-
1
-
-
0037255711
-
Metal silicides in CMOS technology: Past, present, and future trends
-
Zhang SL, Ostling M: Metal silicides in CMOS technology: past, present, and future trends. Crit Rev Solid State Mat Sci 2003, 28:1-129.
-
(2003)
Crit Rev Solid State Mat Sci
, vol.28
, pp. 1-129
-
-
Zhang, S.L.1
Ostling, M.2
-
3
-
-
4344663116
-
Self-aligned silicides for ohmic contacts in complementary metal-oxide-semiconductor technology
-
Zhang SL, Smith U: Self-aligned silicides for ohmic contacts in complementary metal-oxide-semiconductor technology. Vac J Sci Technol A 2004, 22:1361-1370.
-
(2004)
Vac J Sci Technol A
, vol.22
, pp. 1361-1370
-
-
Zhang, S.L.1
Smith, U.2
-
4
-
-
23744433409
-
Fully silicided metal gates for high-performance CMOS technology: A review
-
Maszara WP: Fully silicided metal gates for high-performance CMOS technology: a review. J Electrochem Soc 2005, 152:G550-G555.
-
(2005)
J Electrochem Soc
, vol.152
-
-
Maszara, W.P.1
-
5
-
-
72549084128
-
Synthesis and applications of metal silicide nanowires
-
Schmitt AL, Higgins JM, Szczech JR, Jin S: Synthesis and applications of metal silicide nanowires. J Mater Chem 2010, 20:223-235.
-
(2010)
J Mater Chem
, vol.20
, pp. 223-235
-
-
Schmitt, A.L.1
Higgins, J.M.2
Szczech, J.R.3
Jin, S.4
-
6
-
-
33747843618
-
Fabrication of iron silicide nanowires from nanowire templates
-
Yamamoto K, Kohno H, Takeda S, Ichikawa S: Fabrication of iron silicide nanowires from nanowire templates. Appl Phys Lett 2006, 89:083107.
-
(2006)
Appl Phys Lett
, vol.89
, pp. 083107
-
-
Yamamoto, K.1
Kohno, H.2
Takeda, S.3
Ichikawa, S.4
-
7
-
-
34548169162
-
In-situ control of atomic-scale Si layer with huge strain in the nanoheterostructure NiSi/Si/NiSi through point contact reaction
-
Lu KC, Wu WW, Wu HW, Tanner CM, Chang JP, Chen LJ, Tu KN: In-situ control of atomic-scale Si layer with huge strain in the nanoheterostructure NiSi/Si/NiSi through point contact reaction. Nano Lett 2007, 7:2389-2394.
-
(2007)
Nano Lett
, vol.7
, pp. 2389-2394
-
-
Lu, K.C.1
Wu, W.W.2
Wu, H.W.3
Tanner, C.M.4
Chang, J.P.5
Chen, L.J.6
Tu, K.N.7
-
8
-
-
77958038235
-
Growth of multiple metal/semiconductor nanoheterostructures through point and line contact reactions
-
Wu WW, Lu KC, Wang CW, Hsieh HY, Chen SY, Chou YC, Yu SY, Chen LJ, Tu KN: Growth of multiple metal/semiconductor nanoheterostructures through point and line contact reactions. Nano Lett 2010, 10:3984-3989.
-
(2010)
Nano Lett
, vol.10
, pp. 3984-3989
-
-
Wu, W.W.1
Lu, K.C.2
Wang, C.W.3
Hsieh, H.Y.4
Chen, S.Y.5
Chou, Y.C.6
Yu, S.Y.7
Chen, L.J.8
Tu, K.N.9
-
9
-
-
79960216244
-
The influence of surface oxide on the growth of metal/semiconductor nanowires
-
Lu KC, Wu WW, Ouyang H, Lin YC, Huang Y, Wang CW, Wu ZW, Huang CW, Chen LJ, Tu KN: The influence of surface oxide on the growth of metal/semiconductor nanowires. Nano Lett 2011, 11:2753-2758.
-
(2011)
Nano Lett
, vol.11
, pp. 2753-2758
-
-
Lu, K.C.1
Wu, W.W.2
Ouyang, H.3
Lin, Y.C.4
Huang, Y.5
Wang, C.W.6
Wu, Z.W.7
Huang, C.W.8
Chen, L.J.9
Tu, K.N.10
-
10
-
-
84862905516
-
Single-crystalline Ge nanowires and Cu3Ge/Ge nano-heterostructures
-
Hsu SC, Hsin CL, Yu SY, Huang CW, Wang CW, Lu CM, Lu KC, Wu WW: Single-crystalline Ge nanowires and Cu3Ge/Ge nano-heterostructures. Cryst Eng Comm 2012, 14:4570-4574.
