Closed-loop measurement of equipment efficiency and equipment capacity

IEEE Transactions on Semiconductor Manufacturing

Volumn 10, Issue 1, 1997, Pages 84-97

  Leachman, Robert C ^a  

^a DEPARTMENT OF INDUSTRIAL ENGINEERING AND OPERATIONS RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; DATA ACQUISITION; EFFICIENCY; MAINTENANCE; MATHEMATICAL MODELS; PRODUCTION CONTROL; PRODUCTIVITY; SEMICONDUCTOR MATERIALS; TOTAL QUALITY MANAGEMENT;

CLOSED LOOP MEASUREMENT; EQUIPMENT CAPACITY; EQUIPMENT EFFICIENCY; PRODUCTION PLANNING; SEMICONDUCTOR INDUSTRY;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031078236     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.554490     Document Type: Article

References (12)

1. S. Nakajima, Introduction to TPM. Cambridge, MA: Productivity Press, 1988.
2. S. Nakajima, Ed., TPM Development Program. Cambridge, MA Productivity Press, Inc., 1989.
3. Nachi-Fujikoshi Corp., Ed., Training for TPM. Cambridge, MA: Productivity, 1990.
4. H. Naguib, "A roadmap for the implementation of TPM in a semiconductor operation," Proc. IEEE Int. Semiconductor Manufacturing Science Symp. (ISMSS 93), New York, 1993.
5. Semiconductor Equipment and Materials International (SEMI), "E10-92 guideline for the definition and measurements of equipment reliability, availability and maintainability," in Book of SEMI Standards Equipment Automation/Hardware Volume. Mountain View, CA: Semiconductor Equipment and Materials International, 1992.
6. L. M. Wein, "Scheduling Semiconductor Wafer Fabrication," IEEE Trans. Semiconduct. Manufact., vol. 1, p. 115-129, May 1988.
7. C. R. Glassey and M. G. C. Resende, "Closed-loop job release control for VLSI circuit manufacturing," IEEE Trans. Semiconduct. Manufact., vol. 1, pp. 36-46, Feb. 1988.
8. R. C. Leachman, M. Solorzano, and C. R. Glassey, "A queue management policy for the release of factory work orders," Proc. First Symp. Semiconductor Factory Management Systems, Nov. 16-17, 1990, Texas A&M University, College Station, TX, 1990.
9. R. C. Leachman, "Modeling techniques for automated production planning in the semiconductor industry," in Optimization in Industry, T. A. Ciriani and R. C. Leachman, Eds. Sussex, U.K.: Wiley, 1993, pp. 1-30.
10. R. C. Leachman and T. F. Carmon, "On Capacity modeling for production planning with alternative machine types," IIE Trans., vol. 24, p. 62-72, Sept., 1992.
11. R. C. Leachman and D. J. Raar, "Optimized production planning and delivery quotation in the semiconductor industry," in Optimization in Industry 2, T. A. Ciriani and R. C. Leachman, Eds. Sussex, U.K.: Wiley, 1994, pp. 108-130.
12. R. C. Leachman, R. F. Benson, C. Liu, and D. J. Raar, "IMPReSS: An automated production planning and delivery quotation system at Harris Corporation - Semiconductor Sector," Interfaces, vol. 26, pp. 6-37, Jan-Feb, 1996.