CMOS-compatible, athermal silicon ring modulators clad with titanium dioxide

Optics Express

Volumn 21, Issue 12, 2013, Pages 13958-13968

  Djordjevic, Stevan S ^a   Shang, Kuanping ^a   Guan, Binbin ^a   Cheung, Stanley T S ^a   Liao, Ling ^b   Basak, Juthika ^b   Liu, Hai Feng ^b   Yoo, S J B ^a  

^a University of California Davis   (United States)

^b INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; MAGNETRON SPUTTERING; MODULATORS; NANOPHOTONICS; OXIDES; SILICON; TITANIUM DIOXIDE;

FABRICATION AND CHARACTERIZATIONS; FABRICATION PROCESS; HIGH EXTINCTION RATIOS; LOW TEMPERATURES; MICRO RESONATORS; RF-MAGNETRON SPUTTERING; SILICON RING RESONATOR; THERMO-OPTIC COEFFICIENTS;

AMORPHOUS SILICON;

SILICON; TITANIUM; TITANIUM DIOXIDE;

CHEMISTRY; DEVICE FAILURE ANALYSIS; DEVICES; EQUIPMENT DESIGN; SEMICONDUCTOR; SURFACE PLASMON RESONANCE; TELECOMMUNICATION; ARTICLE; EQUIPMENT; EQUIPMENT FAILURE;

EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; SEMICONDUCTORS; SILICON; SURFACE PLASMON RESONANCE; TELECOMMUNICATIONS; TITANIUM;

EID: 84879346518     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.21.013958     Document Type: Article

References (27)

