Constructing the OGE for promoting tool group productivity in semiconductor manufacturing

International Journal of Production Research

Volumn 45, Issue 3, 2007, Pages 509-524

  Chien, Chen Fu ^a   Chen, Hsin Kai ^a   Wu, Jei Zheng ^a   Hu, Chih Han ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Overall equipment efficiency; Semiconductor manufacturing; Tool group; Tool productivity

Indexed keywords

DATA REDUCTION; EFFICIENCY; INDEXING (MATERIALS WORKING); STATISTICAL METHODS;

OVERALL EQUIPMENT EFFICIENCY; SEMICONDUCTOR MANUFACTURING; TOOL GROUP; TOOL PRODUCTIVITY;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 33847023612     PISSN: 00207543     EISSN: 1366588X     Source Type: Journal    
DOI: 10.1080/00207540600792515     Document Type: Conference Paper

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