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Journal of Materials Chemistry C

Volumn 1, Issue 25, 2013, Pages 4020-4024

Location-controlled parallel and vertical orientation by dewetting-induced block copolymer directed self-assembly

(6) Koh, Haeng Deog a Park, Youn Jung a Jeong, Seong Jun a Kwon, Young Nam a Han, In Taek a Kim, Mi Jeong a

a Samsung Advanced Institute of Technology (SAIT) (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CAPILLARY FORCE; DE-WETTING; DIRECTED SELF-ASSEMBLY; GUIDE PATTERNS; SELF-ASSEMBLED; SI SUBSTRATES; SUB-LAYERS; THERMAL-ANNEALING;

BLOCK COPOLYMERS; CYLINDERS (SHAPES); SILICON;

SUBSTRATES;

EID: 84880149535 PISSN: 20507534 EISSN: 20507526 Source Type: Journal
DOI: 10.1039/c3tc30278d Document Type: Article

Times cited : (9)

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