1. L. Zhou, K. Kashiwagi, K. Okamoto, R. Scott, N. Fontaine, D. Ding, V. Akella, and S. J. Yoo, "Towards athermal optically-interconnected computing system using slotted silicon microring resonators and RF-photonic comb generation, " Appl. Phys., A Mater. Sci. Process. 95(4), 1101-1109 (2009).
2. V. Raghunathan, W. N. Ye, J. Hu, T. Izuhara, J. Michel, and L. Kimerling, "Athermal operation of Silicon waveguides: spectral, second order and footprint dependencies, " Opt. Express 18(17), 17631-17639 (2010).
3. P. Alipour, E. S. Hosseini, A. A. Eftekhar, B. Momeni, and A. Adibi, "Athermal performance in high-Q polymer-clad silicon microdisk resonators, " Opt. Lett. 35(20), 3462-3464 (2010).
4. V. Raghunathan, J. Hu, W. N. Ye, J. Michel, and L. C. Kimerling, "Athermal silicon ring resonators, " in Integrated Photonics Research, Silicon and Nanophotonics (Optical Society of America, 2010).
5. C. Decker, F. Masson, and R. Schwalm, "Weathering resistance of waterbased UV-cured polyurethane-acrylate coatings, " Polym. Degrad. Stabil. 83(2), 309-320 (2004).
6. C. Decker and K. Zahouily, "Photodegradation and photooxidation of thermoset and UV-cured acrylate polymers, " Polym. Degrad. Stabil. 64(2), 293-304 (1999).
7. I. M. Hodge, "Physical aging in polymer glasses, " Science 267(5206) 1945-1947 (1995).
8. B. Guha, B. B. Kyotoku, and M. Lipson, "CMOS compatible athermal silicon microring resonators, " arXiv preprint arXiv:0911.3444 (2009).
9. B. Guha, K. Preston, and M. Lipson, "Athermal silicon microring electro-optic modulator, " Opt. Lett. 37(12), 2253-2255 (2012).
10. K. Shang, S. S. Djordjevic, J. Li, L. Liao, J. Basak, H.-F. Liu, and S. J. B. Yoo, "CMOS-compatible Titanium Dioxide Deposition for Athermalization of Silicon Waveguides, " accepted for publication in Conference on Lasers and Electro-Optics (CLEO), Paper CF2I.5 (San Jose, 2013).
11. S. S. Djordjevic, K. Shang, B. Guan, S. T. S. Cheung, C. Qin, L. Liao, J. Basak, H.-F. Liu, and S. J. B. Yoo, "Athermal Silicon Ring Modulators Clad with Titanium Dioxide by RF Magnetron Sputtering, " Paper TuC4, Optical Interconnects Conference, 2012 IEEE (Santa Fe, 2013).
12. O. Powell, D. Sweatman, and H. B. Harrison, "The use of titanium and titanium dioxide as masks for deep silicon etching, " Smart Mater. Struct. 15(1), S81-S86 (2006). (Pubitemid 43131619)
13. Y. Ma, Y. Ono, and S. T. Hsu, "Deposition and treatment of TiO2 as an alternative for ultrathin gate dielectrics, " in MRS Proceedings (Cambridge University Press, 1999).
14. H. Y. Jeong, S. K. Kim, J. Y. Lee, and S.-Y. Choi, "Role of interface reaction on resistive switching of metal/amorphous TiO2/Al RRAM devices, " J. Electrochem. Soc. 158(10), H979-H982 (2011).
15. X. Song and C. G. Takoudis, "Cyclic Chemical-Vapor-Deposited TiO2/Al2O3 Film Using Trimethyl Aluminum, Tetrakis (diethylamino) titanium, and O2, " J. Electrochem. Soc. 154(8), G177-G182 (2007). (Pubitemid 47014299)
16. N. Martin, C. Rousselot, D. Rondot, F. Palmino, and R. Mercier, "Microstructure modification of amorphous titanium oxide thin films during annealing treatment, " Thin Solid Films 300(1-2), 113-121 (1997). (Pubitemid 127393831)
17. J. Heller, "Reactive sputtering of metals in oxidizing atmospheres, " Thin Solid Films 17(2), 163-176 (1973).
18. C. Ottermann and K. Bange, "Correlation between the density of TiO< sub> 2 films and their properties, " Thin Solid Films 286(1-2), 32-34 (1996). (Pubitemid 126388537)
19. D. Wicaksana, A. Kobayashi, and A. Kinbara, "Process effects on structural properties of TiO2 thin films by reactive sputtering, " J. Vac. Sci. Technol. A 10(4), 1479-1482 (1992).
20. S. T. Cheung, B. Guan, S. S. Djordjevic, K. Okamoto, and S. Yoo, "Low-loss and high contrast silicon-oninsulator (SOI) arrayed waveguide grating, " in CLEO: Science and Innovations(Optical Society of America, 2012).
21. L. Chen, C. R. Doerr, Y.-K. Chen, and T.-Y. Liow, "Low-loss and broadband cantilever couplers between standard cleaved fibers and high-index-contrast Si3N4 or Si waveguides, " Photonics Technology Letters, IEEE 22(23), 1744-1746 (2010).
22. Q. Xu, S. Manipatruni, B. Schmidt, J. Shakya, and M. Lipson, "12.5 Gbit/s carrier-injection-based silicon microring silicon modulators, " Opt. Express 15(2), 430-436 (2007). (Pubitemid 46168487)
23. B. K. Garside, J. P. Marton, and T. Tricker, "Measurement of distributed losses in optical waveguides: a new technique, " Appl. Opt. 30(6), 689-695 (1991).
24. B. R. Moss, S. Chen, M. Georgas, J. Shainline, J. S. Orcutt, J. C. Leu, M. Wade, C. Yu-Hsin, K. Nammari, W. Xiaoxi, L. Hanqing, R. Ram, M. A. Popovic, and V. Stojanovic, "A 1.23pJ/b 2.5Gb/s monolithically integrated optical carrier-injection ring modulator and all-digital driver circuit in commercial 45nm SOI, " in Solid-State Circuits Conference Digest of Technical Papers (ISSCC), 2013 IEEE International(2013), 126-127.
25. A. C. Turner-Foster, M. A. Foster, J. S. Levy, C. B. Poitras, R. Salem, A. L. Gaeta, and M. Lipson, "Ultrashort free-carrier lifetime in low-loss silicon nanowaveguides, " Opt. Express 18(4), 3582-3591 (2010).
26. S. Manipatruni, Q. Xu, B. Schmidt, J. Shakya, and M. Lipson, "High speed carrier injection 18 Gb/s silicon micro-ring electro-optic modulator, " in Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE(IEEE, 2007), 537-538.
27. L. Zhou, K. Okamoto, and S. J. B. Yoo, "Athermalizing and trimming of slotted silicon microring resonators with UV-sensitive PMMA upper-cladding, " IEEE Photon. Technol. Lett. 21(17), 1175-1177 (2009).