-
(2012)
Cryst Eng Comm
, vol.14
, pp. 4570-4574
-
-
Hsu, S.C.1
Hsin, C.L.2
Yu, S.Y.3
Huang, C.W.4
Wang, C.W.5
Lu, C.M.6
Lu, K.C.7
Wu, W.W.8
-
11
-
-
78649303881
-
Controlled large strain of Ni silicide/Si/Ni silicide nanowire heterostructures and their electron transport properties
-
Wu WW, Lu KC, Chen KN, Yeh PH, Wang CW, Lin YC, Huang Y: Controlled large strain of Ni silicide/Si/Ni silicide nanowire heterostructures and their electron transport properties. Appl Phys Lett 2010, 97:203110.
-
(2010)
Appl Phys Lett
, vol.97
, pp. 203110
-
-
Wu, W.W.1
Lu, K.C.2
Chen, K.N.3
Yeh, P.H.4
Wang, C.W.5
Lin, Y.C.6
Huang, Y.7
-
12
-
-
48949116074
-
Observation of Ni silicide formation and field emission properties of Ni silicide nanowires
-
Kim J, Lee ES, Han CS, Kang Y, Kim D, Anderson WA: Observation of Ni silicide formation and field emission properties of Ni silicide nanowires. Microelectron Eng 2008, 85:1709-1712.
-
(2008)
Microelectron Eng
, vol.85
, pp. 1709-1712
-
-
Kim, J.1
Lee, E.S.2
Han, C.S.3
Kang, Y.4
Kim, D.5
Anderson, W.A.6
-
13
-
-
18844446933
-
Spontaneous nickel monosilicide nanowire formation by metal induced growth
-
Kim J, Anderson WA: Spontaneous nickel monosilicide nanowire formation by metal induced growth. Thin Solid Films 2005, 483:60-65.
-
(2005)
Thin Solid Films
, vol.483
, pp. 60-65
-
-
Kim, J.1
Anderson, W.A.2
-
14
-
-
36248990211
-
Spontaneous chemical vapor growth of NiSi nanowires and their metallic properties
-
Kim CJ, Kang K, Woo YS, Ryu KG, Moon H, Kim JM, Zang DS, Jo MH: Spontaneous chemical vapor growth of NiSi nanowires and their metallic properties. Adv Mater 2007, 19:3637-3642.
-
(2007)
Adv Mater
, vol.19
, pp. 3637-3642
-
-
Kim, C.J.1
Kang, K.2
Woo, Y.S.3
Ryu, K.G.4
Moon, H.5
Kim, J.M.6
Zang, D.S.7
Jo, M.H.8
-
15
-
-
34547357593
-
Electrical characteristics of single and doubly connected Ni silicide nanowire grown by plasma-enhanced chemical vapor deposition
-
Kim J, Shin DH, Lee ES, Han CS, Park YC: Electrical characteristics of single and doubly connected Ni silicide nanowire grown by plasma-enhanced chemical vapor deposition. Appl Phys Lett 2007, 90:253103.
-
(2007)
Appl Phys Lett
, vol.90
, pp. 253103
-
-
Kim, J.1
Shin, D.H.2
Lee, E.S.3
Han, C.S.4
Park, Y.C.5
-
16
-
-
6344222993
-
2Si nanowires
-
2Si nanowires. Appl Phys A 2004, 79:1853-1856.
-
(2004)
Appl Phys A
, vol.79
, pp. 1853-1856
-
-
Yan, X.Q.1
Yuan, H.J.2
Wang, J.X.3
Liu, D.F.4
Zhou, Z.P.5
Gao, Y.6
Song, L.7
Liu, L.F.8
Zhou, W.Y.9
Wang, G.10
Xie, S.S.11
-
18
-
-
27944502478
-
2 nanowires
-
2 nanowires. Appl Phys Lett 2005, 87:223113.
-
(2005)
Appl Phys Lett
, vol.87
, pp. 223113
-
-
Chueh, Y.L.1
Chou, L.J.2
Cheng, S.L.3
Chen, L.J.4
Tsai, C.J.5
Hsu, C.M.6
Kung, S.C.7
-
20
-
-
21344469977
-
2 nanowires
-
2 nanowires. Appl Phys Lett 2005, 86:243103.
