy, J. Appl. Phys. 93, 3022 (2003). 10.1063/1.1540744
29. S. V. Patankar, Numerical Heat Transfer and Fluid Flow (Hemisphere, New York, 1980).
30. C. J. Smithells, Metals Reference Book, 7th ed. (1992).
31. H. Kawamura, H. Fukuyama, M. Watanabe, and T. Hibiya, Meas. Sci. Technol. 16, 386 (2005). 10.1088/0957-0233/16/2/009
32. W. K. Rhim and K. Ohsaka, J. Cryst. Growth 208, 313 (2000). 10.1016/S0022-0248(99)00437-6
33. S. Mishra and T. DebRoy, J. Appl. Phys. 98 (4) 044902 (2005). 10.1063/1.2001153
34. A. De and T. DebRoy, J. Appl. Phys. 95, 5230 (2004). 10.1063/1.1695593
35. J. L. Murray and A. J. McCalister, Bull. Alloy Phase Diagrams 5, 74 (1984). 10.1007/BF02868729
36. L. B. Pakratz, Thermodynamic Properties of Elements and Oxides (1982).
37. C. J. Glassbrenner and G. A. Slack, Phys. Rev. 134, A1058 (1964). 10.1103/PhysRev.134.A1058
38. E. Yamasue, M. Susa, H. Fukuyama, and K. Nagata, J. Cryst. Growth 234, 121 (2002). 10.1016/S0022-0248(01)01673-6
39. D. F. Gibbons, Phys. Rev. 112, 136 (1958). 10.1103/PhysRev.112.136
40. L. B. Pankratz, Thermodynamic Properties of Carbides, Nitrides, and Other Selected Substances (Bulletin United States Department of Interior, Bureau of Mines, 1994).
41. H. Kodera, Jpn. J. Appl. Phys., Part 1 2, 212 (1963). 10.1143/JJAP.2.212
42. K. Thyagarajan and A. Ghatak, Lasers: Fundamentals and Applications, 2nd ed. (Springer, New York, 2010).
43. S. Kou and Y. H. Wang, Metall. Trans. A 17, 2265 (1986). 10.1007/BF02645924
44. U. Zastrow, L. Houben, D. Meertens, A. Grohe, T. Brammer, and E. Schneiderlochner, Appl. Surf. Sci. 252, 7082 (2006). 10.1016/j.apsusc.2006.02. 114
45. W. Zhang, C. H. Kim, and T. DebRoy, J. Appl. Phys. 95, 5220 (2004). 10.1063/1.1699486