-
(2005)
Appl Phys Lett
, vol.86
, pp. 243103
-
-
Xiang, B.1
Wang, Q.X.2
Wang, Z.3
Zhang, X.Z.4
Liu, L.Q.5
Xu, J.6
Yu, D.P.7
-
21
-
-
33745138199
-
Vapor phase synthesis and characterization of ε-FeSi nanowires
-
Ouyang L, Thrall ES, Deshmukh MM, Park H: Vapor phase synthesis and characterization of ε-FeSi nanowires. Adv Mater 2006, 18:1437-1440.
-
(2006)
Adv Mater
, vol.18
, pp. 1437-1440
-
-
Ouyang, L.1
Thrall, E.S.2
Deshmukh, M.M.3
Park, H.4
-
23
-
-
34547352750
-
Single-crystal semiconducting chromium disilicide nanowires synthesized via chemical vapor transport
-
Szczech JR, Schmitt AL, Bierman MJ, Jin S: Single-crystal semiconducting chromium disilicide nanowires synthesized via chemical vapor transport. Chem Mater 2007, 19:3238-3243.
-
(2007)
Chem Mater
, vol.19
, pp. 3238-3243
-
-
Szczech, J.R.1
Schmitt, A.L.2
Bierman, M.J.3
Jin, S.4
-
25
-
-
33748324757
-
Synthesis and properties of single-crystal FeSi nanowires
-
Schmitt AL, Bierman MJ, Schmeisser D, Himpsel FJ, Jin S: Synthesis and properties of single-crystal FeSi nanowires. Nano Lett 2006, 6:1617-1621.
-
(2006)
Nano Lett
, vol.6
, pp. 1617-1621
-
-
Schmitt, A.L.1
Bierman, M.J.2
Schmeisser, D.3
Himpsel, F.J.4
Jin, S.5
-
26
-
-
66949157497
-
Composition-tuned Co(n)Si nanowires: Location-selective simultaneous growth along temperature gradient
-
Seo K, Lee S, Yoon H, In J, Varadwaj KSK, Jo Y, Jung MH, Kim J, Kim B: Composition-tuned Co(n)Si nanowires: location-selective simultaneous growth along temperature gradient. ACS Nano 2009, 3:1145-1150.
-
(2009)
ACS Nano
, vol.3
, pp. 1145-1150
-
-
Seo, K.1
Lee, S.2
Yoon, H.3
In, J.4
Varadwaj, K.S.K.5
Jo, Y.6
Jung, M.H.7
Kim, J.8
Kim, B.9
-
27
-
-
80055007751
-
Growth of single-crystalline cobalt silicide nanowires with excellent physical properties
-
Liang YH, Yu SY, Hsin CL, Huang CW, Wu WW: Growth of single-crystalline cobalt silicide nanowires with excellent physical properties. J Appl Phys 2011, 110:074302.
-
(2011)
J Appl Phys
, vol.110
, pp. 074302
-
-
Liang, Y.H.1
Yu, S.Y.2
Hsin, C.L.3
Huang, C.W.4
Wu, W.W.5
-
28
-
-
70350241140
-
Cobalt silicide nanostructures: Synthesis, electron transport, and field emission properties
-
Tsai CI, Yeh PH, Wang CY, Wu HW, Chen US, Lu MY, Wu WW, Chen LJ, Wang ZL: Cobalt silicide nanostructures: synthesis, electron transport, and field emission properties. Cryst Growth Des 2009, 9:4514-4518.
-
(2009)
Cryst Growth Des
, vol.9
, pp. 4514-4518
-
-
Tsai, C.I.1
Yeh, P.H.2
Wang, C.Y.3
Wu, H.W.4
Chen, U.S.5
Lu, M.Y.6
Wu, W.W.7
Chen, L.J.8
Wang, Z.L.9
-
29
-
-
78650101132
-
Cobalt silicide nanocables grown on Co films: Synthesis and physical properties
-
Hsin CL, Yu SY, Wu WW: Cobalt silicide nanocables grown on Co films: synthesis and physical properties. Nanotechnology 2010, 21:485602.
-
(2010)
Nanotechnology
, vol.21
, pp. 485602
-
-
Hsin, C.L.1
Yu, S.Y.2
Wu, W.W.3
-
30
-
-
33749643483
-
Metallic single-crystal CoSi nanowires via chemical vapor deposition of single-source precursor
-
Schmitt AL, Lei Z, Schmeiβer D, Himpsel FJ, Jin S: Metallic single-crystal CoSi nanowires via chemical vapor deposition of single-source precursor. J Phys Chem B 2006, 110:18142-18146.
-
(2006)
J Phys Chem B
, vol.110
, pp. 18142-18146
-
-
Schmitt, A.L.1
Lei, Z.2
Schmeißer, D.3
Himpsel, F.J.4
Jin, S.5
|